电学计量中的微机电元件
Microelectromechanical components in electrical metrology
摘要：
微机电系统（MEMS）可以提供一个有竞争力的替代传统技术在电气精密测量。本文总结了最近的工作，在发展的MEMS解决方案的电气计量。讨论了基于MEMS的基准电压源、RMS到DC转换器、高频功率传感器和基准振荡器。组件的主要工作原理是在微加工硅结构中电力和机械弹簧力之间的平衡。在RMS传感器和RMS到DC转换器中，利用了动板电容器的板之间的力的二次电压依赖性，并且MEMS电压基准的操作基于动板电容器的吸合现象。与更传统的解决方案相比，MEMS器件的优点包括小尺寸、低功耗、大规模生产的低价格和稳定性。由静电充电效应引起的漂移已被证明是一个主要问题。这个问题在直流应用中尚未解决，但可以通过使用交流驱动代替直流驱动并通过补偿部件的内部直流电压来避免。通过这种方式，在三周的测试期间，相对漂移率低于2ppm的交流电压基准已经构建。基于MEMS的参考振荡器甚至表现出更好的稳定性：在持续一个多月的测量中，在约0.01 ppm的相对不确定度水平下没有观察到谐振频率的变化。MEMS组件也已被开发用于测量高达约40 GHz频率的RF和微波功率。与测量吸收功率的传统高频功率传感器不同，MEMS器件测量通过传感器传输的功率。
英文摘要：
Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology. MEMS-based voltage references, RMS-to-DC converters, high frequency power sensors, and reference oscillators are discussed. The main principle of operation of the components is the balance between electrical forces and mechanical spring forces in micromachined silicon structures. In RMS sensors and RMS-to-DC converters, the quadratic voltage dependence of the force between plates of a moving-plate capacitor is utilised, and the operation of the MEMS voltage reference is based on the pull-in phenomenon of a moving-plate capacitor. Advantages of MEMS devices compared to more conventional solutions include small size, low power consumption, low price in mass production, and stability. The drift caused by electrostatic charging effects has turned out to be a major problem. This problem has not yet been solved in DC applications, but it can be circumvented by using AC actuation instead of DC and by compensating the internal DC voltages of the component. In this way, an AC voltage reference with relative drift rate below 2 ppm during a three-week test period has been constructed. Even better stability has been demonstrated with a MEMS-based reference oscillator: no changes in resonance frequency were observed at relative uncertainty level of about 0.01 ppm in a measurement which was continued for more than a month. MEMS components have also been developed for measuring RF and microwave power up to frequencies of about 40 GHz. Unlike conventional high frequency power sensors, which measure the absorbed power, the MEMS device measures the power that is transmitted through the sensor.
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