We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental data. This opens a perspective for stress-engineering the mechanical quality factor of nanomechanical string resonators.
Studies involving nanomechanical motion have evolved from its detection and understanding of its fundamental aspects to its promising practical utility as an integral component of hybrid systems. Nanomechanical resonators' indispensable role as transducers between optical and microwave fields in hybrid systems, such as quantum communications interface, have elevated their importance in recent years. It is therefore crucial to determine which among the family of nanomechanical resonators is more suitable for this role. Most of the studies revolve around nanomechanical resonators of ultrathin st…
We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In$_{1-x}$Ga$_{x}$P. The intrinsic strain is a consequence of the epitaxial growth given by the lattice mismatch between the thin film and the substrate which is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by def…
The motion of a vibrating object is determined by the way it is held. This simple observation has long inspired string instrument makers to create new sounds by devising elegant string clamping mechanisms, whereby the distance between the clamping points is modulated as the string vibrates. At the nanoscale, the simplest way to emulate this principle would be to controllably make nanoresonators slide across their clamping points, which would effectively modulate their vibrating length. Here, we report measurements of flexural vibrations in nanomechanical resonators that reveal such a sliding m…
Networks of coupled resonators are an ubiquitous concept in physics, forming the basis of synchronization phenomena, metamaterial formation, nonreciprocal behavior and topological effects. Such systems are typically explored using optical or microwave resonators. In recent years, mechanical resonators have entered the stage as universal building block for resonator networks, both for their well-controlled mechanical properties and for their eigenfrequencies conveniently located in the radio-frequency regime. Vertically oriented nanomechanical pillar resonators are ideally suited for the dense …
Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such structures. We introduce an analytical model based on von Kármán theory, which can be numerically evaluated using finite-element models for arbitrary geometries. We use this approach to predict nonlinear loss and (Duffing) frequency shift in ultracoherent phononic membrane resonators. A set of systematic measurements with silicon nitride membranes shows good ag…
The shape of a nanomechanical resonator profoundly affects its mechanical properties and determines its suitability for various applications, such as ultra-sensitive mass and force detection. Despite the promise of two-dimensional nanomechanical systems in such applications, full control over the shape of suspended two-dimensional materials, such as graphene, has not been achieved. We present an effective, single-step method to shape presuspended graphene into nanomechanical resonators with arbitrary geometries leading to enhanced properties in comparison to conventional drumheads. Our techniq…
We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detect…
Nanomechanical resonators based on strained silicon nitride (Si$_3$N$_4$) have received a large amount of attention in fields such as sensing and quantum optomechanics due to their exceptionally high quality factors ($Q$s). Room-temperature $Q$s approaching 1 billion are now in reach by means of phononic crystals (soft-clamping) and strain engineering. Despite great progress in enhancing $Q$s, difficulties in fabrication of soft-clamped samples limits their implementation into actual devices. An alternative means of achieving ultra-high $Q$s was shown using trampoline resonators with engineere…
We study the transverse oscillatory modes of nanomechanical silicon nitride strings under high tensile stress as a function of geometry and mode index m <= 9. Reproducing all observed resonance frequencies with classical elastic theory we extract the relevant elastic constants. Based on the oscillatory local strain we successfully predict the observed mode-dependent damping with a single frequency independent fit parameter. Our model clarifies the role of tensile stress on damping and hints at the underlying microscopic mechanisms.
We study nanomechanical resonators with frequency fluctuations due to diffusion of absorbed particles. The diffusion depends on the vibration amplitude through inertial effect. We find that, if the diffusion coefficient is sufficiently large, the resonator response to periodic driving displays bistability. The lifetime of the coexisting vibrational states scales exponentially with the diffusion coefficient. It also displays a characteristic scaling dependence on the distance to bifurcation points.
Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on nanometer scales. Driven by two neighboring frequencies the resonators generate rich power spectra exhibiting a multitude of satellite peaks. This nonlinear response is studied and compared to $n^{th}$-order perturbation theory and nonperturbative numerical calculations.
Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically-actuated, piezoresistively-transduced nanomechanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to very large amplitudes compared to fundamental limits like pull-in occurrence, opening the way towards resonators with high frequency stability for high-performance sensing or time reference.
