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arXiv 2411.09892cs.ROcond-mat.mtrl-scics.LG
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一种用于半导体特性自主接触式空间测绘的自监督机器人系统

A Self-Supervised Robotic System for Autonomous Contact-Based Spatial Mapping of Semiconductor Properties

Massachusetts Institute of Technology(麻省理工学院);Research Laboratory of Electronics, Massachusetts Institute of Technology(麻省理工学院电子学研究实验室)

Alexander E. Siemenn, Basita Das, Kangyu Ji, Fang Sheng, Tonio Buonassisi

AI总结:

本文提出一种自监督机器人系统,通过CNN像素级接触位姿优化和图规划器加速路径生成,实现半导体光电导性的高通量自主接触式测绘。

摘要:

将机器人驱动的接触式材料表征技术集成到自驱动实验室中,可以提升测量质量、可靠性和通量。尽管深度学习模型支持稳健的自主性,但当前方法缺乏可靠的像素级定位精度,并且需要大量标注数据。为了克服这些挑战,我们提出了一种在接触式机器人系统中构建自监督自主性的方法,使机器人能够在高通量下遵循领域专家的测量原则。首先,我们设计了一种基于视觉的自监督卷积神经网络(CNN)架构,该架构利用可微图像先验来优化领域特定目标,将预测的机器人接触位姿的像素精度相对于现有方法提升了20.0%。其次,我们设计了一种可靠的基于图的规划器,用于生成距离最小化路径,以加速机器人测量通量并将规划方差降低6倍。我们通过自主驱动一个4自由度机器人探针连续24小时,在梯度分布的滴铸钙钛矿薄膜成分上以3,025个唯一预测位姿表征半导体光电导性,展示了该方法的性能,实现了每小时超过125次测量的通量。将光电导性空间映射到每个滴铸薄膜上,揭示了成分趋势和不均匀区域,这对于识别制造工艺缺陷具有重要价值。借助这种自监督CNN驱动的机器人系统,我们实现了接触式表征技术在高通量下的高精度和可靠自动化,从而使得自驱动实验室能够测量此前难以获取但十分重要的半导体特性。

英文摘要:

Integrating robotically driven contact-based material characterization techniques into self-driving laboratories can enhance measurement quality, reliability, and throughput. While deep learning models support robust autonomy, current methods lack reliable pixel-precision positioning and require extensive labeled data. To overcome these challenges, we propose an approach for building self-supervised autonomy into contact-based robotic systems that teach the robot to follow domain expert measurement principles at high-throughputs. Firstly, we design a vision-based, self-supervised convolutional neural network (CNN) architecture that uses differentiable image priors to optimize domain-specific objectives, refining the pixel precision of predicted robot contact poses by 20.0% relative to existing approaches. Secondly, we design a reliable graph-based planner for generating distance-minimizing paths to accelerate the robot measurement throughput and decrease planning variance by 6x. We demonstrate the performance of this approach by autonomously driving a 4-degree-of-freedom robotic probe for 24 hours to characterize semiconductor photoconductivity at 3,025 uniquely predicted poses across a gradient of drop-casted perovskite film compositions, achieving throughputs over 125 measurements per hour. Spatially mapping photoconductivity onto each drop-casted film reveals compositional trends and regions of inhomogeneity, valuable for identifying manufacturing process defects. With this self-supervised CNN-driven robotic system, we enable high-precision and reliable automation of contact-based characterization techniques at high throughputs, thereby allowing the measurement of previously inaccessible yet important semiconductor properties for self-driving laboratories.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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