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arXiv 2603.16144physics.optics
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高带宽940 nm VCSEL采用Zn扩散用于光通信

High-Bandwidth 940 nm VCSEL with Zn-diffusion for Optical Communications

National Yang Ming Chiao Tung University(国立阳明交通大学);Hon Hai Research Institute(鸿海研究院)

Fu-He Hsiao, Yu-Jie Lin, Chia-Jung Tsai, Chia-Chen Li, Yun-Han Chang, Chih-Ting Chang, Jr-Hau He, Chun-Liang Lin, Yu-Heng Hong, Hao-Chung Kuo

AI总结:

本文提出一种结合仿真与实验验证的设计方法,优化940 nm VCSEL结构,实现35 GHz以上调制带宽和100 Gbit/s PAM-4传输。

摘要:

我们提出了一种系统的设计方法,结合仿真和实验验证,用于高-speed 940 nm垂直腔面发射激光器(VCSELs)。进行了全面的仿真研究以优化器件结构,重点研究了氧化层数量和孔径大小,预测最大调制带宽超过35 GHz。为了验证这种方法,制造并表征了一个优化的器件,具有4-μm双氧化层孔径。关键的是,在制造过程中,引入了Zn扩散区域以进一步提高器件性能。实验结果显示出34 GHz的调制带宽和成功的100 Gbit/s PAM-4数据传输。模拟与测量性能之间的良好一致性验证了我们设计方法的有效性,为下一代光学互连的发展提供了可靠的框架。

英文摘要:

We present a systematic design methodology, combining simulation and experimental validation, for high-speed 940 nm vertical-cavity surface-emitting lasers (VCSELs). A comprehensive simulation study was conducted to optimize the device structure, focusing on the number of oxide layers and the aperture size, which predicted a maximum modulation bandwidth of over 35 GHz. To validate this approach, an optimized device with a 4-μm double-oxide aperture was fabricated and characterized. Crucially, during the fabrication process, a Zn-diffused region was incorporated to further enhance device performance. The experimental results demonstrate a modulation bandwidth of 34 GHz and successful 100 Gbit/s PAM-4 data transmission. The excellent agreement between the simulated and measured performance validates the effectiveness of our design meth-odology, providing a reliable framework for developing next-generation optical inter-connects.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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