飞秒超高频微机电谐振器的纳米成像
Nanoscale Imaging of Super-High-Frequency Microelectromechanical Resonators with Femtometer Sensitivity
摘要：
实现微机电系统（MEMS）谐振器需要对器件进行详细的微观理解，如能量耗散通道、寄生模式和微加工缺陷。在这里，我们报告了一个独立的超高频（3 ~ 30 GHz）横向泛音体声波谐振器具有前所未有的空间分辨率和位移灵敏度的纳米成像。使用传输模式微波阻抗显微镜，我们已经可视化的模式个人泛音和分析高阶横向寄生模式和锚损耗。积分的TMIM信号与谐振器中存储的机械能很好地一致。有限元建模的定量分析表明，在室温下，本底噪声相当于10 fm/sqrt（Hz）的面内位移，这可以在低温环境下进一步改善。我们的工作有助于MEMS谐振器的设计和表征，具有更好的性能，用于电信，传感和量子信息科学应用。
英文摘要：
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 ~ 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/sqrt(Hz) at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
