单次相干弹出式三维计量
Single-shot, coherent, pop-out 3D metrology
AI总结：
本文提出一种单次相干明场成像替代方案，仅需单张能量过滤图像即可恢复非晶薄样品3D体积，并在透射电子显微镜下验证，填补了快速无损3D纳米计量空白。
摘要：
纳米级分辨率下对薄且延展的样品进行三维（3D）成像，对生物学、材料科学、先进合成与制造等应用至关重要。实现3D成像的一种途径是断层扫描，它需要对局部区域进行倾角系列成像。在此，我们描述了一种相干成像替代方案，仅需单张能量过滤明场图像即可恢复均匀非晶薄样品的3D体积。我们利用透射电子显微镜演示了该技术，填补了快速、易获取、无损3D纳米计量领域的显著空白。该技术通常适用于利用电子、光子或任何其他类波粒子的任何相干明场成像。
英文摘要：
Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. Here we describe a coherent imaging alternative that recovers the 3D volume of a thin, homogeneously amorphous specimen with only a single, energy-filtered, bright-field image. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible, non-destructive 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
