High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2 x 10^5, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 microns are studied, with measured quality factors as high as 4.7 x 10^5 for an optical mode volume of 5.3 cubic wavelengths in the material.
Microdisks and microstadium resonators were fabricated on erbium doped amorphous hydrogenated silicon (a-Si:H<Er>) layers sandwiched in air and native SiO2 on Si substrates. Annealing condition is optimized to allow large emission at 1550 nm for samples with erbium concentrations as high as 1.02x10^20 atoms/cm3. Near field scanning optical microscopy shows evidences of the simultaneous presence of bow-tie and diamond scars. These modes indicate the high quality of the resonators and the potentiality for achieving amorphous silicon microcavity lasers.
An erbium doped micro-laser is demonstrated utilizing $\mathrm{SiO_{2}}$ microdisk resonators on a silicon chip. Passive microdisk resonators exhibit whispering gallery type (WGM) modes with intrinsic optical quality factors of up to $6\times{10^{7}}$ and were doped with trivalent erbium ions (peak concentration $\mathrm{\sim3.8\times{10^{20}cm^{-3})}}$ using MeV ion implantation. Coupling to the fundamental WGM of the microdisk resonator was achieved by using a tapered optical fiber. Upon pumping of the $^{4}% I_{15/2}\longrightarrow$ $^{4}I_{13/2}$ erbium transition at 1450 nm, a gradual tra…
Silicon photonics technology enables compact, low-power and cost-effective optical microsystems on a chip by leveraging the materials and advanced fabrication methods developed over decades for integrated silicon electronics. Silicon foundries now provide many standard building blocks required for high-performance optical circuits, including passive components such as optical waveguides, filters and (de-)multiplexors and active optoelectronic components such as high-speed modulators, switches and photodetectors. However, because silicon is a poor light emitting material, on-chip light sources …
Hybrid SiN-QD microlasers coupled to a passive SiN output waveguide with 7μm diameter and record low threshold density of 27 μJ cm-2 are demonstrated. A new design and unique processing scheme starting from SiN/QD/SiN stacks offer long term stability and facilitate in depth laser characterization. This approach opens up new paths for optical communication, lab-on-a-chip, gas sensing and, potentially, on-chip cavity quantum electrodynamics and quantum optics.
Micron scale silicon nitride (SiN_x) microdisk optical resonators are demonstrated with Q = 3.6 x 10^6 and an effective mode volume of 15 (λ/ n)^3 at near visible wavelengths. A hydrofluoric acid wet etch provides sensitive tuning of the microdisk resonances, and robust mounting of a fiber taper provides efficient fiber optic coupling to the microdisks while allowing unfettered optical access for laser cooling and trapping of atoms. Measurements indicate that cesium adsorption on the SiN_x surfaces significantly red-detunes the microdisk resonances. A technique for parallel integration of mult…
We demonstrate optomechanically-mediated electromagnetically-induced transparency and wavelength conversion in silicon nitride (Si3N4) microdisk resonators. Fabricated devices support whispering gallery optical modes with a quality factor (Q) of 10^6, and radial breathing mechanical modes with a Q=10^4 and a resonance frequency of 625 MHz, so that the system is in the resolved sideband regime. Placing a strong optical control field on the red (blue) detuned sideband of the optical mode produces coherent interference with a resonant probe beam, inducing a transparency (absorption) window for th…
Wavelength-sized microdisk resonators were fabricated on a single crystalline 4H-silicon-carbide-oninsulator platform (4H-SiCOI). By carrying out microphotoluminescence measurements at room temperature, we show that the microdisk resonators support whispering-gallery modes (WGMs) with quality factors up to $5.25 \times 10^3$ and mode volumes down to $2.69 \times(λ/n)^3$ at the visible and near-infrared wavelengths. Moreover, the demonstrated wavelength-sized microdisk resonators exhibit WGMs whose resonant wavelengths compatible with the zero-phonon lines of spin defects in 4H-SiCOI, making th…
