T. Helk, E. Berger, S. Jamnuch, L. Hoffmann, A. Kabacinski, J. Gautier, F. Tissandier, J. P. Goddet, H. -T. Chang, J. Oh, C. D. Pemmaraju, T. A. Pascal, S. Sebb… 展开作者
T. Helk, E. Berger, S. Jamnuch, L. Hoffmann, A. Kabacinski, J. Gautier, F. Tissandier, J. P. Goddet, H. -T. Chang, J. Oh, C. D. Pemmaraju, T. A. Pascal, S. Sebban, C. Spielmann, M. Zuerch
备注：
16 pages, 3 main text figures, 1 supplementary table, 6 supplementary figures
The lack of available table-top extreme ultraviolet (XUV) sources with high enough fluxes and coherence properties have limited the availability of nonlinear XUV and x-ray spectroscopies to free electron lasers (FEL). Here, we demonstrate second harmonic generation (SHG) on a table-top XUV source for the first time by observing SHG at the Ti M2,3-edge with a high harmonic seeded soft x-ray laser (HHG-SXRL) [1,2]. Further, this experiment represents the first SHG experiment in the XUV. First-principles electronic structure calculations are used to confirm the surface specificity and resonant enhancement of the SHG signal. The realization of XUV-SHG on a table-top source with femtosecond temporal resolution opens up tremendous opportunities for the study of element-specific dynamics in multi-component systems where surface, interfacial, and bulk-phase asymmetries play a driving role in smaller-scale labs as opposed to FELs.
We demonstrate high resolution extreme ultraviolet (EUV) coherent diffractive imaging in the most general reflection geometry by combining ptychography with tilted plane correction. This method makes it possible to image extended surfaces at any angle of incidence. Refocused light from a tabletop coherent high harmonic light source at 29 nm illuminates a nanopatterned surface at 45 degree angle of incidence. The reconstructed image contains quantitative amplitude and phase (in this case pattern height) information, comparing favorably with both scanning electron microscope and atomic force mic…
High harmonic generation (HHG) enables extreme ultraviolet radiation with table-top setups. Its exceptional properties, such as coherence and (sub)-femtosecond pulse durations, have led to a diversity of applications. Some of these require a high photon flux and megahertz repetition rates, e.g. to avoid space charge effects in photoelectron spectroscopy. To date this has only been achieved with enhancement cavities. Here, we establish a novel route towards powerful HHG sources. By achieving phase-matched HHG of a megahertz fibre laser we generate a broad plateau (25 eV - 40 eV) of strong harmo…
Extreme ultraviolet (XUV) lasers are essential for the investigation of fundamental physics. Especially high repetition rate, high photon flux sources are of major interest for reducing acquisition times and improving signal to noise ratios in a plethora of applications. Here, an XUV source based on cascaded frequency conversion is presented, which delivers due to the drastic better single atom response for short wavelength drivers, an average output power of (832 +- 204) μW at 21.7 eV. This is the highest average power produced by any HHG source in this spectral range surpassing precious demo…
We demonstrate single and multi-shot Fourier transform holography with the use of a tabletop extreme ultraviolet laser. The reference wave was produced by a Fresnel zone plate with a central opening that allowed the incident beam to illuminate the sample directly. The high reference wave intensity allows for larger objects to be imaged compared to mask-based lensless Fourier transform holography techniques. We obtain a spatial resolution of 169 nm from a single laser pulse and a resolution of 128 nm from an accumulation of 20 laser pulses for an object ~11x11μm 2 in size. This experiment utili…
We performed extreme ultraviolet spectroscopy using an 80 lines/mm TEM mesh as dispersive element. We present the usefulness of this instrument for dispersing a high harmonic spectrum from the 13th to the 29th harmonic of a Ti:Sapph laser, corresponding to a wavelength range from 60 to 27 nm. The resolution of the instrument is limited by the image size of the high harmonic generation region on the detector. The best resolution in first order diffraction is under 2 nm over the entire spectral range.
