通量依赖的MeV自离子对Au纳米结构的诱导效应：剧烈的质量输运和纳米硅化物的形成
Flux dependent MeV self-ion- induced effects on Au nanostructures: Dramatic mass transport and nano-silicide formation
摘要：
我们报告了在高通量（3.2x10^10至6.3x10^12离子cm-2 s-1）条件下，1.5 MeV Au 2+离子对沉积在Si（111）衬底上的平均尺寸为7.6 nm，高度为6.9 nm的孤立Au纳米结构的直接观察结果。发现从纳米结构的质量传输延伸到基板中约60 nm的距离，远远超过其尺寸。这种向前的质量输运进行了比较反冲注入轮廓使用SRIM模拟。观测到的异常与理论和模拟进行了讨论。在给定的能量下，入射通量在质量输运及其再分布中起主要作用。质量传输的基础上解释的热效应和创建的快速扩散路径在纳米级政权的过程中的离子辐照。不寻常的质量传输被发现与形成的金硅化物纳米合金在次表面。离子-纳米结构相互作用过程的复杂性已被讨论与熔化（在表面上的球形碎片的形式）现象的直接观察。采用透射电子显微镜、扫描透射电子显微镜和卢瑟福背散射光谱法对样品进行了分析。
英文摘要：
We report a direct observation of dramatic mass transport due to 1.5 MeV Au2+ ion impact on isolated Au nanostructures of an average size 7.6 nm and a height 6.9 nm that are deposited on Si (111) substrate under high flux (3.2x10^10 to 6.3x10^12 ions cm-2 s-1) conditions. The mass transport from nanostructures found to extend up to a distance of about 60 nm into the substrate, much beyond their size. This forward mass transport is compared with the recoil implantation profiles using SRIM simulation. The observed anomalies with theory and simulations are discussed. At a given energy, the incident flux plays a major role in mass transport and its re-distribution. The mass transport is explained on the basis of thermal effects and creation of rapid diffusion paths at nano-scale regime during the course of ion irradiation. The unusual mass transport is found to be associated with the formation of gold silicide nanoalloys at sub-surfaces. The complexity of the ion-nanostructure interaction process has been discussed with a direct observation of melting (in the form of spherical fragments on the surface) phenomena. The transmission electron microscopy, scanning transmission electron microscopy and Rutherford backscattering spectroscopy methods have been used.
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