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arXiv 2501.03211quant-phphysics.app-ph
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用于可扩展量子电路的具有低微波损耗和高机械相干性的紧凑型超导真空间隙电容器

Compact superconducting vacuum-gap capacitors with low microwave loss and high mechanical coherence for scalable quantum circuits

Amir Youssefi, Mahdi Chegnizadeh, Marco Scigliuzzo, Tobias J. Kippenberg

AI总结:

本文提出可扩展的超导真空间隙电容器制造工艺,实现约150 nm间隙、低微波损耗与超高相干机械模式,并验证基态冷却、运动压缩及拓扑晶格等量子光机械应用。

摘要:

真空间隙电容器因其紧凑设计和在微波频段极低的介电损耗,近来在超导电路平台中引起了广泛关注。它们支持机械振动模式的固有能力使其非常适合电路光力学。然而,对间隙尺寸的精确控制以及高相干机械模式的实现仍是长期存在的挑战。在此,我们提出一种详细且可扩展的真空间隙电容器制造工艺,该电容器支持超高相干机械运动,表现出低微波损耗,并且与传统平面几何结构相比占用的面积显著更小。通过采用平坦化的 SiO₂ 牺牲层,我们实现了约 150 nm 的真空间隙。利用该平台,我们最近展示了品质因数达 4000 万的机械振子的基态冷却和运动压缩,与先前工作相比提升了 100 倍,并实现了约 15 Hz 的单光子光机械耦合率。其他成就包括实现具有 24 个位点的光机械拓扑晶格,以及观测到机械六聚体中的量子集体动力学。总之,这些结果凸显了真空间隙电容器作为将超导量子比特与机械系统耦合、实现量子存储以及探测量子力学中引力效应的平台的潜力。

英文摘要:

Vacuum-gap capacitors have recently attracted significant interest in superconducting circuit platforms due to their compact design and exceptionally low dielectric losses in the microwave regime. Their intrinsic ability to support mechanical vibrational modes makes them well-suited for circuit optomechanics. However, precise control over the gap size and the realization of high-coherence mechanical modes remain longstanding challenges. Here, we present a detailed and scalable fabrication process for vacuum-gap capacitors that support ultra-high-coherence mechanical motion, exhibit low microwave loss, and occupy a significantly smaller footprint compared to conventional planar geometries. By employing a planarized $\mathrm{SiO}_2$ sacrificial layer, we achieve vacuum gaps on the order of 150 nm. Using this platform, we have recently demonstrated ground-state cooling and motion squeezing of a mechanical oscillator with a quality factor of 40 million, a 100-fold improvement compared to prior works, as well as a single-photon optomechanical coupling rate of approximately 15Hz. Additional achievements include the realization of an optomechanical topological lattice with 24 sites and the observation of quantum collective dynamics in a mechanical hexamer. Collectively, these results underscore the potential of vacuum-gap capacitors as a platform for coupling superconducting qubits to mechanical systems, enabling quantum storage, and probing gravitational effects in quantum mechanics.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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