We describe a quantum computational architecture based on integrating nanomechanical resonators with Josephson junction phase qubits, with which we implement single- and multi-qubit operations. The nanomechanical resonator is a GHz-frequency, high-quality-factor dilatational resonator, coupled to the Josephson phase through a piezoelectric interaction. This system is analogous to one or more few-level atoms (the Josephson qubits) in a tunable electromagnetic cavity (the nanomechanical resonator). Our architecture combines the best features of solid-state and cavity-QED approaches, and may make…
Engineered micro- and nanomechanical resonators with ultra-low dissipation constitute the ideal systems for applications ranging from high-precision sensing such as magnetic resonance force microscopy, to quantum transduction between disparate quantum systems. Traditionally, the improvement of the resonator's performance - often quantified by its Qf product (where Q is quality factor and f is frequency) - through nanomechanical engineering such as dissipation dilution and strain engineering, has been driven by human intuition and insight. Such an approach is inefficient and leaves aside a plet…
We report on a systematic study of nanomechanical dissipation in high-frequency (approximatively 300 MHz) gallium arsenide optomechanical disk resonators, in conditions where clamping and fluidic losses are negligible. Phonon-phonon interactions are shown to contribute with a loss background fading away at cryogenic temperatures (3 K). Atomic layer deposition of alumina at the surface modifies the quality factor of resonators, pointing towards the importance of surface dissipation. The temperature evolution is accurately fitted by two-level systems models, showing that nanomechanical dissipati…
We propose a scheme able to entangle at the steady state a nanomechanical resonator with a microwave cavity mode of a driven superconducting coplanar waveguide. The nanomechanical resonator is capacitively coupled with the central conductor of the waveguide and stationary entanglement is achievable up to temperatures of tens of milliKelvin.
We present measurements on nanomechanical resonators machined from Silicon-on-Insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1 - 4 um and a thickness of 200 nm. The beams are driven into nonlinear response by an applied modulation at radio frequencies and a magnetic field in plane. The strong hysteresis of the magnetomotive response allows sensitive charge detection by varying the electrostatic potential of a gate electrode.
We describe the measurement and modeling of amplitude noise and phase noise in ultra-high Q nanomechanical resonators made from stoichiometric silicon nitride. With quality factors exceeding 2 million, the resonators' noise performance is studied with high precision. We find that the amplitude noise can be well described by the thermomechanical model, however, the resonators exhibit sizable extra phase noise due to their intrinsic frequency fluctuations. We develop a method to extract the resonator frequency fluctuation of a driven resonator and obtain a noise spectrum with dependence, which c…
We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of the mechanical beam.
We demonstrate how to build a vibrating wire resonator for phonon excitation in liquid helium. The resonator is designed as a nanoscopic mechanically flexible beam machined out of a semiconductor/metal-hybrid. Quenching of the mechanical resonance around 100 MHz by phonon excitation in liquid ^4He at 4.2 K is shown. First measurements operating the nano-resonator in a dilution of ^3He/^4He at 30 mK are presented.
We present a scheme of generating large-amplitude Schrödinger cat states and entanglement in a coupled system of nanomechanical resonator and single Cooper pair box (SCPB), without being limited by the magnitude of the coupling. It is shown that the entanglement between the resonator and the SCPB can be detected by a spectroscopic method.
We show two effects as a result of considering the second-order correction to the spectrum of a nanomechanical resonator electrostatically coupled to a Cooper-pair box. The spectrum of the Cooper-pair box is modified in a way which depends on the Fock state of the resonator. Similarly, the frequency of the resonator becomes dependent on the state of the Cooper-pair box. We consider whether these frequency shifts could be utilized to prepare the nanomechanical resonator in a Fock state, to perform a quantum non-demolition measurement of the resonator Fock state, and to distinguish the phase sta…
Misfit strain is inevitable in various heterostructures like the graphene/MoS 2 van der Waals heterostructure. Although the misfit strain effect on electronic and other physical properties have been well studied, it is still unclear how will the misfit strain affect the performance of the nanomechanical resonator based on the graphene/MoS 2 heterostructure. By performing molecular dynamics simulations, we disclose a misfit strain-induced decoupling phenomenon between the graphene layer and the MoS 2 layer during the resonant oscillation of the heterostructure. A direct relationship between the…
The damping rates of high quality factor nanomechanical resonators are well beyond intrinsic limits. Here, we explore the underlying microscopic loss mechanisms by investigating the temperature-dependent damping of the fundamental and third harmonic transverse flexural mode of a doubly clamped silicon nitride string. It exhibits characteristic maxima reminiscent of two-level defects typical for amorphous materials. Coupling to those defects relaxes the momentum selection rules, allowing energy transfer from discrete long wavelength resonator modes to the high frequency phonon environment.
