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arXiv 2104.14992cond-mat.mtrl-sci
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通过替代的STEM扫描策略减少电子束损伤。第II部分-试图建立一个描述损伤过程的经验模型

Reducing electron beam damage through alternative STEM scanning strategies. Part II -- Attempt towards an empirical model describing the damage process

D. Jannis, A. Velazco, A. Béché, J. Verbeeck

摘要:

在这一系列的第二部分中,我们试图构建一个经验模型,该模型可以模仿所有关于在特定沸石样品中的光束损伤的STEM成像中替代交错扫描模式的作用的实验观察。我们利用一个二维扩散模型,描述了耗散的沉积的光束能量的序列中的探针的位置,在扫描模式期间访问。扩散过程允许通过仔细调整连续访问的探针位置之间的停留时间和距离来尝试超越光束损伤的概念。我们增加了一个非线性函数,包括阈值效应和评估的累积损伤的扫描模式的细节的函数的图像的每个部分。总之,这些成分能够定性地描述实验数据的所有方面,并为我们提供一个模型,可以引导进一步优化,甚至更低的束损伤,而不降低所施加的电子剂量。我们故意对这里的扩散保持模糊,以避免引入太多样本特定的细节。这提供了希望,该模型也可以应用于样本类,尚未研究在这样的细节,通过调整更高级别的参数:样本依赖的扩散常数和损伤阈值。

英文摘要:

In this second part of a series we attempt to construct an empirical model that can mimick all experimental observations made regarding the role of an alternative interleaved scan pattern in STEM imaging on the beam damage in a specific zeolite sample. We make use of a 2D diffusion model that describes the dissipation of the deposited beam energy in the sequence of probe positions that are visited during the scan pattern. The diffusion process allows for the concept of trying to outrun the beam damage by carefully tuning the dwell time and distance between consecutively visited probe positions. We add a non linear function to include a threshold effect and evaluate the accumulated damage in each part of the image as a function of scan pattern details. Together, these ingredients are able to describe qualitatively all aspects of the experimental data and provide us with a model that could guide a further optimisation towards even lower beam damage without lowering the applied electron dose. We deliberately remain vague on what is diffusing here which avoids introducing too many sample specific details. This provides hope that the model can be applied also in sample classes that were not yet studied in such great detail by adjusting higher level parameters: a sample dependent diffusion constant and damage threshold.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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