arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 0705.2292physics.opticsphysics.comp-ph
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纳米结构中电磁场的时谐有限元三维模拟

3D Simulations of Electromagnetic Fields in Nanostructures using the Time-Harmonic Finite-Element Method

S. Burger, L. Zschiedrich, F. Schmidt, R. Köhle, T. Henkel, B. Küchler, C. Nölscher

摘要:

对电磁场传播过程进行严格的计算机模拟已经成为纳米结构元件光学计量和光学设计的重要工具。如在先前的基准测试中已经示出的,目前使用的方法中的一些遭受低收敛速率和/或结果的低精度,并且表现出非常长的计算时间,这使得应用于扩展的2D布局图案不切实际。我们解决3D模拟任务,通过使用有限元求解器,已被证明是优于竞争的方法,由几个数量级的精度和计算时间为典型的微光刻模拟。我们报告的求解器的当前状态,将高阶边缘元素,自适应细化方法,和快速求解算法。此外,我们研究了求解器的性能在三维模拟项目的光衍射的交替相移接触孔掩模。

英文摘要:

Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and optics design of nanostructured components. As has been shown in previous benchmarks some of the presently used methods suffer from low convergence rates and/or low accuracy of the results and exhibit very long computation times which makes application to extended 2D layout patterns impractical. We address 3D simulation tasks by using a finite-element solver which has been shown to be superior to competing methods by several orders of magnitude in accuracy and computational time for typical microlithography simulations. We report on the current status of the solver, incorporating higher order edge elements, adaptive refinement methods, and fast solution algorithms. Further, we investigate the performance of the solver in the 3D simulation project of light diffraction off an alternating phase-shift contact-hole mask.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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