在工业级半导体制造设施中制造的高$Q$超导谐振器
High-$Q$ superconducting resonators fabricated in an industry-scale semiconductor-fabrication facility
AI总结：
本文在半导体制造设施中利用双层超导电路技术制造了200 mm晶圆上的共面波导谐振器，实现了单光子区超过$10^6$的Q因子，并成功引入Niobium空气桥，证明了工业级工艺制造高质量超导量子电路的可行性。
摘要：
通用量子计算机有望解决已知经典算法能力之外的计算问题。要在超导材料平台上实现此类量子硬件，必须在芯片上以高质量和高均匀性制造并集成大量物理量子比特。预期半导体工业流程在过程控制、均匀性和可重复性方面的优势，我们着手在半导体制造设施中制造超导量子电路。为了确立工艺质量的基线，我们报告了在200 mm生产线上利用双层超导电路技术制造共面波导谐振器的工作。通过在单光子区超过$10^6$的低温Q因子测量，我们证明了高材料与工艺质量，这些微波谐振器由Niobium和Tantalum制成。此外，我们展示了在工艺中引入超导Niobium空气桥，同时保持了Niobium谐振器的高品质因子。
英文摘要：
Universal quantum computers promise to solve computational problems that are beyond the capabilities of known classical algorithms. To realize such quantum hardware on a superconducting material platform, a vast number of physical qubits has to be manufactured and integrated at high quality and uniformity on a chip. Anticipating the benefits of semiconductor industry processes in terms of process control, uniformity and repeatability, we set out to manufacture superconducting quantum circuits in a semiconductor fabrication facility. In order to set a baseline for the process quality, we report on the fabrication of coplanar waveguide resonators in a 200 mm production line, making use of a two-layer superconducting circuit technology. We demonstrate high material and process quality by cryogenic Q-factor measurements exceeding $10^6$ in the single-photon regime, for microwave resonators made of both Niobium and Tantalum. In addition, we demonstrate the incorporation of superconducting Niobium air bridges in our process, while maintaining the high quality factor of Niobium resonators.
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