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arXiv 0902.4878cond-mat.mtrl-sci
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Pb(Fe1/2Nb1/2)O3薄膜的外延生长及结构表征

Epitaxial growth and structural characterization of Pb(Fe1/2Nb1/2)O3 thin films

W. Peng, N. Lemée, J Holc, M. Kosec, R. Blinc, M. G. Karkut

摘要:

采用脉冲激光沉积法在(0 0 1)SrTiO 3基片上生长了Pb(Fe 1/2 Nb 1/2)O3(PFN)铁酸铅薄膜。研究了沉积条件对相纯度的影响。由于相似的热力学稳定性空间,烧绿石相通常与PFN钙钛矿相共存。通过优化动力学参数,我们成功地确定了一个沉积窗口,导致在外延钙钛矿相PFN薄膜中没有可识别的痕迹出现在X射线衍射图中的杂质相。厚度在20和200 nm之间的PFN膜是光滑的,并且与衬底外延取向,并且如通过与衬底轴对齐的RHEED条纹所证明的。X射线衍射分析表明,薄膜完全c轴取向,具有良好的结晶质量和较低的镶嵌率(X射线摇摆曲线FWHM<0.09)。用原子力显微镜研究了薄膜的表面粗糙度。均方根粗糙度在50 nm厚的膜的0.9 nm至100 nm厚的膜的16 nm之间变化。我们还观察到晶粒尺寸,表面粗糙度和薄膜厚度之间的相关性。

英文摘要:

We have grown lead iron niobate thin films with composition Pb(Fe1/2Nb1/2)O3 (PFN) on (0 0 1) SrTiO3 substrates by pulsed laser deposition. The influence of the deposition conditions on the phase purity was studied. Due to similar thermodynamic stability spaces, a pyrochlore phase often coexists with the PFN perovskite phase. By optimizing the kinetic parameters, we succeeded in identifying a deposition window which resulted in epitaxial perovskite-phase PFN thin films with no identifiable trace of impurity phases appearing in the X-ray diffractograms. PFN films having thicknesses between 20 and 200 nm were smooth and epitaxially oriented with the substrate and as demonstrated by RHEED streaks which were aligned with the substrate axes. X-ray diffraction showed that the films were completely c-axis oriented and of excellent crystalline quality with low mosaicity (X-ray rocking curve FWHM<0.09). The surface roughness of thin films was also investigated by atomic force microscopy. The root-mean-square roughness varies between 0.9 nm for 50-nm-thick films to 16 nm for 100-nm-thick films. We also observe a correlation between grain size, surface roughness and film thickness.

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