用于油中现场检测的小型光声光谱气体探头
Miniaturized Photoacoustic Spectroscopy Gas Probe for In-Situ Detection in Oil
AI总结：
设计开发小型光声光谱气体探头用于油浸电力设备现场检测。采用单腔单光纤结构，经模型分析揭示增强机制，制备出传感器原型，测试表明其性能良好，为变压器油中溶解气体原位监测提供技术方案。
摘要：
本文设计并开发了一种具有声压增强功能的小型光声光谱气体探头，用于油浸电力设备的原位检测。该探头采用单腔单光纤结构，将光声池和法布里-珀罗光学传感腔集成在一个外径仅800μm的陶瓷插芯内。通过对半开放式光声池的机电声等效模型分析，揭示了减小光声池半径可在声压响应中形成平坦区域的增强机制。采用电子束蒸发制备CrAgAu复合金属膜片，通过聚焦离子束刻蚀精确加工气孔，成功实现了传感器原型的制备。实验结果表明，该传感器在2800-10000Hz频率范围内具有平坦的声响应，灵敏度为-15dB re 1mV/Pa。以乙炔为目标气体，在3275Hz的最佳工作频率下，检测限达到71.4ppb（积分时间为130s），线性度超过0.998。油中测试验证了其在油相环境中的稳定检测能力，为变压器油中溶解气体的原位监测提供了一种小型化、高灵敏度的全光学技术解决方案。
英文摘要：
This paper designs and develops a miniaturized photoacoustic spectroscopy gas probe with acoustic pressure enhancement for in-situ detection in oil-immersed power equipment. The probe adopts a single-cavity single-fiber structure, integrating the photoacoustic cell and the Fabry-Pérot optical sensing cavity within a ceramic ferrule with an outer diameter of only 800 um. Through the electro-mechanical-acoustic equivalent model analysis of the semi-open photoacoustic cell, the enhancement mechanism is revealed that reducing the radius of the photoacoustic cell can form a flat region in the acoustic pressure response. The CrAgAu composite metal diaphragm is fabricated by electron-beam evaporation, and the gas vents are precisely machined by focused-ion-beam etching, successfully realizing the preparation of the sensor prototype. Experimental results demonstrate that the sensor exhibits a flat acoustic response in the frequency range of 2800-10000 Hz with a sensitivity of -15 dB re 1 mV/Pa. Using acetylene as the target gas, the detection limit reaches 71.4 ppb (with an integration time of 130 s) at the optimal operating frequency of 3275 Hz, and the linearity exceeds 0.998. In-oil tests verify its stable detection capability in oil-phase environments, providing a miniaturized, high-sensitivity all-optical technical solution for in-situ monitoring of dissolved gases in transformer oil.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
