arXivDaily arXiv每日学术速递 周一至周五更新
arXiv 2011.08125physics.app-ph
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用于激发超声共振的AlN-薄膜换能器玻璃器件的制造、表征和模拟

Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances

André G. Steckel, Henrik Bruus, Paul Muralt, Ramin Matloub

摘要:

我们目前的制造570微米厚,毫米大小的钠钙硅酸盐浮法玻璃块与1微米厚的AlN薄膜压电式传感器夹在薄金属电极和沉积在顶面。机电性能的特征在于在0.1至10 MHz的频率范围内的电阻抗测量,其中0.5 V的峰-峰电压施加到电极。我们测量了35个装置的电阻抗谱,所有装置的宽度均为2 mm,但具有9种不同的长度,范围从2 mm到6 mm,并且每个单独的几何形状具有2-7个副本。每个阻抗谱都有许多共振峰,我们仔细测量了每个谱中最突出的5个共振峰。我们将得到的173个实验共振频率与我们已经开发的有限元方法模型的模拟结果进行比较。当使用来自制造商的材料参数时,我们获得173个模拟谐振频率与实验谐振频率的平均相对偏差为(-4.2 +/-0.04)%。当在模拟中优化浮法玻璃的杨氏模量和泊松比的值时,该相对偏差减小到(-0.03 +/-0.04)%。我们的研究结果提出了一种方法,用于准确地在现场测定声学参数在超声频率的任何弹性固体上的薄膜换能器可以连接

英文摘要:

We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electro-mechanical properties are characterized by electrical impedance measurements in the frequency range from 0.1 to 10 MHz with a peak-to-peak voltage of 0.5 V applied to the electrodes. We measured the electrical impedance spectra of 35 devices, all of width 2 mm, but with 9 different lengths ranging from 2 to 6 mm and with 2-7 copies of each individual geometry. Each impedance spectrum exhibits many resonance peaks, of which we carefully measured the 5 most prominent ones in each spectrum. We compare the resulting 173 experimental resonance frequencies with the simulation result of a finite-element-method model that we have developed. When using material parameters from the manufacturer, we obtain an average relative deviation of the 173 simulated resonance frequencies from the experimental ones of (-4.2 +/-0.04)%. When optimizing the values of the Young's modulus and the Poisson ratio of the float glass in the simulation, this relative deviation decreased to (-0.03 +/- 0.04)%. Our results suggest a method for an accurate in-situ determination of the acoustic parameters at ultrasound frequencies of any elastic solid onto which a thin-film transducer can be attached

机构、总结、中文摘要均由AI分析而来,可能存在错误,请以论文正文为准。

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