Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning
Delft University of Technology（代尔夫特理工大学）
Dongil Shin, Andrea Cupertino, Matthijs H. J. de Jong, Peter G. Steeneken, Miguel A. Bessa, Richard A. Norte
发表信息：
Shin, D., Cupertino, A., de, M. H. J., Steeneken, P. G., Bessa, M. A., Norte, R. A., Spiderweb Nanomechanical Resonators via Bayesian Optimization: Inspired by Nature and Guided by Machine Learning. Adv. Mater. 2021, 2106248
From ultra-sensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bio-inspired resonator is then fabricated; experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design which does not require sub-micron lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. Here we demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.
We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental…
Quasicrystal Architected Nanomechanical Resonators via Data-Driven Design
Department of Precision and Microsystems Engineering, Delft University of Technology（代尔夫特理工大学精密与微系统工程系）；Department of Mechanical Engineering, Pohang University of Science and Technology（浦项科技大学机械工程系）
Studies involving nanomechanical motion have evolved from its detection and understanding of its fundamental aspects to its promising practical utility as an integral component of hybrid systems. Nanomechanical resonators' indispensable role as transducers between optical and microwave fields in hybrid systems, such as quantum communications interface, have elevated their importance in recent years. It is therefore crucial to determine which among the family of nanomechanical resonators is more suitable for this role. Most of the studies revolve around nanomechanical resonators of ultrathin st…
The motion of a vibrating object is determined by the way it is held. This simple observation has long inspired string instrument makers to create new sounds by devising elegant string clamping mechanisms, whereby the distance between the clamping points is modulated as the string vibrates. At the nanoscale, the simplest way to emulate this principle would be to controllably make nanoresonators slide across their clamping points, which would effectively modulate their vibrating length. Here, we report measurements of flexural vibrations in nanomechanical resonators that reveal such a sliding m…
Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such structures. We introduce an analytical model based on von Kármán theory, which can be numerically evaluated using finite-element models for arbitrary geometries. We use this approach to predict nonlinear loss and (Duffing) frequency shift in ultracoherent phononic membrane resonators. A set of systematic measurements with silicon nitride membranes shows good ag…
Engineered micro- and nanomechanical resonators with ultra-low dissipation constitute the ideal systems for applications ranging from high-precision sensing such as magnetic resonance force microscopy, to quantum transduction between disparate quantum systems. Traditionally, the improvement of the resonator's performance - often quantified by its Qf product (where Q is quality factor and f is frequency) - through nanomechanical engineering such as dissipation dilution and strain engineering, has been driven by human intuition and insight. Such an approach is inefficient and leaves aside a plet…
We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detect…
We report the design, fabrication, and characterization of diamond cantilevers attached to a phononic square lattice. We show that the robust protection of mechanical modes by phononic band gaps leads to a three-orders-of-magnitude increase in mechanical Q-factors, with the Q-factors exceeding 10^6 at frequencies as high as 100 MHz. Temperature dependent studies indicate that the Q-factors obtained at a few K are still limited by the materials loss. The high-Q diamond nanomechanical resonators provide a promising hybrid quantum system for spin-mechanics studies.
