纳米压印技术在薄膜多晶硅太阳能电池中集成二维周期性纳米图案
Integration of a 2D Periodic Nanopattern Into Thin Film Polycrystalline Silicon Solar Cells by Nanoimprint Lithography
摘要：
实验研究了利用纳米压印光刻和干法刻蚀技术制备的二维周期性纳米图形在铝诱导结晶（AIC）多晶硅（Poly-Si）薄膜太阳电池中的集成。与未图案化的电池相比，由于纳米图案，已经实现了光吸收的6%的增加，这又将短路电流从20.6 mA/cm 2增加到23.8 mA/cm 2。另一方面，效率从6.4%有限地增加到6.7%。我们使用的转移长度法（TLM），纳米图案引起的表面形貌修改增加了减反射膜（ARC）层的薄层电阻，以及ARC层和发射极前接触之间的接触电阻。这又导致纳米图案化电池的串联电阻增加，这转化为填充因子减小，解释了效率的有限增加。
英文摘要：
The integration of two-dimensional (2D) periodic nanopattern defined by nanoimprint lithography and dry etching into aluminum induced crystallization (AIC) based polycrystalline silicon (Poly-Si) thin film solar cells is investigated experimentally. Compared to the unpatterned cell an increase of 6% in the light absorption has been achieved thanks to the nanopattern which, in turn, increased the short circuit current from 20.6 mA/cm2 to 23.8 mA/cm2. The efficiency, on the other hand, has limitedly increased from 6.4% to 6.7%. We show using the transfer length method (TLM) that the surface topography modification caused by the nanopattern has increased the sheet resistance of the antireflection coating (ARC) layer as well as the contact resistance between the ARC layer and the emitter front contacts. This, in turn, resulted in increased series resistance of the nanopatterned cell which has translated into a decreased fill factor, explaining the limited increase in efficiency.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
