We present a design and a top-down fabrication method for realizing diamond nanowires in both bulk single crystal and polycrystalline diamond. Numerical modeling was used to study coupling between a Nitrogen Vacancy (NV) color center and optical modes of a nanowire, and to find an optimal range of nanowire diameters that allows for large collection efficiency of emitted photons. Inductively coupled plasma (ICP) reactive ion etching (RIE) with oxygen is used to fabricate the nanowires. Drop-casted nanoparticles (including $\mathrm{Au}$, $\mathrm{SiO_{2}}$ and $\mathrm{Al_2O_3}$) as well as electron beam lithography defined spin-on glass and evaporated $\mathrm{Au}$ have been used as an etch mask. We found $\mathrm{Al_2O_3}$ nanoparticles to be the most etch resistant. At the same time FOx e-beam resist (spin-on glass) proved to be a suitable etch mask for fabrication of ordered arrays of diamond nanowires. We were able to obtain nanowires with near vertical sidewalls in both polycrystalline and single crystal diamond. The heights and diameters of the polycrystalline nanowires presented in this paper are $\unit[\approx1]{μm}$ and $\unit[120-340]{nm}$, respectively, having a $\unit[200]{nm/min}$ etch rate. In the case of single crystal diamond (types Ib and IIa) nanowires the height and diameter for different diamonds and masks shown in this paper were $\unit[1-2.4]{μm}$ and $\unit[120-490]{nm}$ with etch rates between $\unit[190-240]{nm/min}$.
Barcode magnetic nanowires typically comprise a multilayer magnetic structure in a single body with more than one segment type. Interestingly, owing to selective functionalization and novel interactions between the layers, barcode magnetic nanowires have attracted significant attention, particularly in the field of bioengineering. However, an analysis of their magnetic properties at the individual nanowire level remains challenging. With this background, herein, we investigated the characterization of magnetic nanowires at room temperature under ambient conditions based on magnetic images obta…
The practical implementation of many quantum technologies relies on the development of robust and bright single photon sources that operate at room temperature. The negatively charged silicon-vacancy (SiV-) color center in diamond is a possible candidate for such a single photon source. However, due to the high refraction index mismatch to air, color centers in diamond typically exhibit low photon out-coupling. An additional shortcoming is due to the random localization of native defects in the diamond sample. Here we demonstrate deterministic implantation of Si ions with high conversion effic…
Nitrogen Vacancy (NV) centers in diamond are a platform for several important quantum technologies, including sensing, communication and elementary quantum processors. In this letter we demonstrate the creation of NV centers by implantation using a deterministic single ion source. For this we sympathetically laser-cool single $^{15}\textrm{N}_2^+$ molecular ions in a Paul trap and extract them at an energy of 5.9\,keV. Subsequently the ions are focused with a lateral resolution of 121(35)\,nm and are implanted into a diamond substrate without any spatial filtering by apertures or masks. After …
Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membranes with up to about one millimeter in size. We use commercially available diamond plates (thickness 50 $μ$m) in an inductively coupled reactive ion etching process which is based on argon, oxygen and SF$_6$. We thus avoid using toxic, corrosive feed gases and add an alternative to previously presente…
Coupling nitrogen-vacancy centers in diamond to optical cavities is a promising way to enhance the efficiency of diamond based quantum networks. An essential aspect of the full toolbox required for the operation of these networks is the ability to achieve microwave control of the electron spin associated with this defect within the cavity framework. Here, we report on the fabrication of an integrated platform for microwave control of an NV center electron spin in an open, tunable Fabry-Perot microcavity. A critical aspect of the measurements of the cavity's finesse reveals that the presented f…
We are proposing a novel fabrication method for single crystal diamond scanning probes, exploiting the method of Faraday cage angled etching (FCAE). Electron-beam lithography (EBL) and inductively coupled plasma (ICP) etching as state-of-the-art method is often limiting the achievable diamond structure geometries in aspect ratio and complexity. This poses challenges, e.g., for realizing nitrogen vacancy (NV) centre magnetometry scanning probes. Combining a planar design with FCAE offers several advantages over the established fabrication technology of nano-opto-mechanical diamond devices. Here…
Focused MeV ion beams with micrometric resolution are suitable tools for the direct writing of conductive graphitic channels buried in an insulating diamond bulk. Their effectiveness has been shown for the fabrication of multi-electrode ionizing radiation detectors and cellular biosensors. In this work we investigate such fabrication method for the electrical excitation of color centers in diamond. Differently from optically-stimulated light emission from color centers in diamond, electroluminescence (EL) requires a high current flowing in the diamond subgap states between the electrodes. With…
Integration of diamond nanobeams with SnVs on Al2O3 waveguides for scalable quantum photonic chip application
Fujitsu Limited（富士通有限公司）；Research Center for Advanced Science and Technology, University of Tokyo（东京大学先进科学技术研究中心）；Delft University of Technology（代尔夫特理工大学）
We investigate native nitrogen (NV) and silicon vacancy (SiV) color centers in commercially available, heteroepitaxial, wafer-sized, mm thick, single-crystal diamond. We observe single, native NV centers with a density of roughly 1 NV per $μm^3$ and moderate coherence time ($T_2 = 5 μs$) embedded in an ensemble of SiV centers. Low-temperature spectroscopy of the SiV zero phonon line fine structure witnesses high crystalline quality of the diamond especially close to the growth surface, consistent with a reduced dislocation density. Using ion implantation and plasma etching, we verify the possi…
The nanoscale localization of individual paramagnetic defects near an electrical circuit is an important step for realizing hybrid quantum devices with strong spin-microwave photon coupling. Here, we demonstrate the fabrication of an array of individual NV centers in diamond near a metallic nanowire deposited on top of the substrate. We determine the relative position of each NV center with $\sim$10\,nm accuracy, using it as a vector magnetometer to measure the field generated by passing a dc current through the wire.
