Extreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

基于腔体的极紫外光刻紧凑型光源

Cavity-based compact light source for extreme ultraviolet lithography

本文提出一种基于超导能量回收直线加速器的谐波激射再生放大器自由电子激光极紫外光源，通过降低电子束能量至传统方案的1/√n，以0.33 GeV和16毫米波荡器实现约2千瓦平均功率，显著缩小设施规模。

A synchrotron-based kilowatt-level radiation source for EUV lithograph

A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.

一种用于产生高功率全相干EUV辐射的基于储存环光源的磁聚焦结构设计

Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

本文提出一种基于DBA磁聚焦结构和12台超导扭摆器的储存环设计，结合旁路线与ADM机制，实现约0.8 nm自然发射度和数百瓦级高功率全相干EUV辐射。

Ultra-bright Coherent Undulator Radiation Driven by Dielectric Laser Accelerator

A dielectric laser accelerator, operating at optical frequencies and GHz pulse rate, is expected to produce attosec electron bunches with a moderate beam current at high energy. For relativistic electrons, the attosec bunch has a spatial length of a few nanometers, which is well suited for generating high-brightness superradiance in the VUV, EUV, and x-ray spectra. Our study shows that the brilliance of coherent undulator radiation driven by a short-bunch beam with 1~10 fC bunch charge from a dielectric laser accelerator is comparable to or higher than that of a synchrotron in the 0.1 ~ 3 keV …

极端紫外范围内反射同步辐射光的反向康普顿散射首次观测到γ射线束的产生

First observation of the $γ$-ray beam production by the backward Compton scattering of reflected synchrotron radiation in the extreme ultraviolet range

该研究通过反向康普顿散射利用反射的同步辐射光在极端紫外范围内首次观测到γ射线束的产生，展示了新的高能γ射线束源的开发方法。

稳态微聚束的理论与实验研究

Theoretical and Experimental Studies on Steady-state Microbunching

本论文致力于稳态微聚束（SSMB）的理论与实验研究，解决了如何实现SSMB、获取其辐射特性并在真实机器上实验验证其工作机制的问题，为高平均功率相干辐射光源的发展提供了重要支撑。