Silicon p-n junction diodes emit low-intensity, broad-spectrum light near 1120 nm in forward bias and between 400-900 nm in reverse bias (avalanche). For the first time, we experimentally achieve optical absorption sensing of pigment in solution with silicon micro LEDs designed in a standard silicon-on-insulator CMOS technology. By driving a single LED in both forward and avalanche modes of operation, we steer its electroluminescent spectrum between visible and near-infrared (NIR). We then characterize the vertical optical transmission of both visible and NIR light from the LED through the same micro-droplet specimen to a vertically mounted discrete silicon photodiode. The effective absorption coefficient of carmine solution in glycerol at varying concentrations were extracted from the color ratio in optical coupling. By computing the LED-specific molar absorption coefficient of carmine, we estimate the concentration (0.040 mo/L) and validate the same with a commercial spectrophotometer (0.030 mol/L ). With a maximum observed sensitivity of 1260 /cm /mol L, the sensor is a significant step forward towards low-cost CMOS-integrated optical sensors with silicon LED as the light source intended for biochemical analyses in food sector and plant/human health.
We demonstrate the first monolithically integrated linear photonic crystal microcavities in an advanced SOI CMOS microelectronics process (IBM 45nm 12SOI) with no in-foundry process modifications. The cavities were integrated into a standard microelectronics design flow meeting process design rules, and fabricated alongside transistors native to the process. We demonstrate both 1520nm wavelength and 1180nm cavity designs using different cavity implementations due to design rule constraints. For the 1520nm and 1180nm designs, loaded quality factors of 2,000 and 4,000 are measured, and intrinsic…
Photonic systems based on microring resonators have a fundamental constrain given by the strict relationship among free spectral range (FSR), total quality factor (QT) and resonator size, intrinsically making filter spacing, photonic lifetime and footprint interdependent. Here we break this paradigm employing CMOS compatible Silicon-on-Insulator (SOI) photonic molecules based on coupled multiple ring resonators. The resonance wavelengths and their respective linewidths are controlled by the hybridization of the quasi-orthogonal photonic states. We demonstrate photonic molecules with doublet an…
Photonic crystal (PhC) nanocavities have demonstrated unique capabilities in terms of light confinement and manipulation. As such, they are becoming attractive for the design of novel resonance-based photonic integrated circuits (PICs). Here two essential challenges arise however - how to realize ultrahigh-Q PhC cavities using standard fabrication processes compatible with large volume fabrication, and how to efficiently integrate them with other standard building blocks, available in exiting PIC platforms. In this work, we demonstrate ultrahigh-Q 1D PhC nanocavities fabricated on a 300 mm SOI…
A recent computational result suggests that highly confined modes can be realized by all-dielectric metamaterials (S. Jahani et. al., Optica 1, 96 (2014)). This substantially decreases crosstalk between dielectric waveguides, paving the way for high-density photonic circuits. Here, we experimentally demonstrate, on a standard silicon-on-insulator (SOI) platform, that using a simple metamaterial between two silicon strip waveguides results in about a 10-fold increase in coupling length. The proposed structure may lead to significant reduction in the size of devices in silicon photonics.
Recent advances in LED technology have allowed the development of high-brightness deep-UV LEDs with potential applications in water purification, gas sensing and as excitation sources in fluorescence microscopy. The emission pattern of an LED is the angular distribution of emission intensity and can be mathematically modelled or measured using a camera, although a general model is difficult to obtain and most CMOS and CCD cameras have low sensitivity in the deep-UV. We report a fluorescence-based method to determine the emission pattern of a deep-UV LED, achieved by converting 280 nm radiation…
Zero-index materials exhibit exotic optical properties that can be utilized for integrated-optics applications. However, practical implementation requires compatibility with complementary metallic-oxide-semiconductor (CMOS) technologies. We demonstrate a CMOS-compatible zero-index metamaterial consisting of a square array of air holes in a 220-nm-thick silicon-on-insulator (SOI) wafer. This design is achieved through a Dirac-cone dispersion. The metamaterial is entirely composed of silicon and offers compatibility through low-aspect-ratio structures that can be simply fabricated in a standard …
We report enhanced nonlinear optics in complementary metal oxide semiconductor compatible photonic platforms through the use of layered two dimensional (2D) graphene oxide (GO) films. We integrate GO films with silicon on insulator nanowires (SOI), high index doped silica glass (Hydex) and silicon nitride (SiN) waveguides and ring resonators, to demonstrate an enhanced optical nonlinearity including Kerr nonlinearity and four wave mixing (FWM). The GO films are integrated using a large area, transfer free, layer by layer method while the film placement and size are controlled by photolithograp…
CMOS-compatible short- and mid-wave infrared emitters are highly coveted for the monolithic integration of silicon-based photonic and electronic integrated circuits to serve a myriad of applications in sensing and communications. In this regard, a group IV germanium-tin (GeSn) material epitaxially grown on silicon (Si) emerges as a promising platform to implement tunable infrared light emitters. Indeed, upon increasing the Sn content, the bandgap of GeSn narrows and becomes direct, making this material system suitable for developing an efficient silicon-compatible emitter. With this perspectiv…
We demonstrate an add-drop filter based on a dual photonic crystal nanobeam cavity system that emulates the operation of a traveling-wave resonator and drops light on resonance to a single output port. Realized on an advanced SOI CMOS (IBM 45nm SOI) chip without any foundry process modifications, the device shows 16dB extinction in through port and 1dB loss in drop port with a 3dB bandwidth of 64GHz. To the best of our knowledge, this is the first implementation of a four-port add-drop filter based on photonic crystal nanobeam cavities.