We demonstrate a novel imaging approach and associated reconstruction algorithm for far-field coherent diffractive imaging, based on the measurement of a pair of laterally sheared diffraction patterns. The differential phase profile retrieved from such a measurement leads to improved reconstruction accuracy, increased robustness against noise, and faster convergence compared to traditional coherent diffractive imaging methods. We measure laterally sheared diffraction patterns using Fourier-transform spectroscopy with two phase-locked pulse pairs from a high harmonic source. Using this approach…
Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At the same time, EUV radiation has significantly larger penetration depths than electrons. It thus enables a nano-scale view into complex three-dimensional structures that are important for material science, semiconductor metrology, and next-generation nano-devices. Here, we present high-resolution and material-specific microscopy at 13.5 nm wavelength. We com…
Extreme-ultraviolet (XUV) light is notoriously difficult to control due to its strong interaction cross-section with media. We demonstrate a method to overcome this problem by using Opto-Optical Modulation guided by a geometrical model to shape XUV light. A bell-shaped infrared light pulse is shown to imprint a trace of its intensity profile onto the XUV light in the far-field, such that a change in the intensity profile of the infrared pulse leads to a change in the shape of the far-field XUV light. The geometrical model assists the user in predicting the effect of a specific intensity profil…
We propose an effective scheme for the generation of intense coherent extreme ultraviolet light beams carrying orbital angular momentum (OAM). The light is produced by a high-gain harmonic-generation free-electron laser (FEL), seeded using a laser pulse with a transverse staircase-like phase pattern. During amplification, diffraction and mode selection drive the radiation profile towards a dominant OAM mode at saturation. With a seed laser at 260 nm, gigawatt power levels are obtained at wavelengths approaching those of soft x-rays. Compared to other proposed schemes to generate OAM with FELs,…
We propose a method for a straightforward characterization of the temporal shape of femtosecond pulses in the extreme-ultraviolet/soft X-ray spectral region. The approach is based on the presence of a significant linear frequency chirp in the pulse. This allows to establish an homothetic relation between the pulse spectrum and its temporal profile. The theoretical approach is reminiscent of the one employed by Fraunhofer for describing far-field diffraction. As an application, we consider the case of a seeded free-electron laser (FEL). Theory is successfully benchmarked with numerical simulati…
We report here a detailed study of the four-wave mixing process in the extreme ultraviolet (XUV) region around 30 nm by using two collinear incommensurate frequency laser pulses. The experimental results reveal evidence of the coherent accumulation of the wave-mixing fields and low-order (third-order and fifth-order) nonlinear response of an argon medium. The dependence of the intensities of the mixing fields on the intensity of a weak control field, on the argon pressure and on the interaction length is analyzed to show that the four-wave mixing fields in this spectral range are generated und…
High harmonic generation (HHG) enables coherent extreme-ultraviolet (XUV) radiation with ultra-short pulse duration in a table-top setup. This has already enabled a plethora of applications. Nearly all of these applications would benefit from a high photon flux to increase the signal-to-noise ratio and decrease measurement times. In addition, shortest pulses are desired to investigate fastest dynamics in fields as diverse as physics, biology, chemistry and material sciences. In this work, the up-to-date most powerful table-top XUV source with 12.9 mW in a single harmonic line at 26.5 eV is dem…
We report on the development of a high-order harmonic generation (HHG)-based ultrafast high-repetition-rate (250 kHz) monochromatic extreme ultraviolet (21.6 eV) source with polarization tunability, specifically designed for multi-modal dichroism in time- and angle-resolved photoemission spectroscopy. Driving HHG using an annular beam allows us to spatially separate the high-power 515 nm driving laser from the XUV beamlet while preserving the linear polarization axis angle tunability. This enables controlling the polarization state of the XUV radiation with a fixed all-reflective phase-shifter…
We report on the experimental evidence of magnetic helicoidal dichroism, observed in the interaction of an extreme ultraviolet vortex beam carrying orbital angular momentum with a magnetic vortex. Numerical simulations based on classical electromagnetic theory show that this dichroism is based on the interference of light modes with different orbital angular momenta, which are populated after the interaction between the light phase chirality and the magnetic topology. This observation gives insight into the interplay between orbital angular momentum and magnetism, and sets the framework for th…
