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arXiv 0709.1004physics.opticsphysics.ins-det
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用自动亚微米光束轮廓仪测量高数值孔径光学系统的聚焦特性

Measurement of focusing properties for high numerical aperture optics using an automated submicron beamprofiler

J. J. Chapman, B. G. Norton, E. W. Streed, D. Kielpinski

摘要:

利用具有亚微米分辨率的干涉参考扫描刀口光束轮廓仪直接测量了数值孔径在0.53 ~ 0.68之间的三个非球面透镜的聚焦特性。三个测试透镜中的两个得到的结果与傍轴高斯光束理论一致。同时还发现,为830 nm设计的最高NA非球面透镜在633 nm处没有衍射极限。这个过程是自动化的使用电动平移阶段,并提供了一个直接的方法来测试高数值孔径光学设计规格。

英文摘要:

The focusing properties of three aspheric lenses with numerical aperture (NA) between 0.53 and 0.68 were directly measured using an interferometrically referenced scanning knife-edge beam profiler with sub-micron resolution. The results obtained for two of the three lenses tested were in agreement with paraxial gaussian beam theory. It was also found that the highest NA aspheric lens which was designed for 830nm was not diffraction limited at 633nm. This process was automated using motorized translation stages and provides a direct method for testing the design specifications of high numerical aperture optics.

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