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arXiv 2001.07992physics.app-phphysics.comp-phphysics.plasm-ph
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Dielectric particle lofting from dielectric substrate exposed to low energy electron beam

P. V. Krainov, V. V. Ivanov, D. I. Astakhov, M. A. van de Kerkhof, V. V. Kvon, V. V. Medvedev, A. M. Yakunin

英文摘要:

The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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