超大规模集成高Q值纳米天线像素（VINPix）
Very-Large-Scale-Integrated High-$Q$ Nanoantenna Pixels (VINPix)
AI总结：
本文提出超大规模集成高Q值硅纳米天线像素VINPix，通过结合导模共振波导与光子晶体腔，同时实现高Q值、亚波长模式体积和偶极子型辐射，并展示其在无光谱仪折射率传感中的应用。
摘要：
超表面为自由空间光操控和波前整形提供了一种多功能且紧凑的途径。超表面由精心排列的偶极谐振器阵列组成，能够精确控制光的振幅、偏振和相位，其应用涵盖成像、传感、调制和计算。超表面及其组成谐振器的三个关键性能指标是品质因数（Q值）、模式体积（$V_m$）以及控制远场辐射的能力。通常，谐振器在这些参数之间面临权衡：$V_m$的减小会导致Q值的等效降低，尽管对辐射的控制能力会增强。在此，我们证明这种被认为不可避免的折衷并非必然——高Q值、亚波长$V_m$和受控的偶极子型辐射可以同时实现。我们设计了高Q值、超大规模集成的硅纳米天线像素——VINPix——将导模共振波导与光子晶体腔相结合。通过优化的纳米天线，我们实现了超过1500的Q值，且$V_m$小于0.1 $(λ/n_{\ ext{air}})^3$。每个纳米天线均可由自由空间光单独寻址，并表现出向远场的偶极子型散射。谐振器密度可超过每$\ ext{cm}^2$一百万个纳米天线，我们制备的8 mm x 8 mm VINPix阵列证明了这一点。作为概念验证应用，我们展示了利用VINPix阵列实现的无光谱仪、空间局域化的折射率传感。我们的平台为紧凑型、高密度复用的器件（如空间光调制器、计算光谱仪和原位环境传感器）奠定了基础。
英文摘要：
Metasurfaces provide a versatile and compact approach to free-space optical manipulation and wavefront shaping. Comprised of arrays of judiciously-arranged dipolar resonators, metasurfaces precisely control the amplitude, polarization, and phase of light, with applications spanning imaging, sensing, modulation, and computing. Three crucial performance metrics of metasurfaces and their constituent resonators are the quality factor ($Q$-factor), mode-volume ($V_m$), and the ability to control far-field radiation. Often, resonators face a trade-off between these parameters: a reduction in $V_m$ leads to an equivalent reduction in $Q$, albeit with more control over radiation. Here, we demonstrate that this perceived compromise is not inevitable $-$ high-$Q$, subwavelength $V_m$, and controlled dipole-like radiation can be achieved, simultaneously. We design high-$Q$, very-large-scale integrated silicon nanoantenna pixels $-$ VINPix $-$ that combine guided mode resonance waveguides with photonic crystal cavities. With optimized nanoantennas, we achieve $Q$-factors exceeding 1500 with $V_m$ less than 0.1 $(λ/n_{\text{air}})^3$. Each nanoantenna is individually addressable by free-space light, and exhibits dipole-like scattering to the far-field. Resonator densities exceeding a million nanoantennas per $\text{cm}^2$ can be achieved, as demonstrated by our fabrication of an 8 mm x 8 mm VINPix array. As a proof-of-concept application, we demonstrate spectrometer-free, spatially localized, refractive-index sensing utilizing a VINPix array. Our platform provides a foundation for compact, densely multiplexed devices such as spatial light modulators, computational spectrometers, and in-situ environmental sensors.
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