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arXiv 2406.04533cs.AIcs.LG
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面向半导体制造智能工业的稀有类别预测模型

Rare Class Prediction Model for Smart Industry in Semiconductor Manufacturing

School of Systems Science and Industrial Engineering(系统科学与工业工程学院);State University of New York at Binghamton(纽约州立大学宾汉姆顿分校)

Abdelrahman Farrag, Mohammed-Khalil Ghali, Yu Jin

AI总结:

针对半导体制造数据中的类别不平衡、缺失值和噪声问题,提出稀有类别预测模型,通过增强类别分离度实现AUC 0.95、精确率0.66、召回率0.96的预测性能,为维护计划和生产质量提供决策依据。

摘要:

工业的演进使物理系统与数字系统得以集成,促进了制造过程大量数据的采集。这种集成为提升工艺质量和设备健康管理提供了可靠方案。然而,从真实制造过程中采集的数据往往呈现严峻特性,例如严重的类别不平衡、高缺失率以及噪声特征,这些特性阻碍了机器学习的有效实施。本研究针对智能半导体制造过程中采集的原位数据,提出了一种稀有类别预测方法。主要目标是构建一个能够应对噪声和类别不平衡问题、增强类别分离度的模型。与现有文献相比,所提出的方法展现出有前景的结果,能够对新观测进行预测,从而为未来维护计划和生产质量提供洞察。该模型使用多种性能指标进行评估,ROC曲线显示AUC为0.95,精确率为0.66,召回率为0.96。

英文摘要:

The evolution of industry has enabled the integration of physical and digital systems, facilitating the collection of extensive data on manufacturing processes. This integration provides a reliable solution for improving process quality and managing equipment health. However, data collected from real manufacturing processes often exhibit challenging properties, such as severe class imbalance, high rates of missing values, and noisy features, which hinder effective machine learning implementation. In this study, a rare class prediction approach is developed for in situ data collected from a smart semiconductor manufacturing process. The primary objective is to build a model that addresses issues of noise and class imbalance, enhancing class separation. The developed approach demonstrated promising results compared to existing literature, which would allow the prediction of new observations that could give insights into future maintenance plans and production quality. The model was evaluated using various performance metrics, with ROC curves showing an AUC of 0.95, a precision of 0.66, and a recall of 0.96

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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