We present a table-top extreme ultraviolet (XUV) beamline for measuring time- and frequency-resolved XUV excited optical luminescence (XEOL) with additional femtosecond-resolution XUV transient absorption spectroscopy functionality. XUV pulses are generated via high-harmonic generation using a near-infrared pulse in a noble gas medium, and focused to excite luminescence from a solid sample. The luminescence is collimated and guided into a streak camera, where its spectral components are temporally resolved with picosecond temporal resolution. We time-resolve XUV excited luminescence and compar…
A robust method for producing half-cycle - few-cycle pulses in mid-infrared to extreme ultraviolet spectral ranges is proposed. It is based on coherent undulator radiation of relativistic ultrathin electron layers, which are produced by microbunching of ultrashort electron bunches by a TW power laser in a modulator undulator. According to our numerical calculations it is possible to generate as short as 10 nm long electron layers in a single-period modulator undulator having an undulator parameter of only K=0.25 and which is significantly shorter than the resonant period length. By using these…
Infrared and visible light beams carrying orbital angular momentum (OAM) are currently thoroughly studied for their extremely broad applicative prospects, among which are quantum information, micromachining and diagnostic tools. Here we extend these prospects, presenting a comprehensive study for the synthesis and full characterization of optical vortices carrying OAM in the extreme ultraviolet (XUV) domain. We confirm the upconversion rules of a femtosecond infrared helically phased beam into its high-order harmonics, showing that each harmonic order carries the total number of OAM units abso…
We demonstrate a new scheme of spectromicroscopy in the extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at different wavelengths is imaged simultaneously. It is enabled by applying ptychographical information multiplexing (PIM) to a tabletop EUV source based on high harmonic generation, where four spectrally narrow harmonics near 30 nm form a spectral comb structure. Extending PIM from previously demonstrated visible wavelengths to the EUV/X-ray wavelengths promises much higher spatial resolution and more powerful spectral contrast mechanism, making PIM an a…
Design strategies for efficient, fabrication-feasible extreme-ultraviolet metalens
Friedrich Schiller University Jena（耶拿弗里德里希·席勒大学）；Institute of Applied Physics, Abbe Center of Photonics（应用物理研究所，阿贝光学中心）；Fraunhofer Institute for Applied Optics and Precision Engineering IOF（弗劳恩霍夫应用光学和精密工程研究所 IOF）；Helmholtz Institute Jena（耶拿赫尔姆霍茨研究所）；GSI Helmholtzzentrum für Schwerionenforschung（GSI 重离子研究中心）；Max Plank School of Photonics（马克斯·普朗克光子学院）
High harmonic generation is a convenient way to obtain extreme ultraviolet light from table-top laser systems and the experimental tools to exploit this simple and powerful light source for time-resolved spectroscopy are being developed by several groups. For these applications, brightness and stability of the high harmonic generation is a key feature. This article focuses on practical aspects in the generation of extreme ultraviolet pulses with ultrafast commercial lasers, namely generation parameters and online monitoring as well as analysis of generation yield and stability.
In this paper, a method for solving the initial structure of an off-axis multi-mirror system applied to extreme ultraviolet (EUV) lithography using a paraxial ray-tracing algorithm based on Seidel aberration theory is proposed. By tracing the characteristic rays in the reflection system, the height and paraxial angle on each surface can be obtained, then through the relationship between the Seidel aberration coefficient and these parameters, the initial structure with good aberration performance can be solved. We can obtain different initial structures by adding different initial condition con…
The interaction of strong near-infrared (NIR) laser pulses with wide-bandgap dielectrics produces high harmonics in the extreme ultraviolet (XUV) wavelength range. These observations have opened up the possibility of attosecond metrology in solids, which would benefit from a precise measurement of the emission times of individual harmonics with respect to the NIR laser field. Here we show that, when high-harmonics are detected from the input surface of a magnesium oxide crystal, a bichromatic probing of the XUV emission shows a clear synchronization largely consistent with a semiclassical mode…
Coherent extreme ultraviolet (XUV) radiation produced by table-top high-harmonic generation (HHG) sources provides a wealth of possibilities in research areas ranging from attosecond physics to high resolution coherent imaging. However, it remains challenging to fully exploit the coherence of such sources for interferometry and Fourier transform spectroscopy (FTS). This is due to the need for a measurement system that is stable at the level of a wavelength fraction, yet allowing a controlled scanning of time delays. Here we demonstrate XUV interferometry and FTS in the 17-55 nm wavelength rang…
Simulations of light scattering off an extreme ultraviolet lithography mask with a 2D-periodic absorber pattern are presented. In a detailed convergence study it is shown that accurate results can be attained for relatively large 3D computational domains and in the presence of sidewall-angles and corner-roundings.