Single-walled carbon nanotubes have advantages as a nanoscale light source compatible with silicon photonics because they show room-temperature luminescence at telecom-wavelengths and can be directly synthesized on silicon substrates. Here we demonstrate integration of individual light-emitting carbon nanotubes with silicon microdisk resonators. Photons emitted from nanotubes are efficiently coupled to whispering gallery modes, circulating within the disks and lighting up their perimeters. Furthermore, we control such emission by tuning the excitation wavelength in and out of resonance with hi…
In this paper we report on the measurement and modelling of enhanced optical refractometric sensors based on whispering-gallery-modes. The devices under test are optical microresonators made of silicon nitride on silicon oxide. In our approach, these microresonators are vertically coupled to a buried waveguide with the aim of creating integrated and cost-effective devices. The optimization analysis is a delicate balance of resonance quality factor and evanescent field overlap with the sorrounding environment to analyze. By numerical simulations we show that the microdisk thickness is critical …
Strain engineering has proven to be vital for germanium-based photonics, in particular light emission. However, applying a large permanent biaxial strain to germanium has been a challenge. We present a simple, CMOS-compatible technique to conveniently induce a large, spatially homogenous strain in microdisks patterned within ultrathin germanium nanomembranes. Our technique works by concentrating and amplifying a pre-existing small strain into the microdisk region. Biaxial strains as large as 1.11% are observed by Raman spectroscopy and are further confirmed by photoluminescence measurements, w…
We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in-plane vibrational modes yields a displacement sensitivity of 4.1 \times 10^(-17) m/Hz^(1/2). Due to the reduced clamping loss, these disk resonators possess high mechanical quality factors (Q), with the highest value of 4370 for the 1.47 GHz mode measured in ambient air. Numerical simulation on the modal frequency and mechanical Q for disks of varying undercut shows modal coupling and suggests a realistic pedestal siz…
Sensitive transduction of the motion of a microscale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and sensitivity of techniques like atomic force microscopy, but current optical transduction methods suffer when the cantilever is small compared to the achievable spot size. Here, we demonstrate sensitive optical transduction in a monolithic cavity-optomechanical system in which a sub-picogram silicon cantilever with a sharp probe tip is separated from a microdisk…
On-chip microlaser sources in the blue constitute an important building block for complex integrated photonic circuits on silicon. We have developed photonic circuits operating in the blue spectral range based on microdisks and bus waveguides in III-nitride on silicon. We report on the interplay between microdisk-waveguide coupling and its optical properties. We observe critical coupling and phase matching, i.e. the most efficient energy transfer scheme, for very short gap sizes and thin waveguides (g = 45 nm and w = 170 nm) in the spontaneous emission regime. Whispering gallery mode lasing is…
We present germanium microdisk optical resonators under a large biaxial tensile strain using a CMOS-compatible fabrication process. Biaxial tensile strain of ~0.7% is achieved by means of a stress concentration technique that allows the strain level to be customized by carefully selecting certain lithographic dimensions. The partial strain relaxation at the edges of a patterned germanium microdisk is compensated by depositing compressively stressed silicon nitride layer. Two-dimensional Raman spectroscopy measurements along with finite-element method simulations confirm a relatively homogeneou…
Here we demonstrate that adding a chemo-mechanical polishing (CMP) procedure to conventional photolithography, a silica microdisk with ultra-high quality factors ($>10^8$) can be fabricated. By comparing with the intrinsic optical quality factor (Q) measured at 970~nm, we observe that due to the significantly reduced surface roughness, at 1550~nm wavelength the water molecule absorption at the cavity surface supersedes Rayleigh scattering as the dominant factor for Q degradation.
