We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The electro-mechanical properties are characterized by electrical impedance measurements in the frequency range from 0.1 to 10 MHz with a peak-to-peak voltage of 0.5 V applied to the electrodes. We measured the electrical impedance spectra of 35 devices, all of width 2 mm, but with 9 different lengths ranging from 2 to 6 mm and with 2-7 copies of each individual geometry. Each impedance spectrum exhibits many resonance peaks, of which we carefully measured the 5 most prominent ones in each spectrum. We compare the resulting 173 experimental resonance frequencies with the simulation result of a finite-element-method model that we have developed. When using material parameters from the manufacturer, we obtain an average relative deviation of the 173 simulated resonance frequencies from the experimental ones of (-4.2 +/-0.04)%. When optimizing the values of the Young's modulus and the Poisson ratio of the float glass in the simulation, this relative deviation decreased to (-0.03 +/- 0.04)%. Our results suggest a method for an accurate in-situ determination of the acoustic parameters at ultrasound frequencies of any elastic solid onto which a thin-film transducer can be attached
Optomechanical transducers for gigahertz frequency ultrasound imaging
Sandia National Laboratories(桑迪亚国家实验室);James C. Wyant College of Optical Sciences, University of Arizona(亚利桑那大学詹姆斯·C·怀安特光学学院);Electrical, Computer and Energy Engineering, University of Colorado, Boulder(科罗拉多大学博尔德分校电气、计算机与能源工程学院)
Characterization of ultrasound transmit-receive measurement systems in air: Comparison with prior work on piezoelectric elements in radial mode vibration
Precise control of high-frequency ultrasounds in thin crystals for the development of tunable narrowband and directional gamma-ray sources
Institute of Plasma Physics and Lasers (IPPL), Hellenic Mediterranean University(希伦尼克地中海大学等离子体物理与激光研究所);Physical Acoustics and Optoacoustics Laboratory, Department of Music Technology and Acoustics, Hellenic Mediterranean University(希伦尼克地中海大学音乐技术与声学系物理声学与光声实验室)