面向高精度与大行程应用的整体式六自由度并联定位系统
Monolithic Six-DOF Parallel Positioning System for High-precision and Large-range Applications
AI总结：
本文设计并验证一种由压电致动器驱动、电容传感器检测的整体式3D打印六自由度并联定位平台，实现大行程内纳米/微弧度级高分辨率定位。
摘要：
本文提出了一种紧凑、大行程的六自由度（six-DOF）并联定位系统，具有高分辨率、高谐振频率和高重复性。该系统主要由三个相同的运动学支路段组成。每个运动学支路段包含两个相同的位移放大与导向机构，这些机构最终连接到一条支链。每条支链两端均设计有万向节，并与运动平台相连。研究人员在ANSYS软件包中建立了定位器的计算模型，由此获得系统的输入刚度、输出柔度、行程以及模态分析结果。此外，还通过3D打印工艺成功制造了由丙烯腈-丁二烯-苯乙烯共聚物（ABS）制成的整体式原型。该原型分别由压电致动器（PEA）驱动，并由电容式位移传感器进行位移检测。最后，通过实验研究了所提出定位器的性能。其定位分辨率达到10.5 nm × 10.5 nm × 15 nm × 1.8 μrad × 1.3 μrad × 0.5 μrad。实验结果验证了所提出定位系统的行为与能力，也证实了其在整个行程范围内具备纳米级空间定位精度。该系统的实际应用可扩展至拾取与放置操作、显微外科/微装配中的振动消除，以及协作机械臂系统。
英文摘要：
A compact large-range six-degrees-of-freedom (six-DOF) parallel positioning system with high resolution, high resonant frequency, and high repeatability was proposed. It mainly consists of three identical kinematic sections. Each kinematic section consists of two identical displacement amplification and guiding mechanisms, which are finally connected to a limb. Each limb was designed with a universal joint at each end and connected to a moving stage. A computational model of the positioner was built in the ANSYS software package, hence, the input stiffness, output compliance, range, and modal analysis of the system were found. Furthermore, a monolithic prototype made of Acrylonitrile Butadiene Styrene (ABS) was successfully manufactured by the 3D-printing process. It was actuated and sensed by piezoelectric actuators (PEAs) and capacitive displacement sensors, respectively. Finally, the performances of this proposed positioner were experimentally investigated. The positioning resolution was achieved as 10.5nm {\times} 10.5nm {\times} 15nm {\times} 1.8μrad {\times} 1.3μrad {\times} 0.5μrad. The experimental results validate the behavior and capabilities of the proposed positioning system, and also verify the nanometer-scale spatial positioning accuracy within the overall stroke range. Practical applications of the proposed system can be expanded to pick-and-place manipulation, vibration-canceling in microsurgery/micro-assembly, and collaborative manipulators systems.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
