高分辨率量热学样品平台用于低温热力学研究的多模式同步辐射X射线兼容性
High-resolution calorimetric sample platforms for cryogenic thermodynamic studies with multimodal synchrotron x-ray compatibility
AI总结：
本研究提出了一种高分辨率量热学样品平台，用于低温热力学研究，支持多模式同步辐射X射线兼容性，适用于小样品量热测量和多种极端环境。
摘要：
X射线量热学样品平台结合比热和同步辐射X射线测量，提供了一种强大的手段来研究基本材料性质。具有紧凑加热器和温度计的量热器单元设计，采用侧车几何排列，样品位于加热器正上方的硅氮化物膜中心位置。描述了高产率、晶圆级批量制造的精密量热学传感器芯片、光束线和实验室低温恒温器插件，包括传感器安装和封装。利用我们的量热学传感器，我们对质量范围从4微克到145微克的样品进行了比热测量。样品和参考单元通过松弛和交流稳态测量进行表征。热响应通过在精心优化的测量频率上使用锁相检测进行捕获，相滞后校正确保精确提取热量容量。参考单元的背景热容量在300K时测量为低于320nJ/K，降至0.4nJ/K在0.7K。量热器性能通过研究不同磁场强度下的超导Nb小样品和4微克超导Al样品的比热来展示。讨论了从低温电子和晶格比热测量中确定基本热力学量。这些多功能、高通量的样品平台针对宽广的低温温度范围设计用于小样品量热学，并且支持与广泛低温恒温器的可扩展集成，包括Advanced Photon Source的光束线低温恒温器。它们可以容纳多模式几何形状，并允许在超高真空、毫开尔文温度、磁场和X射线照射下操作。
英文摘要：
X-ray calorimetric sample platforms combining specific heat and synchrotron x-ray measurements provide a powerful means to investigate fundamental material properties. Calorimeter cell designs featuring a compact heater and thermometer arranged in a sidecar geometry, with the sample positioned directly above the heater at the center of a silicon nitride membrane, are presented. High-yield, wafer-level batch fabrication of precision calorimetric sensor chips, beamline and laboratory cryostat plugins with sensor mounting and packaging are described. Using our calorimetric sensors, we present specific heat measurements on samples with masses ranging from 4 μg to 145 μg. The sample and reference cells are characterized with relaxation and ac steady-state measurements. The thermal response is captured using lock-in detection at carefully optimized measurement frequencies, with phase-lag correction ensuring precise extraction of heat capacity. The reference cell's background heat capacity was measured to be under 320 nJ/K at 300 K, decreasing to just 0.4 nJ/K at 0.7 K. The calorimeter performance is illustrated by studying the specific heat of small samples of superconducting Nb and a 4 μg piece of superconducting Al under different magnetic field strengths. The determination of fundamental thermodynamic quantities from low-temperature electronic and lattice specific heat measurements is discussed. These versatile, high-throughput sample platforms are engineered for small-sample calorimetry across a broad cryogenic temperature range, and they support scalable integration with a wide range of cryostats, including beamline cryostats at the Advanced Photon Source. They accommodate multimodal geometries and enable operation under ultra-high vacuum, millikelvin temperatures, magnetic fields, and x-ray illumination.
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