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arXiv 1010.0474cond-mat.mtrl-sci
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晶体位错对4 H- SiC p-n二极管反向性能的影响

Effect of crystallographic dislocations on the reverse performance of 4H-SiC p-n diodes

Feng Zhao, Mohammad M. Islam, Biplob K. Daas, Tangali S. Sudarshan

摘要:

定量研究了4 H-SiC p-n二极管中螺位错、基面位错和螺刃位错等晶体学位错缺陷及其在有源区和JTE区的位置对器件反向性能的影响。结果发现,二极管中较高的漏23电流与基面位错有关,而较低的击穿电压归因于24螺旋位错。当位错在活性区中时,上述影响比在JTE区中的25严重。此外,由于闭芯性质,穿透刃位错对p-n二极管的26反向性能的影响不如其他位错严重,尽管其密度高得多。

英文摘要:

A quantitative study was performed to investigate the impact of crystallographic dislocation defects, 21 including screw dislocation, basal plane dislocation, and threading edge dislocation, and their locations in 22 active and JTE region, on the reverse performance of 4H-SiC p-n diodes. It was found that higher leakage 23 current in diodes is associated with basal plane dislocations, while lower breakdown voltage is attributed to 24 screw dislocations. The above influence increases in severity when the dislocation is in the active region than 25 in the JTE region. Furthermore, due to the closed-core nature, the impact of threading edge dislocation on the 26 reverse performance of the p-n diodes is less severe than that of other dislocations although its density is 27 much higher.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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