We present measurements of the dissipation and frequency shift in nanomechanical gold resonators at temperatures down to 10 mK. The resonators were fabricated as doubly-clamped beams above a GaAs substrate and actuated magnetomotively. Measurements on beams with frequencies 7.95 MHz and 3.87 MHz revealed that from 30 mK to 500 mK the dissipation increases with temperature as $T^{0.5}$, with saturation occurring at higher temperatures. The relative frequency shift of the resonators increases logarithmically with temperature up to at least 400 mK. Similarities with the behavior of bulk amorphous…
Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular. In this letter we study the in uence of oxygen plasma on the tensile stress and intrinsic damping of nanomechanical silicon nitride resonators. Oxygen plasma treatments are common steps in micro and nanofabrication. We show that oxygen plasma of only a few minutes oxidizes the silicon nitride surface, creating several nanometer thick silicon dioxide layers with a compressive stress of 1.30(16)GPa. Such oxide layers …
We report the design, fabrication, and characterization of diamond cantilevers attached to a phononic square lattice. We show that the robust protection of mechanical modes by phononic band gaps leads to a three-orders-of-magnitude increase in mechanical Q-factors, with the Q-factors exceeding 10^6 at frequencies as high as 100 MHz. Temperature dependent studies indicate that the Q-factors obtained at a few K are still limited by the materials loss. The high-Q diamond nanomechanical resonators provide a promising hybrid quantum system for spin-mechanics studies.
We consider a quantum model of a nanomechanical flexing beam resonator interacting with a bath comprising a few damped tunneling two level systems (TLS's). In contrast with a resonator interacting bilinearly with an ohmic free oscillator bath (modeling clamping loss, for example), the mechanical resonator damping is amplitude dependent, while the decoherence of quantum superpositions of mechanical position states depends only weakly on their spatial separation.
Quasicrystal Architected Nanomechanical Resonators via Data-Driven Design
Department of Precision and Microsystems Engineering, Delft University of Technology（代尔夫特理工大学精密与微系统工程系）；Department of Mechanical Engineering, Pohang University of Science and Technology（浦项科技大学机械工程系）
Two elastically coupled nanomechanical resonators driven independently near their resonance frequencies show intricate nonlinear dynamics. The dynamics provide a scheme for realizing a nanomechanical system with tunable frequency and nonlinear properties. For large vibration amplitudes the system develops spontaneous oscillations of amplitude modulation that also show period doubling transitions and chaos. The complex nonlinear dynamics are quantitatively predicted by a simple theoretical model.
We have developed capacitively-transduced nanomechanical resonators using sp$^2$-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of $500{\,\,}^\circ$C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-control…
We analyze the noise properties of two single electron transistors (SETs) coupled via a shared voltage gate consisting of a nanomechanical resonator. Working in the regime where the resonator can be treated as a classical system, we find that the SETs act on the resonator like two independent heat baths. The coupling to the resonator generates positive correlations in the currents flowing through each of the SETs as well as between the two currents. In the regime where the dynamics of the resonator is dominated by the back-action of the SETs, these positive correlations can lead to parametrica…
We observe transport of electrons through a metallic island on the tip of a nanomechanical pendulum. The resulting tunneling current shows distinct features corresponding to the discrete mechanical eigenfrequencies of the pendulum. We report on measurements covering the temperature range from 300 K down to 4.2 K. We explain the I-V curve, which differs from previous theoretical predictions, with model calculations based on a Master equation approach.
We present an experiment that systematically probes the basins of attraction of two fixed points of a nonlinear nanomechanical resonator and maps them out with high resolution. We observe a separatrix which progressively alters shape for varying drive strength and changes the relative areas of the two basins of attraction. The observed separatrix is blurred due to ambient fluctuations, including residual noise in the drive system, which cause uncertainty in the preparation of an initial state close to the separatrix. We find a good agreement between the experimentally mapped and theoretically …
We present an integrated scheme for dielectric drive and read-out of high-Q nanomechanical resonators which enables tuning of both the resonance frequency and quality factor with an applied DC voltage. A simple model for altering these quantities is derived, incorporating the resonator's complex electric polarizability and position in an inhomogeneous electric field, which agrees very well with the experimental findings as well as FEM simulations. By comparing two sample geometries we are able to show that careful electrode design can determine the direction of frequency tuning of flexural in-…
The Landau-Zener transition is a fundamental concept for dynamical quantum systems and has been studied in numerous fields of physics. Here we present a classical mechanical model system exhibiting analogous behaviour using two inversely tuneable, strongly coupled modes of the same nanomechanical beam resonator. In the adiabatic limit, the anticrossing between the two modes is observed and the coupling strength extracted. Sweeping an initialized mode across the coupling region allows mapping of the progression from diabatic to adiabatic transitions as a function of the sweep rate.
