磁控共溅射Ni-Mn-Ga外延薄膜中的马氏体结构和孪晶
Martensite structures and twinning in substrate-constrained epitaxial Ni-Mn-Ga films deposited by a magnetron co-sputtering process
摘要：
为了获得Ni-Mn-Ga外延薄膜结晶在马氏体结构显示磁致重排（MIR）的马氏体变体，精细控制的组成是必需的。在这里，我们提出了如何共溅射过程可能有助于在Ni-Mn-Ga外延薄膜的发展。本文研究了用Ni-Mn-Ga三元靶和纯锰靶共溅射制备的一批Ni-Mn-Ga外延薄膜。共溅射工艺允许精确控制膜成分，并且能够在高温沉积期间保持Ni-Mn-Ga奥氏体的外延生长。它引起在室温下调节膜中的MIR-active 14-调制马氏体的含量，以及微观和宏观孪晶畴尺寸。
英文摘要：
In order to obtain Ni-Mn-Ga epitaxial films crystallized in martensite structures showing Magnetic-Induced Rearrangement (MIR) of martensite variants, a fine control of the composition is required. Here we present how the co-sputtering process might be helpful in the development of Ni-Mn-Ga epitaxial films. A batch of epitaxial Ni-Mn-Ga films deposited by co-sputtering of a Ni-Mn-Ga ternary target and a pure manganese target has been studied. The co-sputtering process allows a precise control of the film compositions and enables keeping the epitaxial growth of Ni-Mn-Ga austenite during deposition at high temperature. It gives rise to tune the content of the MIR-active 14-modulated martensite in the film at room temperature, as well as micro and macro-twinned domains sizes.
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