We show that a metasurface-coated two-dimensional (2D) slab waveguide enables the generation of arbitrary complex light fields by combining the extreme versatility and freedom on wavefront control of optical metasurfaces with the compactness of photonic integrated circuits. We demonstrated off-chip 2D focusing and holographic projection with our metasurface-dressed photonic integrated devices. This technology holds the potential for many other optical applications requiring 2D light field manipulation with full on-chip integration, such as solid-state LiDAR and near-eye AR/VR displays.
Metasurfaces have achieved fruitful results in tailoring complexing light fields in free space. However, a systematic investigation on applying the concept of meta-optics to completely control waveguide modes is still elusive. Here we present a comprehensive catalog capable of selectively and exclusively excite almost arbitrary high-order waveguide modes of interest, leveraging silicon metasurface-patterned silicon nitride waveguides. By simultaneously engineering the phase-matched gradient of the metasurface and the vectorial spatial modal overlap between the nanoantenna near-field and target…
On-chip mode-division multiplexing (MDM) has been emerging as a promising technology to further enhance the link capacity and bandwidth of data communications with multiple mode channels. Both mode converters and mode exchangers are indispensable fundamental components for flexible mode operations. While several configurations have been developed previously, it is still very challenging to efficiently manipulate arbitrary high-order modes in a versatile way to reduce the R&D and prototyping costs. Here we initiate a breakthrough with a simple yet universal generic mode operator building block …
Polarimetric imaging has a wide range of applications for uncovering features invisible to human eyes and conventional imaging sensors. Compact, fast, cost-effective and accurate full-Stokes polarimetric imaging sensors are highly desirable in many applications, which, however, remain elusive due to fundamental material limitations. Here we present a Metasurface-based Full-Stokes Polarimetric Imaging sensor (MetaPolarIm) realized by integrating an ultrathin (~600 nm) metasurface polarization filter array (MPFA) onto a visible imaging sensor with CMOS compatible fabrication processes. The MPFA …
Replacing electrons with photons is a compelling route towards light-speed, highly parallel, and low-power artificial intelligence computing. Recently, all-optical diffractive neural deep neural networks have been demonstrated. However, the existing architectures often comprise bulky components and, most critically, they cannot mimic the human brain for multitasking. Here, we demonstrate a multi-skilled diffractive neural network based on a metasurface device, which can perform on-chip multi-channel sensing and multitasking at the speed of light in the visible. The metasurface is integrated wi…
On-chip spectral imaging based on engineered spectral modulation and computational spectral reconstruction provides a promising scheme for portable spectral cameras. However, the angle dependence of modulation units results in the angle sensitivity of spectral imaging, which limits its practical applications. Here, we proposed a design for angle-robust spectral recovery based on a group of topology-optimized plasmonic metasurface units under a 30° field-of-view, and demonstrate angle-insensitive on-chip spectral imaging in the wavelength range of 450 to 750 nm for average polarization. Further…
Making analogy with atomic physics is a powerful tool for photonic technology, witnessed by the recent development in topological photonics and non-Hermitian photonics based on parity-time symmetry. Mollow triplet is a prominent atomic effect with both fundamental and technological importance. Here we demonstrate the analogue of Mollow triplet with quantum photonic systems. Photonic entanglement is generated with spontaneous nonlinear processes in dressed photonic modes, which are introduced through coherent multimode coupling. We further demonstrate the flexibility of the photonic system to r…
Compact and robust cold atom sources are increasingly important for quantum research, especially for transferring cutting-edge quantum science into practical applications. In this letter, we report on a novel scheme that utilizes a metasurface optical chip to replace the conventional bulky optical elements used to produce a cold atomic ensemble with a single incident laser beam, which is split by the metasurface into multiple beams of the desired polarization states. Atom numbers $~10^7$ and temperatures (about 35 $μ$K) of relevance to quantum sensing are achieved in a compact and robust fashi…
