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arXiv 2211.03369physics.app-ph
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用于麦克风应用的超灵敏石墨烯膜

Ultra-sensitive graphene membranes for microphone applications

Gabriele Baglioni, Roberto Pezone, Sten Vollebregt, Katarina Cvetanovic, Marko Spasenovic, Dejan Todorovic, Hanqing Liu, Gerard J. Verbiest, Herre S. J. van der… 展开作者

Gabriele Baglioni, Roberto Pezone, Sten Vollebregt, Katarina Cvetanovic, Marko Spasenovic, Dejan Todorovic, Hanqing Liu, Gerard J. Verbiest, Herre S. J. van der Zant, y, Peter G. Steeneken

摘要:

麦克风利用悬浮膜的运动来检测声波。由于麦克风性能可以通过减少其传感膜的厚度和质量来提高,因此石墨烯麦克风有望超越最先进的微机电(MEMS)麦克风,并允许设备进一步小型化。在这里,我们提出了一个激光振动测量研究的声学响应悬浮多层石墨烯膜麦克风应用。我们解决声学传感相关的性能参数,包括机械灵敏度,检测和非线性失真的限制,并讨论了石墨烯麦克风的设计中的权衡和限制。我们展示了石墨烯膜的优异机械灵敏度,比商业MEMS器件的顺应性高出2个数量级以上,并报告了低至15 dBSPL的检测限,比当前MEMS麦克风的检测限低10 - 15 dB。

英文摘要:

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10 - 15 dB lower than that featured by current MEMS microphones.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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