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arXiv 0712.1289cond-mat.mtrl-sci
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前驱体介导外延生长的机制

Regimes of Precursor-Mediated Epitaxial Growth

A. Zangwill, D. D. Vvedensky

摘要:

讨论了外延生长的这些情况(OMVPE,CBE,ALE,MOMBE,GSMBE等)。当与分子前体相关的表面过程的动力学可能是速率限制时。重点放在与表面过程相关的各种{ \it特征长度尺度}的识别上。这些长度的相对大小的研究允许一个识别制度的定性不同的生长动力学作为温度和沉积通量的函数。该方法说明了一个简单的模型,考虑到沉积,扩散,解吸,解离,和一个单一的前体物种的步骤纳入,以及通常的过程中的原子扩散和步骤纳入。实验的影响进行了详细讨论。

英文摘要:

A discussion of epitaxial growth is presented for those situations (OMVPE, CBE, ALE, MOMBE, GSMBE, etc.) when the kinetics of surface processes associated with molecular precursors may be rate limiting. Emphasis is placed on the identification of various {\it characteristic length scales} associated with the surface processes. Study of the relative magnitudes of these lengths permits one to identify regimes of qualitatively different growth kinetics as a function of temperature and deposition flux. The approach is illustrated with a simple model which takes account of deposition, diffusion, desorption, dissociation, and step incorporation of a single precursor species, as well as the usual processes of atomic diffusion and step incorporation. Experimental implications are discussed in some detail.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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