We present a design approach for realizing on-chip wavelength division demultiplexing (WDD) schemes by integrating all-dielectric metasurfaces of TiO2 nanorod arrays into a SiN waveguide. The designed metasurface locally modifies the effective refractive index of the SiN waveguide, creating an effective WDD that selectively passes a certain band of wavelengths into a specific output port. A set of representative 2-channel and 3-channel WDDs schemes were demonstrated for input TE00/TM00 modes and operating in different bands, showing the flexibility of our design approach. The proposed WDD sche…
Metasurfaces provide the disruptive technology enabling miniaturization of complex cascades of optical elements on a plane. We leverage the benefits of such a surface to develop a planar integrated photonic beam collimator for on-chip optofluidic sensing applications. While most of the current work focuses on miniaturizing the optical "detection" hardware, little attention is given to develop on-chip hardware for optical "excitation". In this manuscript, we propose a flat metasurface for beam collimation in optofluidic applications. We implement an inverse design approach to optimize the metas…
Metasurfaces are two-dimensional optical structures enabling complete control of the amplitude, phase, and polarization of light. Unlike plasmonic metasurfaces, planar silicon structures facilitate high transmission, low losses and compatibility with existing semiconductor technologies. Here, we report an experimental demonstration of high-efficiency polarization- sensitive dielectric metasurfaces with full 2pi phase control in transmission mode at telecommunication wavelengths. Such silicon metasurfaces are poised to enable a versatile optical platform the realization of all-optical circuitry…
Spectral imaging paves way for various fields and particular in biomedical research. However, spectral imaging mainly depending on spatial or temporal scanning, cannot achieve high temporal, spatial and spectral resolution simultaneously. In this study, we demonstrated a silicon real-time ultra-spectral imaging chip based on reconfigurable metasurfaces, comprising of 155,216 (356$\times$436) image-adaptive micro-spectrometers with ultra-high center-wavelength accuracy of 0.04 nm and spectral resolution of 0.8 nm. It is employed for imaging brain hemodynamics, and the dynamic spectral absorptio…
We introduce chip-integrated visible light communication-band modulators based on niobium (Nb) metallic plasmonic nano-antenna arrays. Our plasmonic nano-devices provide strong sensitivity to the polarization of the incident visible light and the geometrical parameters of their subwavelength nanoscale building blocks. Moreover, they offer optical modulation properties with modulation depth MD = 60% at resonant wavelength lambda= 716 nm, at room temperature. By engineering the photo response of the Nb nano-device arrays, we observe a maximum extinction A(lambda)= 1- R(lambda}) = 95 % at resonan…
Many applications of metasurfaces require an ability to dynamically change their properties in time domain. Electrical tuning techniques are of particular interest, since they pave a way to on-chip integration of metasurfaces with optoelectronic devices. In this work, we propose and experimentally demonstrate an electro-optic lithium niobate (EO-LN) metasurface that shows dynamic modulations to phase retardation of transmitted light. Quasi-bound states in the continuum (QBIC) are observed from our metasurface. And by applying external electric voltages, the refractive index of the LN is change…
Metasurfaces control optical wavefronts via arrays of nanoscale resonators laid out across a surface. When combined with III-V semiconductors with strong optical nonlinearities, a variety of nonlinear effects such as harmonic generation and all optical modulation can be enabled and enhanced at the nanoscale. This review presents our research on engineering and boosting nonlinear effects in ultrafast and nonlinear semiconductor metasurfaces fabricated at the Center for Integrated Nanotechnologies (CINT). We cover our recent works on parametric generation of harmonic light via direct and cascade…
It has been recently shown that especially engineered light beams have the remarkable ability to propagate along curved trajectories in vacuum. Current methods for generating accelerating beams use phase modulators and lenses leading to length scales on the order of tens of centimeters or larger. This poses constraints and severely limits their applicability inside materials. Here, we accelerate light inside glass using a metasurface consisting of plasmonic nanoantennas. Highly-bending beams with radii of curvature on the order of a hundred microns were generated, and the imaged intensities ag…
Photonic metasurfaces are ultrathin electromagnetic wave-molding metamaterials providing the missing link for the integration of nanophotonic chips with nanoelectronic circuits. An extra twist in this field originates from spin-optical metasurfaces providing the photon spin (polarization helicity) as an additional degree of freedom in light-matter interactions at the nanoscale. Here we report on a generic concept to control the photonic transport by disordered (random) metasurfaces with a custom-tailored geometric phase. This approach combines the peculiarity of random patterns to support extr…
