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arXiv 1008.0403cond-mat.mtrl-sci
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金刚石在单晶硅上摩擦发射强度的研究

On The Strength of Tribo-Emission in Sliding of Diamond on Single Crystal Silicon

Hisham A Abdel-aal

摘要:

摩擦发射是与各种材料的滑动相关的现象。这种现象被认为与半导体精密加工中使用的金刚石工具的磨损有关。因此,发射的物理学最近获得了重要性。许多研究人员研究了固体表面刮擦过程中的发射。他们观察到摩擦引起的电子、离子和光子发射的强度按以下顺序降低:绝缘体>半导体>导体。进行了许多实验来比较半导体Si的情况下的带负电荷的粒子的发射与从选定的绝缘体的发射,已经报道了摩擦发射强度的明显下降趋势,随着接触在相同的磨损轨迹上进行金刚石-Si。尽管所有这些实验都是在真空中进行的,但在Si的情况下,弱信号的来源和信号强度的降低集中在表面制备期间在空气中形成的介电氧化硅膜的存在下,或者因为样品具有单晶性质。本文提供了一种替代的解释摩擦发射粒子的行为的基础上的压力引起的半导体到金属的相变,发生在Si在滑动。它示出,由于反复滑动,磨损轨迹经历一个金刚石-金属的转变,使大量的材料下的金刚石滑块立即进行。

英文摘要:

Triboemission is a phenomenon associated with the sliding of variety of materials. The phenomenon is thought to be related to wear of diamond tools used in precision machining of semiconductors. As such, the physics of emission has recently acquired importance. Many researchers studied emission during scratching of solid surfaces. They observed that the intensity of tribo-induced emission of the electrons, ions, and photons decrease in the order: insulator>semiconductor> conductor. Many experiments conducted to compare the emission of negatively-charged particles in case of the semiconductors Si with that from selected insulators have reported a clear decreasing trend of the tribo-emission intensity as contact progressed over the same wear track for diamond-on-Si. Despite that all of these experiments were performed in vacuum, the origin of the weak signals and the decrease of signal strength in the case of Si centred on the presence of dielectric silicon oxide films formed in air during surface preparation or because of the samples being of mono-crystalline nature. This paper offers an alternative explanation to the behaviour of tribo-emitted particles based on the pressure induced semi-conductor-to-metallic phase transformation that takes place in Si during sliding. It is shown that due to repeated sliding, the wear tracks experience a semiconductor-to- metal transformation that renders the bulk of material immediately under the diamond slider conducting.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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