In this work, we numerically investigate an experimentally feasible design of a tapered Ne-filled hollow-core anti-resonant fiber and we report the generation of multiple dispersive waves (DWs) in the range 90-120 nm, well into the extreme ultraviolet (UV) region. The simulations assume an 800 nm pump pulse with 30 fs 10 $μ$J pulse energy, launched into a 9 bar Ne-filled fiber with $34~μ$m initial core diameter that is then tapered to a $10~μ$m core diameter. The simulations were performed using a new model that provides a realistic description of both loss and dispersion of the resonant and a…
We demonstrate experimentally the full tunability of a coherent femtosecond source in the whole ultraviolet spectral region. The experiment relies on the technique of high-order harmonic generation driven by a near-infrared parametric laser source in krypton gas. By tuning the drive wavelength in the range between 1100 to 1900 nm, we generated intense harmonics from near to extreme ultraviolet. A number of photons per shot of the order of 10^7 has been measured for the first harmonic orders. Many novel scientific prospects are expected to benefit from the use of such a table-top tunable source…
Novel table-top sources of extreme-ultraviolet light based on high-harmonic generation yield unique insight into the fundamental properties of molecules, nanomaterials, or correlated solids, and enable advanced applications in imaging or metrology. Extending high-harmonic generation to high repetition rates portends great experimental benefits, yet efficient extreme-ultraviolet conversion of correspondingly weak driving pulses is challenging. Here, we demonstrate a highly efficient source of femtosecond extreme-ultraviolet pulses at 50-kHz repetition rate, utilizing the ultraviolet second-harm…
Self-action nonlinearity is a key aspect -- either as a foundational element or a detrimental factor -- of several optical spectroscopies and photonic devices. Supercontinuum generation, wavelength converters and chirped pulse amplification are just a few examples. The recent advent of Free Electron Lasers (FEL) fostered building on nonlinearity to propose new concepts and extend optical wavelengths paradigms for extreme ultraviolet (EUV) and X-ray regimes. No evidence for intrapulse dynamics, however, has been reported at such short wavelengths, where the light-matter interactions are ruled b…
Circularly-polarized extreme UV and X-ray radiation provides valuable access to the structural, electronic and magnetic properties of materials. To date, this capability was available only at large-scale X-ray facilities such as synchrotrons. Here we demonstrate the first bright, phase-matched, extreme UV circularly-polarized high harmonics and use this new light source for magnetic circular dichroism measurements at the M-shell absorption edges of Co. We show that phase matching of circularly-polarized harmonics is unique and robust, producing a photon flux comparable to the linearly polarize…
Lensless imaging is an elegant approach to high-resolution microscopy, which is rapidly gaining popularity in applications where imaging optics are problematic. However, current lensless imaging methods require objects to be placed within a well-defined support structure, while the light source needs to have a narrow, stable, and accurately known spectrum. Here we introduce a general approach to lensless imaging without spectral bandwidth limitations or sample requirements. We use two time-delayed coherent light pulses, and show that scanning the pulse-to-pulse time delay allows the reconstruc…
A compact high repetition rate attosecond light source based on a standard laser oscillator combined with plasmonic enhancement is presented. At repetition rates of tens of MHz, we predict focusable pulses with durations of ~< 300 attoseconds, and collimation angles ~< 5 degrees. Attosecond pulse parameters are robust with respect variations of driver pulse focus and duration.