Polarization beam splitters, devices that separate the two orthogonal polarizations of light into different propagation directions, are one of the most ubiquitous optical elements. However, traditionally polarization splitters rely on bulky optical materials, while emerging optoelectronic and photonic circuits require compact, chip-scale polarization splitters. Here we show that a subwavelength rectangular lattice of cylindrical silicon Mie resonators functions as a polarization splitter, efficiently reflecting one polarization while transmitting the other. We show that the polarization splitt…
The phase-matching condition is a key aspect in nonlinear wavelength conversion processes, which requires the momenta of the photons involved in the processes to be conserved. Conventionally, nonlinear phase matching is achieved using either birefringent or periodically poled nonlinear crystals, which requires careful dispersion engineering and are usually narrowband. In recent years, metasurfaces consisting of densely packed arrays of optical antennas have been demonstrated to provide an effective optical momentum to bend light in arbitrary ways. Here, we demonstrate that gradient metasurface…
Over the past years, photonic metasurfaces have demonstrated their remarkable and diverse capabilities for achieving advanced control over light propagation by confining electromagnetic radiation within the deeply subwavelength thickness of these artificial films. Here, we demonstrate that metasurfaces also offer new unparalleled capabilities for decreasing the overall dimensions of integrated optical components and systems. We propose an original approach of embedding a metasurface inside one of the most fundamental optical elements -an optical cavity- to drastically scale-down the thickness …
Metasurfaces with unparalleled controllability of light have shown great potential to revolutionize conventional optics. However, they mainly work with free-space light input, which makes it difficult for full on-chip integration. On the other hand, integrated photonics enables densely packed devices but has limited free-space light controllability. Here, we show that judiciously designed guided-wave-driven metasurfaces can mold guided waves into arbitrary free-space modes to achieve complex free-space functions, such as beam steering and focusing, with ultrasmall footprints and potentially no…
Plasmonic metasurfaces enable simultaneous control of the phase, momentum, amplitude and polarisation of light and hence promise great utility in realisation of compact photonic devices. In this paper, we demonstrate a novel chip-scale device suitable for simultaneous polarisation and spectral measurements through use of six integrated plasmonic metasurfaces (IPMs), which diffract light with a given polarisation state and spectral component into well-defined spatial domains. Full calibration and characterisation of our device is presented, whereby good spectral resolution and polarisation accu…
Surfaces covered with layers of ultrathin nanoantenna structures, so-called metasurfaces, have recently been proven capable of completely controlling phase of light. Metalenses have emerged from the advance in the development of metasurfaces providing a new basis for recasting traditional lenses into thin, planar optical components capable of focusing light. The lens made of arrays of plasmonic gold nanorods were fabricated on a glass substrate by using electron beam lithography. A 1064 nm laser was used to create a high intensity circularly polarized light focal spot through metalens of focal…
Optical metasurfaces have great potential to form the platform for manipulation of surface waves. A plethora of advanced surface-wave phenomena utilizing negative refraction, self-collimation and channeling of 2D waves can be realized through on-demand engineering of dispersion properties of a periodic metasurface. In this letter, we report on the first-time direct experimental polarization-resolved measurement of dispersion of 2D optical plasmons supported by an anisotropic metasurface. We demonstrate that a subdiffractive array of strongly coupled resonant anisotropic plasmonic nanoparticles…
With the rapid advances of functional dielectric metasurfaces and their integration on on-chip nanophotonic devices, the necessity of metasurfaces working in different environments, especially in biological applications, arose. However, the metasurfaces' performance is tied to the unit cell's efficiency and ultimately the surrounding environment it was designed for, thus reducing its applicability if exposed to altering refractive index media. Here, we report a method to increase a metasurface's versatility by covering the high-index metasurface with a low index porous SiO$_2$ film, protecting…
