多晶金刚石涂层的综合形貌表征
Comprehensive topography characterization of polycrystalline diamond coatings
摘要：
金刚石涂层的表面形貌强烈地影响表面特性，如粘附、摩擦、磨损和生物相容性。然而，传统的测量方法只捕获单一的长度尺度，这阻碍了对多尺度形貌及其对性质的影响的理解。在这里，四种不同的多晶金刚石涂层的特点是使用透射电子显微镜，以评估粗糙度下降到亚纳米级。然后，这些测量相结合，使用功率谱密度（PSD），与传统的方法（触针轮廓术和原子力显微镜）来表征所有尺度的地形。结果表明，在所有长度尺度上测量地形的至关重要性，特别是因为它们的PSD彼此交叉，使得在较大尺度上较粗糙的表面在较小尺度上可能较光滑，反之亦然。此外，这些测量揭示了多尺度形貌和晶粒尺寸之间的联系，在平均晶粒尺寸和略低于平均晶粒尺寸处具有特征标度行为，并且在其他长度尺度处具有自仿射分形粗糙度。在小（亚晶粒）尺度下，未抛光表面表现出一种常见的残余粗糙度形式，这种形式本质上是自仿射的，但难以用传统方法检测。这种从原子尺度到宏观尺度捕获形貌的方法被称为综合形貌表征，并且来自这些表面的所有形貌数据都可用于实验学家和理论家的进一步分析。科学上，这项调查已经确定了四个特征区域的地形缩放多晶金刚石材料。
英文摘要：
The surface topography of diamond coatings strongly affects surface properties such as adhesion, friction, wear, and biocompatibility. However, the understanding of multi-scale topography, and its effect on properties, has been hindered by conventional measurement methods, which capture only a single length scale. Here, four different polycrystalline diamond coatings are characterized using transmission electron microscopy to assess the roughness down to the sub-nanometer scale. Then these measurements are combined, using the power spectral density (PSD), with conventional methods (stylus profilometry and atomic force microscopy) to characterize all scales of topography. The results demonstrate the critical importance of measuring topography across all length scales, especially because their PSDs cross over one another, such that a surface that is rougher at a larger scale may be smoother at a smaller scale and vice versa. Furthermore, these measurements reveal the connection between multi-scale topography and grain size, with characteristic scaling behavior at and slightly below the mean grain size, and self-affine fractal-like roughness at other length scales. At small (subgrain) scales, unpolished surfaces exhibit a common form of residual roughness that is self-affine in nature but difficult to detect with conventional methods. This approach of capturing topography from the atomic- to the macro-scale is termed comprehensive topography characterization, and all of the topography data from these surfaces has been made available for further analysis by experimentalists and theoreticians. Scientifically, this investigation has identified four characteristic regions of topography scaling in polycrystalline diamond materials.
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