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arXiv 0708.1822cond-mat.mtrl-sci
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纳米粒子在SU-8中的悬浮及纳米复合材料性能表征

Suspension of Nanoparticles in SU-8 and Characterization of Nanocomposite Properties

H. Chiamori, J. Brown, E. Adhiprakasha, E. Hantsoo, J. Straalsund, N. Melosh, B. Pruitt

摘要:

将金纳米球、单壁碳纳米管(SWNT)和金刚石物理结合到负性光刻胶SU-8中。将混合物旋涂到硅或铝涂覆的硅晶片上。将ASTM标准D 638拉伸试样在材料中光刻图案化,然后使用Microchem'Omnicoat或阳极金属溶解工艺从基材上剥离。SU-8的残余应力、弹性模量和粘度。SU-8/SWNT纳米复合材料的电阻率测量也进行了研究。我们发现SU-8试样的有效模量和粘度随着金刚烷和单壁碳纳米管的加入而降低。此外,SU-8/SWNT纳米复合材料显示电阻率随应变增加而变化,表明1重量% SU-8/SWNT纳米复合材料的应变计因子为约2-4。

英文摘要:

Gold nanospheres, single wall carbon nanotubes (SWNT), and diamonoids were phyically incorporated into the negative photoresist SU-8. the mixtures were spin cast onto silicon or aluminium coated silicon wafers. ASTM standard D638 tensile specimens were lithographically patterned in the materials and then released from the substrate using Microchem'Omnicoat or an anodic metal dissolution process. the residual stresses, elastic moduli, and viscosity of the SU-8. Resistivity measurements of SU-8/SWNT nanocomposites were also investigates. We found the effective modulus and viscosity of the SU-8 test specimens decreases with the addition of diamantane and SWNTs. Additionally, the SU-8/SWNT nanocomposites showed changes in resistivity with increased strain, suggesting a gauge factor for the 1 wt% SU-8/SWNT nanocomposite of approximately 2-4.

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