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arXiv physics/0601143physics.opticsphysics.comp-ph
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FEM、波导和FDTD算法的严格掩模模拟基准

Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation

S. Burger, R. Köhle, L. Zschiedrich, W. Gao, F. Schmidt, R. März, C. Nölscher

摘要:

将一种用于光子晶体传输分析的快速时谐有限元法应用于掩模模拟问题。通过对一组典型问题的研究和对两种已建立的方法(FDTD和差分方法)的基准测试以及一个分析实例,证明了该方法的适用性。新的有限元方法是高达100倍的速度比竞争的方法为中等的目标精度,它是唯一的方法,允许达到高的目标精度。

英文摘要:

An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was proven by examining a set of typical problems and by a benchmarking against two established methods (FDTD and a differential method) and an analytical example. The new finite element approach was up to 100 times faster than the competing approaches for moderate target accuracies, and it was the only method which allowed to reach high target accuracies.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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