原位S/TEM制备MEMS实验用无污染电子透明金属样品的方法
A contamination-free electron-transparent metallic sample preparation method for MEMS experiments with in situ S/TEM
摘要：
微机电系统（MEMS）目前正在支持材料科学和冶金学的突破性基础研究，因为它们允许在各种不同条件下，例如在超快加热和淬火速率下的极端材料动态以及复杂的电化学环境中，在电子显微镜内对纳米级材料进行原位实验。MEMS电子芯片的电子透明样品制备仍然是这项技术的一个挑战，因为现有的方法可能会引入污染物，从而破坏实验和结果分析。在此，我们介绍了一种简单，快速的MEMS电子芯片的电子透明样品制备方法，没有显着的污染。的样品的质量，以及它们的性能在MEMS电子芯片实验在原位的电子显微镜内进行评估，在热处理的交叉AlMgZn（Cu）合金。
英文摘要：
Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron-microscopes in a wide variety of different conditions such as extreme materials dynamics under ultrafast heating and quenching rates as well as in complex electro-chemical environments. Electron-transparent sample preparation for MEMS e-chips remains a challenge for this technology as the existing methodologies can introduce contaminants, thus disrupting the experiments and the analysis of results. Herein we introduce a methodology for simple and fast electron-transparent sample preparation for MEMS e-chips without significant contamination. The quality of the samples as well as their performance during a MEMS e-chip experiment in situ within an electron-microscope are evaluated during a heat treatment of a crossover AlMgZn(Cu) alloy.
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