Graphene has emerged as an ultrafast optoelectronic material for on-chip photodetector applications. The 2D nature of graphene enables its facile integration with complementary metal-oxide semiconductor (CMOS) microelectronics and silicon photonics, yet graphene absorbs only $\sim$2.3% of light. Plasmonic metals can enhance the responsivity of graphene photodetectors, but may result in CMOS-incompatible devices, depending on the choice of metal. Here, we propose a plasmon-enhanced photothermoelectric graphene detector using CMOS-compatible titanium nitride (TiN) on the silicon-on-insulator (SO…
Silicon photonic integration has gained great success in many application fields owing to the excellent optical device properties and complementary metal-oxide semiconductor (CMOS) compatibility. Realizing monolithic integration of III-V lasers and silicon photonic components on single silicon wafer is recognized as a long-standing obstacle for ultra-dense photonic integration, which can provide considerable economical, energy efficient and foundry-scalable on-chip light sources, that has not been reported yet. Here, we demonstrate embedded InAs/GaAs quantum dot (QD) lasers directly grown on t…
We report enhanced nonlinear optics in nanowires, waveguides, and ring resonators by introducing layered two-dimensional (2D) graphene oxide (GO) films through experimental demonstration. The GO films are integrated on silicon-on-insulator nanowires (SOI), high index doped silica glass, and silicon nitride (SiN) waveguides and microring resonators (MRRs), to demonstrate an improved optical nonlinearity including Kerr nonlinearity and four-wave mixing (FWM). By using a large-area, transfer-free, layer-by-layer GO coating method with photolithography and lift-off processes, we integrate GO films…
Photonic integrated circuits that exploit nonlinear optics in order to generate and process signals all-optically have achieved performance far superior to that possible electronically - particularly with respect to speed. Although silicon-on-insulator has been the leading platform for nonlinear optics for some time, its high two-photon absorption at telecommunications wavelengths poses a fundamental limitation. We review the recent achievements based in new CMOS-compatible platforms that are better suited than SOI for nonlinear optics, focusing on amorphous silicon and Hydex glass. We highlig…
The majority of silicon photonics is built on silicon-on-insulator (SOI) wafers while the majority of electronics, including CPUs and memory, are built on bulk silicon wafers, limiting broader acceptance of silicon photonics. This discrepancy is a result of silicon photonics's requirement for a single-crystalline silicon (c-Si) layer and a thick undercladding for optical guiding that bulk silicon wafers to not provide. While the undercladding problem can be partially addressed by substrate removal techniques, the complexity of co-integrating photonics with state-of-the-art transistors and real…
We design a resistive heater optimized for efficient and low-loss optical phase modulation in a silicon-on-insulator (SOI) waveguide and characterize the fabricated devices. Modulation is achieved by flowing current perpendicular to a new ridge waveguide geometry. The resistance profile is engineered using different dopant concentrations to obtain localized heat generation and maximize the overlap between the optical mode and the high temperature regions, while simultaneously minimizing optical loss due to free-carrier absorption. A 61.6 micrometer-long phase shifter was fabricated in a CMOS p…
Digital accelerators in the latest generation of CMOS processes support multiply and accumulate (MAC) operations at energy efficiencies spanning 10-to-100~fJ/Op. But the operating speed for such MAC operations are often limited to a few hundreds of MHz. Optical or optoelectronic MAC operations on today's SOI-based silicon photonic integrated circuit platforms can be realized at a speed of tens of GHz, leading to much lower latency and higher throughput. In this paper, we study the energy efficiency of integrated silicon photonic MAC circuits based on Mach-Zehnder modulators and microring reson…