Metasurfaces enable exceptional control over the light with surface-confined planar components, offering the fascinating possibility of very dense integration and miniaturization in photonics. Here, we design, fabricate and experimentally demonstrate chip-size plasmonic spectropolarimeters for simultaneous polarization state and wavelength determination. Spectropolarimeters, consisting of three gap-plasmon phase-gradient metasurfaces that occupy 120° circular sectors each, diffract normally incident light to six predesigned directions, whose azimuthal angles are proportional to the light wavel…
Terahertz waves offer a profound platform for next-generation sensing, imaging, and information communications. However, all conventional terahertz components and systems suffer from a bulky design, sensitivity to imperfections, and transmission losses. Here, we propose and experimentally demonstrate on-chip integration and miniaturization of topological devices which may address many existing drawbacks of the terahertz technology. We design and fabricate topological devices based on valley-Hall photonic structures that can be employed for various integrated components of on-chip terahertz sys…
Parametric oscillation is a fundamental concept that underlies nonlinear wave-matter interactions, leading to generation or amplification of new frequency components. Using a temporal modulation generated by the heterodyne interference of a control direct current (dc) electric field and an optical field, we resonantly drive large-amplitude oscillations of amorphous silicon meta-atoms - nanoscale building blocks of an optical metasurface. We observed gigantically enhanced second harmonic generation (SHG) with an electric-field-controlled on off ratio over 10000 and an ultra-high modulation dept…
Recent advances in holography, wireless sensing and light fidelity technologies have resulted in the need for antennas that can support highly efficient beam directivity for a broad angular range. Transmitarrays have been shown to be promising candidates for the determination of such structures. Here, we present a comprehensive methodology for the design of subwavelength all-dielectric flat metasurfaces with high transmission and deflection range. The metasurfaces are CMOS compatible and can be fabricated using conventional processing of silicon-on-insulator technology. The optimized structure…
Molding the flow of light at the nanoscale has been a grand challenge of nanophotonics for decades. It is now widely recognized that metasurfaces represent a chip-scale nanophotonics array technology capable of comprehensively controlling the wavefront of light via appropriately configuring subwavelength antenna elements. Here, we demonstrate a reconfigurable metasurface that is universal, i.e., notionally capable of providing diverse optical functions in the telecommunication wavelength regime, using a compact, lightweight, electronically-controlled array with no moving parts. By electro-opti…
Electro-optically tunable second-harmonic generation in lithium niobate metasurfaces boosted by Brillouin zone folding induced bound states in the continuum
Nanophotonic platforms such as metasurfaces, achieving arbitrary phase profiles within ultrathin thickness, emerge as miniaturized, ultracompact and kaleidoscopic optical vortex generators. However, it is often required to segment or interleave independent subarray metasurfaces to multiplex optical vortices in a single nano device, which in turn affects the compactness and channel capacity of the device. Here, inspired by phyllotaxis patterns in pine cones and sunflowers, we theoretically prove and experimentally report that multiple optical vortices can be produced in a single compact phyllot…
A new class of phenomena stemming from topological states of quantum matter has recently found a variety of analogies in classical systems. Spin-locking and one-way propagation have been shown to drastically alter our view on scattering of electromagnetic waves, thus offering an unprecedented robustness to defects and disorder. Despite these successes, bringing these new ideas to practical grounds meets a number of serious limitations. In photonics, when it is crucial to implement topological photonic devices on a chip, two major challenges are associated with electromagnetic dissipation into …
The emerging applications of silicon photonics in free space, such as LiDARs and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. A platform that offers arbitrary shaping of free-space emission while maintaining the CMOS compatibility and monolithic integration is in pressing need. Here we demonstrate a platform that integrates metasurfaces monolithically on silicon photonic integrated circuits. The metasurfaces consist of amorphous silicon nanopillars evanescently coupled to silicon waveguides. We demonstrate experimentally diffracti…