We present a study of the highly nonlinear optical excitation of noble gases in tapered hollow waveguides using few-femtosecond laser pulses. The local plasmonic field enhancement induces the generation of a nanometric plasma, resulting in incoherent extreme-ultraviolet fluorescence from optical transitions of neutral and ionized xenon, argon, and neon. Despite sufficient intensity in the waveguide, high-order harmonic generation is not observed. The fluorescent emission exhibits a strong bistability manifest as an intensity hysteresis, giving strong indications for multistep collisional excit…
Electromagnetically induced transparency-like behavior in the extreme ultraviolet (XUV) is studied theoretically, including the effect of intense 800 nm laser dressing of He 2s2p (1Po) and 2p^2 (1Se) autoionizing states. We present an ab initio solution of the time-dependent Schrodinger equation (TDSE) in an LS-coupling configuration interaction basis set. The method enables a rigorous treatment of optical field ionization of these coupled autoionizing states into the N = 2 continuum in addition to N = 1. Our calculated transient absorption spectra show encouraging agreement with experiment.
We present a novel setup to measure the transverse magneto-optical Kerr effect in the extreme ultraviolet spectral range at exceptionally high repetition rates based on a fiber laser amplifier system. This affords a very high and stable flux of extreme ultraviolet light, which we use to measure element-resolved demagnetization dynamics with unprecedented depth of information. Furthermore, the setup is equipped with a strong electromagnet and a cryostat, allowing measurements between 10 and 420 K using magnetic fields up to 0.86 T. The performance of our setup is demonstrated by a set of temper…
Vigorous efforts to harness the topological properties of light have enabled a multitude of novel applications. Translating the applications of structured light to higher spatial and temporal resolutions mandates their controlled generation, manipulation, and thorough characterization in the short-wavelength regime. Here, we resort to high-order harmonic generation (HHG) in a noble gas to upconvert near-infrared (IR) vector, vortex, and vector-vortex driving beams that are tailored respectively in their Spin Angular Momentum (SAM), Orbital Angular Momentum (OAM), and simultaneously in their SA…
Circularly polarized extreme ultraviolet (XUV) radiation is highly interesting for investigation of chirality-sensitive light-matter interactions. Recent breakthroughs have enabled generation of such light sources via high harmonic generation (HHG) from rare gases. There is a growing interest in extending HHG medium from gases to solids, especially to 2D materials, as they hold great promise to develop ultra-compact solid-state photonic devices and provide insights into electronic properties of the materials themselves. However, HHG in graphene driven by terahertz to mid-infrared fields report…
We report on the generation of intense extreme ultraviolet (EUV) supercontinuum with photon energies spanning from 35 eV to 50 eV (i. e., supporting an isolated attosecond pulse with a duration of ~271 as) by loosely focusing 35 fs, 11 mJ pulses from a femtosecond laser amplifier into a 10-mm long gas cell filled with krypton gas. The dramatic change of spectral and temporal properties of the driver pulses after passing through the gas cell indicates that propagation effects play a significant role in promoting the generation of the EUV supercontinuum.