We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths from 0.59$μ$m to 1.43$μ$m under illumination at 1550nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire width around 1$μ$m.
We report the design and fabrication of diamond spin-mechanical resonators embedded in a two-dimensional (2D) phononic crystal square lattice. The rectangular resonator features GHz in-plane compression modes protected by the phononic band gap of the square lattice. A membrane-in-bulk approach is developed for the fabrication of the suspended 2D structure. This approach overcomes the limitations of the existing approaches, which are either incompatible with the necessary high-temperature thermal annealing or unsuitable for 2D structures with the required feature size. Graded soft oxygen etchin…
Color centers in diamond are promising spin qubits for quantum computing and quantum networking. In photon-mediated entanglement distribution schemes, the efficiency of the optical interface ultimately determines the scalability of such systems. Nano-scale optical cavities coupled to emitters constitute a robust spin-photon interface that can increase spontaneous emission rates and photon extraction efficiencies. In this work, we introduce the fabrication of 2D photonic crystal slab nanocavities with high quality factors and cubic wavelength mode volumes -- directly in bulk diamond. This plana…
We report on the fabrication and characterization of a single-crystal diamond device for the electrical stimula- tion of light emission from nitrogen-vacancy (NV0) and other defect-related centers. Pairs of sub-superficial graphitic micro-electrodes embedded in insulating diamond were fabricated by a 6 MeV C3+ micro-beam irra- diation followed by thermal annealing. A photoluminescence (PL) characterization evidenced a low radiation damage concentration in the inter-electrode gap region, which did not significantly affect the PL features domi- nated by NV centers. The operation of the device in…
Semiconductor quantum dots (QDs) are being regarded as the primary unit for a wide range of advanced and emerging technologies including electronics, optoelectronics, photovoltaics and biosensing applications as well as the domain of q-bits based quantum information processing. Such QDs are suitable for several novel device applications for their unique property of confining carriers 3-dimensionally creating discrete quantum states. However, the realization of such QDs in practice exhibits serious challenge regarding their fabrication in array with desired scalability and repeatability as well…
We investigate the circuit quantum electrodynamics of anharmonic superconducting nanowire oscillators. The sample circuit consists of a capacitively shunted nanowire with a width of about 20 nm and a varying length up to 350 nm, capacitively coupled to an on-chip resonator. By applying microwave pulses we observe Rabi oscillations, measure coherence times and the anharmonicity of the circuit. Despite the very compact design, simple top-down fabrication and high degree of disorder in the oxidized (granular) aluminum material used, we observe lifetimes in the microsecond range.
Integrating atomic quantum memories based on color centers in diamond with on-chip photonic devices would enable entanglement distribution over long distances. However, efforts towards integration have been challenging because color centers can be highly sensitive to their environment, and their properties degrade in nanofabricated structures. Here, we describe a heterogeneously integrated, on-chip, III-V diamond platform designed for neutral silicon vacancy (SiV0) centers in diamond that circumvents the need for etching the diamond substrate. Through evanescent coupling to SiV0 centers near t…
We demonstrate the fabrication of photonic crystal nanobeam cavities with rectangular cross section into bulk diamond. In simulation, these cavities have an unloaded quality factor (Q) of over 1 million. Measured cavity resonances show fundamental modes with spectrometer-limited quality factors larger than 14,000 within 1nm of the NV center's zero phonon line at 637nm. We find high cavity yield across the full diamond chip with deterministic resonance trends across the fabricated parameter sweeps.