We present the design, fabrication and characterization of cubic (3C) silicon carbide microdisk resonators with high quality factor modes at visible and near infrared wavelengths (600 - 950 nm). Whispering gallery modes with quality factors as high as 2,300 and corresponding mode volumes V ~ 2 (λ/n)^3 are measured using laser scanning confocal microscopy at room temperature. We obtain excellent correspondence between transverse-magnetic (TM) and transverse-electric (TE) polarized resonances simulated using Finite Difference Time Domain (FDTD) method and those observed in experiment. These stru…
Optical differentiation and optical Hilbert transformation play important roles in communications, computing, information processing and signal analysis in optical domain which offering huge bandwidth. Meanwhile, silicon-based photonic integrated circuits are preferable in all-optical signal processing due to their intrinsic advantages of low power consumption, compact footprint and ultra-high speed. In this study, we analyze the interrelation between first-order optical differentiation and optical Hilbert transformation and then experimentally demonstrate a feasible integrated scheme which ca…
We propose and demonstrate a convenient and sensitive technique for precise engineering of group-velocity dispersion in high-Q silicon microresonators. By accurately controlling the surface-oxidation thickness of silicon microdisk resonators, we are able to precisely manage the zero-dispersion wavelength while simultaneously further improving the high optical quality of our devices, with the optical Q close to a million. The demonstrated dispersion management allows us to achieve parametric generation with precisely engineerable emission wavelengths, which shows great potential for application…
We optimize optical performance of metasurfaces based on periodically corrugated silicon layers by adjusting the Fourier coefficients of their surface profile. For smooth corrugations, we demonstrate an excellent quantitative accuracy of semi-analytical approach based on the Rayleigh hypothesis. We employ the approach to design metasurfaces with anomalous refraction due to dominant first order diffraction. Unlike conventional Huygens' dielectric metasurfaces, corrugated silicon layers are capable of efficient anomalous refraction in grazing directions: we obtain corrugation shapes allowing to …
Encapsulation layers are explored for passivating the surfaces of silicon to reduce optical absorption in the 1500-nm wavelength band. Surface-sensitive test structures consisting of microdisk resonators are fabricated for this purpose. Based on previous work in silicon photovoltaics, coatings of SiNx and SiO2 are applied under varying deposition and annealing conditions. A short dry thermal oxidation followed by a long high-temperature N2 anneal is found to be most effective at long-term encapsulation and reduction of interface absorption. Minimization of the optical loss is attributed to sim…
Optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator . Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for silicon micro electro mechanical resonators for application in filters and oscillators. Here, we demonstrate monolithic integration of electrostatic capacitive actuation with optical sensing using silicon opt…
A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the "dimpled" taper controls the probe-sample interaction length and the level of noise present during coupling measurements. Practical demonstrations with high-Q silicon microcavities include testing a dense array of undercut microdisks (maximum Q = 3.3x10^6) and a planar microring (Q = 4.8x10^6).
An outstanding challenge for color center-based quantum information processing technologies is the integration of optically-coherent emitters into scalable thin-film photonics. Here, we report on the integration of near-transform-limited silicon vacancy (V$_{\text{Si}}$) defects into microdisk resonators fabricated in a CMOS-compatible 4H-Silicon Carbide-on-Insulator platform. We demonstrate a single-emitter cooperativity of up to 0.8 as well as optical superradiance from a pair of color centers coupled to the same cavity mode. We investigate the effect of multimode interference on the photon …
We present a simple measurement and analysis technique to determine the fraction of optical loss due to both radiation (scattering) and linear absorption in microphotonic components. The method is generally applicable to optical materials in which both nonlinear and linear absorption are present, and requires only limited knowledge of absolute optical power levels, material parameters, and the structure geometry. The technique is applied to high quality factor (Q=1-5 X 10^6) silicon-on-insulator microdisk resonators. It is determined that linear absorption can account for more than half the to…
Finite photon lifetimes for light fields in an opto-mechanical cavity impose a bandwidth limit on displacement sensing at mechanical resonance frequencies beyond the loaded cavity photon decay rate. Opto-mechanical modulation efficiency can be enhanced via multi-GHz transduction techniques such as piezo-opto-mechanics at the cost of on-chip integration. In this paper, we present a novel high bandwidth displacement sense scheme employing Rayleigh scattering in photonic resonators. Using this technique in conjunction with on-chip electrostatic drive in silicon enables efficient modulation at fre…
We report the generation of high-purity twin photon pairs through cavity-enhanced non-degenerate four-wave mixing (FWM) in a high-Q silicon microdisk resonator. Twin photon pairs are created within the same cavity mode and are consequently expected to be identical in all degrees of freedom. The device is able to produce twin photons at telecommunication wavelengths with a pair generation rate as large as $(3.96\pm0.03)\times10^5 ~{\rm pairs/s}$, within a narrow bandwidth of 0.72 GHz. A coincidence-to-accidental ratio of $660\pm62$ was measured, the highest value reported to date for twin photo…
