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arXiv 0806.3162cond-mat.mtrl-sci
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通量依赖的1.5 MeV自离子束诱导金纳米结构薄膜溅射

Flux dependent 1.5 MeV self-ion beam induced sputtering from Gold nanostructured thin films

J. Ghatak, B. Sundaravel, K. G. M. Nair, P. V. Satyam

摘要:

本文讨论了1.5MeV Au ~(2+)离子诱导金纳米结构溅射的四个重要方面(平均尺寸为7.6 nm,高度为6.9 nm)沉积在硅衬底上:(a)在6.3 × 10^12离子cm-2 s-1的离子通量下,Au溅射产率为312原子/离子的溅射产率约为之前报道的在相同辐照条件下在10^9离子cm-2 s-1的较低束流下的溅射产率的5倍,(b)溅射产额在较低注量下随注量增加而增加,在较高注量下随注量增加而减少对于纳米结构薄膜,溅射产额随着通量和注量的增加而增加,(27.5 nm Au沉积在Si上)(c)已发现溅射粒子的尺寸分布随入射光束通量而变化,在较高通量下显示出双峰分布,以及(d)从溅射粒子的尺寸分布得到的衰减指数显示出从1.5到2.5的反幂律依赖性入射光束通量的。指数值与现有的理论模型进行了比较,以了解潜在的机制。与光束通量相关的晶片温度的作用已被调用的溅射结果在纳米结构的薄膜和厚膜的定性理解。

英文摘要:

We discuss four important aspects of 1.5 MeV Au2+ ion-induced flux dependent sputtering from gold nanostrcutures (of an average size 7.6 nm and height 6.9 nm) that are deposited on silicon substrates: (a) Au sputtering yield at the ion flux of 6.3x10^12 ions cm-2 s-1 is found to be 312 atoms/ion which is about five times the sputtering yield reported earlier under identical irradiation conditions at a lower beam flux of 10^9 ions cm-2 s-1, (b) the sputtered yield increases with increasing flux at lower fluence and reduces at higher fluence (1.0x10^15 ions cm-2) for nanostructured thin films while the sputtering yield increases with increasing flux and fluence for thick films (27.5 nm Au deposited on Si) (c) Size distribution of sputtered particles has been found to vary with the incident beam flux showing a bimodal distribution at higher flux and (d) the decay exponent obtained from the size distributions of sputtered particles showed an inverse power law dependence ranging from 1.5 to 2.5 as a function of incident beam flux. The exponent values have been compared with existing theoretical models to understand the underlying mechanism. The role of wafer temperature associated with the beam flux has been invoked for a qualitative understanding of the sputtering results in both the nanostructured thin films and thick films.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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