具有皮米分辨率的纳机电位置灵敏探测器
A nanoelectromechanical position-sensitive detector with picometer resolution
摘要：
亚纳米位移检测为现代计量的关键应用奠定了坚实的基础。然而，面内位移感测主要由来自光电二极管的差分光电流信号的检测主导，分辨率在纳米范围内。在这里，我们提出了一个集成的面内位移传感器的基础上的纳机电蹦床谐振器。对于85 $μ$ W的低激光功率，位置分辨率为4 $pm/Hz^{1/2}$，5个操作周期后的重复性为2 nm，并且具有良好的长期稳定性，这种新的检测原理为克服各种研究和应用领域中的当前位置检测极限提供了可靠的替代方案。
英文摘要：
Sub-nanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 $pm/Hz^{1/2}$ for a low laser power of 85 $μ$W and a repeatability of 2 nm after 5 cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.
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