We propose a scheme for generating the Schrödinger cat state based on geometric operations by a nanomechanical resonator coupled to a superconducting charge qubit. The charge qubit, driven by two strong classical fields, interacts with a high-frequency phonon mode of the nanomechanical resonator. During the operation, the charge qubit undergoes no real transitions, while the phonon mode of the nanomechanical resonator is displaced along different paths in the phase space, dependent on the states of the charge qubit, which yields the Schrödinger cat state. The robustness of the scheme is justif…
The dynamics of nanomechanical resonators driven by both low- and high-frequency signals is studied. Considering, as an example, resonators made of a doubly-clamped beam with magnetomotive driving, it is shown that three-frequency resonances arise due to the interaction of the above frequencies. Properties and characteristics of these resonances are determined analytically for linear and nonlinear modes of the resonator excitation. It is shown that in opposite to the conventional two-frequency resonance, the central frequency of these resonances, their linear dynamic range, and the critical va…
I study dephasing of an underdamped nanomechanical resonator subject to random mass loading of small particles. I present a frequency noise model which describes dephasing due to attachment and detachment of particles at random points and particle diffusion along the resonator. This situation is commonly encountered in current mass measurement experiments using NEM resonators. I discuss the conditions which can lead to inhomogeneous broadening and fine structure in the modes absorption spectra. I also show that the spectra of the higher order cumulants of the (complex) vibrational mode amplitu…
The energy dissipation 1/Q (where Q is the quality factor) and resonance frequency characteristics of single-crystal 3C-SiC ultrahigh frequency (UHF) nanomechanical resonators are measured, for a family of UHF resonators with resonance frequencies of 295MHz, 395MHz, 411MHz, 420MHz, 428MHz, and 482MHz. A temperature dependence of dissipation, 1/Q ~ T^(0.3) has been identified in these 3C-SiC devices. Possible mechanisms that contribute to dissipation in typical doubly-clamped beam UHF resonators are analyzed. Device size and dimensional effects on the dissipation are also examined. Clamping los…
Controlling the strain in two-dimensional materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by laser-oxidation of nano-drumhead resonators made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Prior to the study of their mechanical properties with a laser interferometer, we checked the oxidation and crystallinity of the freely-suspended tantalum oxide in a high-resolution electro…
We study theoretically a radio frequency superconducting interference device integrated with both a nanomechanical resonator and an LC one. By applying adiabatic and rotating wave approximations, we obtain an effective Hamiltonian that governs the dynamics of the mechanical and LC resonators. Nonlinear terms in this Hamiltonian can be exploited for performing a quantum nondemolition measurement of Fock states of the nanomechanical resonator. We address the feasibility of experimental implementation and show that the nonlinear coupling can be made sufficiently strong to allow the detection of d…
We describe a cavity QED analogue for the coupling system of a spin and a nanomechanical resonator with a magnetic tip. For the quantized nanomechanical resonator, a spin-boson model for this coupling system can refer to a Jaynes-Cummings(JC) or an anti-JC model. These observations predict some quantum optical phenomena, such as squeezing and "collapse-revival" in the single oscillation mode of the nanomechanical resonator when it is initially prepared in the quasi-classical state. By modulating the phase of RF magnetic field one can switch the system between the JC and anti-JC model, which pr…
We investigate nonlinear dispersive mode coupling between the flexural in- and out-of-plane modes of two doubly clamped, nanomechanical silicon nitride string resonators. As the amplitude of one mode transitions from the linear response regime into the nonlinear regime, we find a frequency shift of two other modes. The resonators are strongly elastically coupled via a shared clamping point and can be tuned in and out of resonance dielectrically, giving rise to multimode avoided crossings. When the modes start hybridizing, their polarization changes. This affects the nonlinear dispersive coupli…
We experimentally study stochastic resonance in a nonlinear bistable nanomechanical resonator. The device consists of a PdAu doubly clamped beam serving as a nanomechanical resonator excited capacitively by an adjacent gate electrode and its vibrations are detected optically. The resonator is tuned to its bistability region by an intense pump near a point of equal transition rates between its two metastable states. The pump is amplitude modulated, inducing modulation of the activation barrier between the states. When noise is added to the excitation, the resonator's displacement exhibits noise…
The electrical response of two-dimensional electron gas to vibrations of a nanomechanical cantilever containing it is studied. Vibrations of perpendicularly oriented cantilevers are experimentally shown to change oppositely the conductivity near their bases. This indicates the piezoelectric nature of electromechanical coupling. A physical model is developed, which quantitatively explains the experiment. It shows that the main origin of the conductivity change is a rapid change in the mechanical stress on the boundary between suspended and non-suspended areas, rather than the stress itself.
