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arXiv 2108.06134physics.plasm-phphysics.app-ph
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非均匀电负性等离子体中跨磁场的平衡电势分布

Equilibrium potential profile across magnetic field in inhomogeneous electronegative plasma

Pawandeep Singh, Swati, Shantanu Kumar Karkari

摘要:

本文研究了13.56MHz环形电极共聚焦射频放电产生的氩氧等离子体中沿磁场线的等离子体电位分布。结果表明,随着磁场强度和气压的增加,径向等离子体密度、电子温度和等离子体电势呈现出异常的变化趋势。本文建立了一个解析模型,用以解释当导电边界的短路效应可以忽略不计时径向等离子体电势的分布。据发现,与某些近似,等离子体电位分布可以很好地相关的局部等离子体密度,电子温度,和体电负性类似的玻尔兹曼关系。

英文摘要:

This paper presents the plasma potential distribution across magnetic field lines in an argon/oxygen plasma created by 13.56 MHz CCRF discharge consisting of a pair of ring electrodes. It is found that the radial plasma density, electron temperature, and plasma potential shows unusual trends as the magnetic field strength and gas pressure increase. An analytical model has been formulated to explain the radial plasma potential profile when the short-circuiting effect due to conducting boundaries can be neglected. It is found that with certain approximations, the plasma potential distribution can be very well related to the local plasma density, electron temperature, and bulk electronegativity similar to a Boltzmann relation.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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