In order to design broadband extreme ultraviolet multilayers with many objectives, the multiobjective genetic algorithm and the multiobjective genetics algorithm with reference direction have been improved and combined used. The certain conflicting relations between three primary design objectives have been obtained by analyzing the distribution of nondominated solutions, and the multilayer designs with critical average reflectivities have been found. Basing on the multiobjective genetics algorithm with reference direction, the exact multilayer design has been obtained by guiding the searching…
In this study the generation of energetic coherent extreme ultraviolet (XUV) radiation with controlled polarization, is reported. The XUV radiation results from the process of high harmonic generation (HHG), in a gas phase atomic medium, driven by an intense two-color circularly polarized counter-rotating laser field, under loose focusing geometry conditions. The energy of the XUV radiation emitted per laser pulse is found to be of the order of ~100 nJ with the spectrum spanning from 17 to 26 eV. The demonstrated energy values along with tight focusing geometries is sufficient to induce nonlin…
Nonlinear spectroscopy in the extreme ultraviolet (EUV) and soft x-ray spectral range offers the opportunity for element selective probing of ultrafast dynamics using core-valence transitions (Mukamel et al., Acc. Chem. Res. 42, 553 (2009)). We demonstrate a step on this path showing core-valence sensitivity in transient grating spectroscopy with EUV probing. We study the optically induced insulator-to-metal transition (IMT) of a VO2 film with EUV diffraction from the optically excited sample. The VO2 exhibits a change in the 3p-3d resonance of V accompanied by an acoustic response. Due to the…
Interferometric pump-probe experiments in the extreme ultraviolet (XUV) domain are experimentally very challenging due to the high phase stability required between the XUV pulses. Recently, an efficient phase stabilization scheme was introduced for seeded XUV free electron lasers (FELs) combining shot-to-shot phase modulation with lock-in detection. This method stabilized the seed laser beampath on the fundamental ultraviolet wavelength to a high degree. Here, we extend this scheme including the stabilization of the XUV beampath, incorporating phase fluctuations from the FEL high gain harmonic…
Recent progress in laser-based high-repetition rate extreme ultraviolet (EUV) lightsources and multidimensional photoelectron spectroscopy enable the build-up of a new generation of time-resolved photoemission experiments. Here, we present a setup for time-resolved momentum microscopy driven by a 1 MHz femtosecond EUV table-top light source optimized for the generation of 26.5 eV photons. The setup provides simultaneous access to the temporal evolution of the photoelectron's kinetic energy and in-plane momentum. We discuss opportunities and limitations of our new experiment based on a series o…
The development of schemes for coherent nonlinear time-domain spectroscopy in the extreme-ultraviolet regime (XUV) has so far been impeded by experimental difficulties that arise at these short wavelengths. In this work we present a novel experimental approach, which facilitates the timing control and phase cycling of XUV pulse sequences produced by harmonic generation in rare gases. The method is demonstrated for the generation and high spectral resolution characterization of narrow-bandwidth harmonics ($\approx14\,$eV) in argon and krypton. Our technique simultaneously provides high phase st…
We demonstrate a tilted pulse-front transient grating technique that allows to optimally utilize time-resolution as well as transient grating line density while probing under grazing incidence as typically done in extreme ultraviolet (EUV) or soft x-ray (SXR) experiments. Our optical setup adapts the pulse front tilt of the two pulses that create the transient grating to the relative tilt grazing incident pulse. We demonstrate the technique using all 800 nm femtosecond laser pulses for transient grating generation on a vanadium dioxide film. We probe that grating via diffraction of a third 800…
Independently from electron beam based procedures, photon beam based diagnostics is an alternative way for alignment and commissioning of the numerous undulator cells in a high-gain short-wavelength free-electron laser (FEL). In this paper, using the seed laser modulated electron beam and the undulator fine tuning technique, a coherent photon beam based diagnostic was proposed for seeded FEL, and some preliminary experimental results at Shanghai deep ultraviolet FEL test facility were presented. It demonstrates that the spatial distribution of the coherent harmonic radiation from one individua…
Time- and angle-resolved photoelectron spectroscopy (trARPES) employing a 500 kHz extreme-ultravioled (XUV) light source operating at 21.7 eV probe photon energy is reported. Based on a high-power ytterbium laser, optical parametric chirped pulse amplification (OPCPA), and ultraviolet-driven high-harmonic generation, the light source produces an isolated high-harmonic with 110 meV bandwidth and a flux of more than $10^{11}$ photons/second on the sample. Combined with a state-of-the-art ARPES chamber, this table-top experiment allows high-repetition rate pump-probe experiments of electron dynam…
Many atomic and molecular systems of fundamental interest possess resonance frequencies in the extreme ultraviolet (XUV) where laser technology is limited and radiation sources have traditionally lacked long-term phase coherence. Recent breakthroughs in XUV frequency comb technology have demonstrated spectroscopy with unprecedented resolution at the megahertz level, but even higher resolutions are desired for future applications in precision measurement. By characterizing heterodyne beats between two XUV comb sources, we demonstrate the capability for sub-hertz spectral resolution. This corres…
