基于Y型光纤干涉原理的薄膜厚度测量仪
Film Thickness Gauge Based on Interferometric Principle of Y-shaped Optical Fiber
AI总结：
本研究提出基于Y型光纤干涉原理的薄膜厚度测量仪，利用Y型光纤传输与探测光信号，结合光谱仪解析干涉信号计算膜厚，经设计验证其具备高精度与稳定性，可满足实际应用需求。
摘要：
本文提出了一种基于Y型光纤干涉原理的薄膜厚度测量仪，以实现薄膜厚度的精确测量。文中介绍了光纤、干涉原理及薄膜厚度计算原理，并构建了基于Y型光纤的干涉测厚系统。该系统利用Y型光纤的特殊结构，将光源产生的光信号传输至薄膜表面，经反射与干涉后得到不同波长的相干光信号。采用光谱仪接收并解析这些干涉信号，根据相邻级次峰值位置的波长差，结合薄膜的折射率计算薄膜厚度。在具体设计中，本文详细阐述了仪器各部分的设计，包括光源、Y型光纤及光谱仪的选型与参数设置。其中，Y型光纤作为仪器的核心部件，兼具光信号传输与薄膜表面光信号探测的功能。同时，本文还介绍了仪器的外壳封装与内部装配工艺，以保障仪器的便携性与稳定性。结果表明，该厚度测量仪具有较高的测量精度与稳定性，能够满足实际应用的需求。
英文摘要：
In this paper, a thin film thickness gauge based on the interferometric principle of Y-shaped optical fiber is proposed to achieve accurate measurement of film thickness. In this paper, the optical fiber, the interferometric principle and the film thickness calculation principle are introduced, and the interferometric thickness measurement system based on Y-shaped optical fiber is constructed. The system uses the special structure of Y-shaped optical fiber to transmit the optical signal generated by the light source to the surface of the thin film, and obtains coherent optical signals of different wavelengths through reflection and interference. The spectrometer is used to receive and interpret these interference signals, and the thickness of the film is calculated according to the wavelength difference of the peak positions of the adjacent stages, combined with the refractive index of the film. In the specific design, the paper elaborates on the design of each part of the instrument, including the selection and parameter setting of the light source, Y-fiber and spectrometer. Among them, the Y-shaped optical fiber, as the core component of the instrument, has the function of transmitting optical signals and detecting optical signals on the surface of thin films. At the same time, the paper also introduces the housing packaging and internal assembly process of the instrument to ensure the portability and stability of the instrument. The results show that the thickness gauge has high measurement accuracy and stability, which can meet the needs of practical applications.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
