具有激光自动对准功能的准单片紧凑型干涉传感头设计
Quasi-monolithic Compact Interferometric Sensor Head Design with Laser Auto-alignment
AI总结：
本文提出一种具备自动对准功能的紧凑型干涉传感头设计，通过角反射器二次反射实现测量光束与参考光束的自动对准，无需调整激光束对准即可在任意运动中保持高干涉对比度，并在1Hz处实现1 pm/Hz^1/2的位移灵敏度。
摘要：
干涉仪在高精度位移测量中发挥着关键作用，例如引力波探测。传统干涉仪设计需要精确的激光对准，包括激光指向和束腰位置，以在运动过程中保持高干涉对比度。尽管角反射器能平行反射光束，但仍存在横向光束偏移问题，这会降低干涉对比度。本文提出了一种用于测量平移的新型紧凑型干涉传感头设计，具备自动对准功能。它无需进行激光束对准调整，并能在任意运动（倾斜和平移）过程中保持高干涉对比度。通过带有角反射器的二次反射设计，可实现测量光束与参考光束的自动对准。基于紫外胶粘接技术，构建了一个20*10*10mm^3的全玻璃准单片传感头，并通过压电（PZT）定位台进行了测试。我们的传感头在1Hz处实现了1 pm/Hz^1/2的位移灵敏度，且倾斜动态范围超过+/_200 mrad。这种光学设计可广泛应用于大倾斜动态范围内的高精度位移测量，例如扭摆和地震仪。
英文摘要：
Interferometers play a crucial role in high-precision displacement measurement such as gravitational-wave detection. Conventional interferometer designs require accurate laser alignment, including the laser pointing and the waist position, to maintain high interference contrast during motion. Although the corner reflector returns the reflected beam in parallel, there is still a problem of lateral beam shift which reduces the interference contrast. This paper presents a new compact interferometric sensor head design for measuring translations with auto-alignment. It works without laser beam alignment adjustment and maintains high interferometric contrast during arbitrary motion (tilts as well as lateral translation). Automatic alignment of the measuring beam with the reference beam is possible by means of a secondary reflection design with a corner reflector. A 20*10*10mm^3 all-glass quasi-monolithic sensor head is built based on UV adhesive bonding and tested by a piezoelectric (PZT) positioning stage. Our sensor head achieved a displacement sensitivity of 1 pm/Hz^1/2 at 1Hz with a tilt dynamic range over +/_200 mrad. This optical design can be widely used for high-precision displacement measurement over a large tilt dynamic range, such as torsion balances and seismometers.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
