Particle lofting from substrate exposed to plasma and electron beam
英文摘要：
A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from the combination of these two sources with the help of particle-in-cell simulation to investigate the particle lofting phenomenon. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.
机构、总结、中文摘要均由AI分析而来，可能存在错误，请以论文正文为准。
