微波谐振腔中等离子体参数及碳去污率的首次实验表征
First Experimental Characterization of Plasma Parameters and Carbon Decontamination Rates in a Microwave Resonator Used in Particle Accelerators
AI总结：
本文通过Langmuir探针和石英晶体微天平测量，研究了微波谐振腔中等离子体参数及碳基污染去除率，探讨了提升超导射频腔体处理效果的指导方针和技术挑战。
摘要：
在超导射频腔体中进行原位等离子体处理是一种用于缓解场发射限制现象的性能恢复技术。该技术通过在腔体内部点燃惰性气体/氧气等离子体数小时，去除由碳基污染物引起的寄生场发射退化。尽管社区已进行了大量实验研发，但不同实验条件下等离子体参数和清洁率从未被直接评估。本文利用Langmuir探针和覆盖有非晶碳膜的石英晶体微天平测量等离子体参数和清洁率，讨论了大参数空间的主要结果及提升超导射频腔体处理效果的指导方针。同时，也讨论了遇到的技术挑战，因为超导射频腔体本身并非设计为等离子体反应器。
英文摘要：
In-situ plasma processing of superconducting radio frequency (SRF) cavities is a performance recovery technique used to mitigate the field emission limiting phenomenon. It has been proved very effective at major particle accelerator facilities such as SNS, CEBAF, FRIB, FNAL and C-ADS. This technique is based on the ignition of a noble-gas/oxygen plasma inside the cavity over several hours to remove hydrocarbon-based contamination, responsible for the parasitic field emission degradation observed after several years of operation. Despite a large experimental R\&D effort from the community, plasma parameters and cleaning rates under various experimental conditions have never been directly evaluated. In this study, plasma parameters were measured using a Langmuir probe and cleaning rates thanks to a quartz crystal microbalance (QCM) coated with an amorphous carbon film to simulate a carbon-based contamination. In this article, the main results from a large parameter space are discussed along with guidelines for improving the plasma processing effectiveness in SRF cavities. The encountered technical challenges are also discussed, as the SRF cavity is by design not intended to be a plasma reactor.
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