紧凑型共振电离Mass Spectrometer用于钾的痕量分析
Development of a Compact Resonance Ionization Mass Spectrometer for Trace Element Analysis of Potassium
摘要：
利用两个半导体激光器和一个四极杆质谱仪，研制了一台小型共振电离质谱仪，用于钾的痕量元素分析。借助于激光二极管的窄线宽，通过将它们与每种钾同位素的$4\,^2{\rm S}_{1/2}$基态的已知超精细分裂宽度进行比较，测量出405 nm线的$^{40}{\rm K}$和$^{41}{\rm K}$相对于$^{39}{\rm K}$的同位素位移，分别为$207\pm13$ MHz和$451\pm10$ MHz，对应于$4\,^2$ S $_{1/2}\rightarrow$ $5\,^2$ P $^\circ_{1/2}$的跃迁。在我们的装置中，$\sim10^{-6}$量级的总体检测效率表明RIMS可用于分析某些材料上或中的痕量金属杂质，例如半导体晶片的污染评估。
英文摘要：
A compact resonance ionization mass spectrometer is developed using two laser diodes and a quadrupole mass spectrometer to perform trace element analysis of potassium. With the help of a narrow linewidth of the laser diode, the isotope shifts of $^{40}{\rm K}$ and $^{41}{\rm K}$ of the 405 nm line with respect to $^{39}{\rm K}$, corresponding to the transition of $4\,^2$S$_{1/2}\rightarrow$ $5\,^2$P$^\circ_{1/2}$, are measured to be $207\pm13$ MHz and $451\pm10$ MHz, respectively, by comparing them to the known hyperfine splitting widths of the $4\,^2{\rm S}_{1/2}$ ground state of each potassium isotope. The overall detection efficiency of an order of $\sim10^{-6}$ in our setup indicates the availability of RIMS to the analysis of the trace metal impurities on or in a certain material such as the contamination assessment of semiconductor wafers.
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