Advances in quantum photonics have shown that chip-scale quantum devices are translating from the realm of basic research to applied technologies. Recent developments in integrated photonic circuits and single photon detectors indicate that the bottleneck for fidelity in quantum photonic processes will ultimately lie with the photon sources. We present and demonstrate a silicon nanophotonic chip capable of emitting telecommunication band photon pairs that exhibit the highest raw degree of time-energy entanglement from a micro/nanoscale source, to date. Biphotons are generated through cavity-en…
We numerically study silicon waveguides on silica showing that it is possible to simultaneously guide optical and acoustic waves in the technologically important silicon on insulator (SOI) material system. Thin waveguides, or fins, exhibit geometrically softened mechanical modes at gigahertz frequencies with phase velocities below the Rayleigh velocity in glass, eliminating acoustic radiation losses. We propose slot waveguides on glass with telecom optical frequencies and strong radiation pressure forces resulting in Brillouin gains on the order of 500 and 50,000 1/(Wm) for backward and forwar…
Influences of a substrate below samples in imaging performances are studied by reaching the solution to the dyadic Green's function, where the substrate is modeled as half space in the sample region. Then, theoretical and numerical analysis are performed in terms of magnification, depth of field, and resolution. Various settings including positions of dipoles, the distance of the substrate to the focal plane and dipole polarization are considered. Methods to measure the resolution of $z$-polarized dipoles are also presented since the modified Rayleigh limit cannot be applied directly. The sili…
Optical microresonators have proven powerful in a wide range of applications, including cavity quantum electrodynamics, biosensing, microfludics, and cavity optomechanics. Their performance depends critically on the exact distribution of optical energy, confined and shaped by the nanoscale device geometry. Near-field optical probes can image this distribution, but the physical probe necessarily perturbs the near field, which is particularly problematic for sensitive high quality factor resonances. We present a new approach to mapping nanophotonic modes that uses a controllably small and local …
We propose asymmetric resonant cavities with rational caustics and experimentally demonstrate interior whispering gallery modes in monolithic silicon mesoscopic microcavities. These microcavities demonstrate unique robustness of cavity quality factor (Q) against roughness Rayleigh scattering. Angle-resolved tapered fiber measurements and near-field images observe distinct resonant families and asymmetric emission from interior whispering gallery modes, which can be used for microcavity laser and CQED applications.
Optical metasurfaces have shown to be a powerful approach to planar optical elements, enabling an unprecedented control over light phase and amplitude. At that stage, where wide variety of static functionalities have been accomplished, most efforts are being directed towards achieving reconfigurable optical elements. Here, we present our approach to an electrically controlled varifocal metalens operating in the visible frequency range. It relies on dynamically controlling the refractive index environment of a silicon metalens by means of an electric resistor embedded into a thermo-optical poly…
The index of refraction n(E_γ)=1+δ(E_γ)+iβ(E_γ) is split into a real part δand an absorptive part β. The absorptive part has the three well-known contributions to the cross section σ_{abs}: the photo effect, the Compton effect and the pair creation, but there is also the inelastic Delbrück scattering. Second-order elastic scattering cross sections σ_{sca} with Rayleigh scattering (virtual photo effect), virtual Compton effect and Delbrück scattering (virtual pair creation) can be calculated by integrals of the Kramers-Kronig dispersion relations from the cross section σ_{abs}. The real elastic…
We theoretically investigate the use of Rayleigh surface acoustic waves (SAWs) for refractive index modulation in optical waveguides consisting of amorphous dielectrics. Considering low-loss Si$_3$N$_4$ waveguides with a standard core cross section of 4.4$\times$0.03 $μ$m$^2$ size, buried 8 $μ$m deep in a SiO$_2$ cladding we compare surface acoustic wave generation in various different geometries via a piezo-active, lead zirconate titanate film placed on top of the surface and driven via an interdigitized transducer (IDT). Using numerical solutions of the acoustic and optical wave equations, w…
Optical spectrum analysis is the cornerstone of spectroscopic sensing, optical network performance monitoring, and hyperspectral imaging. While conventional high-performance spectrometers used to perform such analysis are often large benchtop instruments, on-chip spectrometers have recently emerged as a promising alternative with apparent Size, Weight, and Power (SWaP) advantages. Existing on-chip spectrometer designs, however, are limited in spectral channel count and signal-to-noise ratio (SNR). Here we demonstrate a transformative on-chip digital Fourier transform (dFT) spectrometer that ca…
Disordered optical media are an emerging class of materials capable of strongly scattering light. Their study is relevant to investigate transport phenomena and for applications in imaging, sensing and energy storage. While such materials can be used to generate coherent light, their directional emission is typically hampered by their very multiple scattering nature. Here, we tune the out-of-plane directionality of coherent Raman light scattered by a fractal network of silicon nanowires. By visualizing Rayleigh scattering, photoluminescence and weakly localized Raman light from the random netw…