We discuss two theoretical proposals for controlling the nonequilibrium steady state of nanomechanical resonators using quantum electronic transport. Specifically?, we analyse two approaches to achieve the ground-state cooling of the mechanical vibration coupled to a quantum dot embedded between (i) spin-polarised contacts or (ii) a normal metal and a superconducting contact. Assuming a suitable coupling between the vibrational modes and the charge or spin of the electrons in the quantum dot, we show that ground-state cooling of the mechanical oscillator is within the state of the art for susp…
We present a ground state cooling scheme for a nanomechanical resonator linearly coupled with a LC oscillator. The linear coupling, when periodically modulated at red detuning, up-converts the low-frequency nanomechanical mode to the high-frequency LC oscillator mode and generates backaction force that can cool the resonator to its ground state in the resolved-sideband regime. We also study the effect of the quantum backaction noise on the cooling due to the counter rotating term in the linear coupling. The scheme can be compared with laser cooling for the atomic systems and can be realized in…
We show that the vibrations of a nanomechanical resonator can be cooled to near its quantum ground state by tunnelling injection of electrons from an STM tip. The interplay between two mechanisms for coupling the electronic and mechanical degrees of freedom results in a bias-voltage dependent difference between the probability amplitudes for vibron emission and absorption during tunneling. For a bias voltage just below the Coulomb blockade threshold we find that absorption dominates, which leads to cooling corresponding to an average vibron population of the fundamental bending mode of 0.2.
When a contaminant diffuses on the surface of a nanomechanical resonator, the motions of the two become correlated. Despite being a high-order effect in the resonator-particle coupling, such correlations affect the system dynamics by inducing dissipation of the resonator energy. Here, we consider this diffusion-induced dissipation in the cases of multiple particles adsorbed on carbon nanotube and graphene resonators. By solving the stochastic equations of motion, we simulate the ringdown of the resonator, in order to determine the resonator energy decay rate. We find two different scalings wit…
Statistical Properties of a Fluctuation-Driven Nanomechanical Duffing Resonator
Boston University（波士顿大学）；Virginia Tech（弗吉尼亚理工大学）；James Madison University（詹姆斯麦迪逊大学）；Sabanci University（萨班哲大学）；Bilkent University（比尔肯特大学）；Gordon College（戈登学院）
Thermalization in nonlinear systems is a central concept in statistical mechanics and has been extensively studied theoretically since the seminal work of Fermi, Pasta and Ulam (FPU). Using molecular dynamics and continuum modeling of a ring-down setup, we show that thermalization due to nonlinear mode coupling intrinsically limits the quality factor of nanomechanical graphene drums and turns them into potential test beds for FPU physics. We find the thermalization rate $Γ$ to be independent of radius and scaling as $Γ\sim T^*/ε_{\rm pre}^2$, where $T^*$ and $ε_{\rm pre}$ are effective resonat…
We have developed a nanomechanical resonator, for which the motional degree of freedom is a superfluid 4He oscillating flow confined to precisely defined nanofluidic channels. It is composed of an in-cavity capacitor measuring the dielectric constant, which is coupled to a superfluid Helmholtz resonance within nanoscale channels, and it enables sensitive detection of nanofluidic quantum flow. We present a model to interpret the dynamics of our superfluid nanomechanical resonator, and we show how it can be used for probing confined geometry effects on thermodynamic functions. We report isobaric…
We present nanofabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm, and lateral dimensions up to 240 um. Quality factors exceeding one million are found at room temperature, surpassing those of state-of-the-art single-crystal silicon cantilevers of similar dimensions by roughly an order of magnitude. Force sensitivities of a few hundred zeptonewtons result for the best cantilevers at millikelvin temperatures. Single-crystal diamond could thus directly improve existing force and mass sensors by a simp…
