用于低能μ子谱仪的低能μ子谱仪薄膜与表面制备腔
Thin film and surface preparation chamber for the low energy muons spectrometer
AI总结：
本文设计并建造了用于低能μ子谱仪的薄膜制备腔，配备多种蒸发源与溅射设备，成功制备大面积均匀CuPc和TbPc₂分子薄膜并完成初步LE-μSR测量。
摘要：
我们设计并建造了一个薄膜制备腔，其基础压力低于 $2 \ imes 10^{-9}$ mbar。目前，该腔配备了两个大面积蒸发源（一个分子蒸发源和一个电子束蒸发源）、一个离子溅射枪、一个厚度监测器和一个衬底加热器。其设计使其能够处理大面积薄膜样品，并具备未来在真空中直接将其转移到低能μ子（LEM）谱仪或将于2024年建成的量子物质与材料中心（QMMC）中其他先进表征设施的可能性。该腔的初步调试在多种衬底材料上获得了高质量、大面积且均匀的 CuPc 和 TbPc$_2$ 分子薄膜。我们展示了在这些薄膜上进行的低能 $μ$SR（LE-$μ$SR）测量的首批结果。
英文摘要：
We have designed and constructed a thin film preparation chamber with base pressure of $<2 \times 10^{-9}$~mbar. Currently, the chamber is equipped with two large area evaporators (a molecular evaporator and an electron-beam evaporator), an ion sputtering gun, a thickness monitor and a substrate heater. It is designed such that it can handle large area thin film samples with a future possibility to transfer them in vacuum directly to the low energy muons (LEM) spectrometer or to other advanced characterization facilities in the Quantum Matter and Materials Center (QMMC) which will be constructed in 2024. Initial commissioning of the chamber resulted in high quality, large area and uniform molecular films of CuPc and TbPc$_2$ on various substrate materials. We present first results from low energy $μ$SR (LE-$μ$SR) measurements on these films.
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