动态相位显微术：亚纳米尺度的平移位移测量
Dynamic phase microscopy: measurements of translational displacements at sub-nanometer scale
摘要：
动态相位显微术已被应用于压电扫描器的纳米级位移的测量。这种扫描仪，这是专为校准目的的扫描探针显微镜和TEM，表现出线性和无闪烁的平移在0.05-20 nm范围内。电压激活运动由系数0.03 \pm 0.005 nm/V描述。
英文摘要：
Dynamic phase microscopy has been applied for measurements of nanometer-scale displacements of a piezoelectric scanner. This scanner, which was designed for calibration purposes for scanning probe microscopy and TEM, exhibited a linear and hysteresis-free translation in the 0.05-20 nm range. The voltage-activated motion is described by a coefficient of 0.03 \pm 0.005 nm/V.
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