Variation of voltage profiles with different time scales leads to the redistribution of deposited energy as well as electro-hydrodynamic forces, while the mechanism and scaling law is still unknown. On the basis of theoretical and numerical analysis, we show that a secondary surface ionization wave forms during the voltage rising slope when electron density decreases to a critical level while the voltage is still rising. A characteristic map of energy and electro-hydrodynamics force in time scales between 1~ns and 0.1~s at atmospheric pressure is proposed, opening the door towards the target--directed design of surface discharges.
A program to compute photo-ionization functions and fitting parameters for an efficient photo-ionization model is presented. The code integrates the product of spectrum emission intensity, the photo-ionization yield and the absorption coefficient to calculate the photo-ionization function of each gas and the total photo-ionization function of the mixture. The coefficients of Helmholtz photo-ionization model is obtained by fitting the total photo-ionization function. A database consisting $\rm N_2$, $\rm O_2$, $\rm CO_2$ and $\rm H_2O$ molecules are included and can be modified by the users. Th…
Spatiotemporal dynamics of nanosecond pulsed discharge in the form of a fast ionization wave: self-consistent two-dimensional modeling and comparison with experiments under negative and positive polarity
Laboratory of Plasma Physics (CNRS, Ecole Polytechnique, Univ. Paris-Sud, Observatoire de Paris, Sorbonne Université, l’Institut Polytechnique de Paris), Ecole Polytechnique（等离子体物理实验室（法国国家科学研究中心、巴黎综合理工学院、巴黎南大学、巴黎天文台、索邦大学、巴黎理工学院），巴黎综合理工学院）
Discharges with crossed electric and magnetic fields are known to develop instabilities that are crucial in the transport of charged particles. Sputtering magnetrons are no exception. While most recent studies focused on traveling ionization zones in high power impulse magnetron sputtering, we show here fast camera images of magnetron discharges at very low current. A single drifting ionization zone is always present, even down to the threshold current of about 10 mA.
In this paper we use a hydrodynamic minimal streamer model to study negative corona discharge. By reformulating the model in terms of a quantity called shielding factor, we deduce laws for the evolution in time of both the radius and the intensity of ionization fronts. We also compute the evolution of the front thickness under the conditions for which it diffuses due to the geometry of the problem and show its self-similar character.
Previous studies of streamer discharge branching mechanisms have mainly been generative other than predictive. To predict or even control branching, a reliable connection between experimental conditions and streamer branching needs to be established. As an important step toward the goal, in this work, a 2D deterministic model of negative streamers in air is numerically solved with the ionization seeds assumed as the superposition of Gaussians. The "indicative profiles approach" developed here can consistently relate the change in a quantitative measure of geometrical irregularity of the seed p…
A subnanosecond breakdown in high-voltage pulse discharge is studied in experiment and in kinetic simulations for mid-high pressure in helium. It is shown that the characteristic time of the current growth can be controlled by the secondary electron emission. We test the influence of secondary electron yield on plasma parameters for three types of cathodes made from titanium, silicon carbide and CuAlMg-alloy. By changing the pulse voltage amplitude and gas pressure, the area of existence of subnanosecond breakdown is identified.
The paper is devoted to the proof of the uniqueness theorem for solution of the equation for the non-local ionization source in a glow discharge and a hollow cathode in general 3D geometry. The theorem is applied to wide class of electric field configurations, and to the walls of discharge volume, which have a property of incomplete absorption of the electrons. Cathode is regarded as interior singular source, which is placed arbitrarily close to the wall. The existence of solution is considered also. During the proof of the theorem many of useful structure formulae are obtained. Elements of th…
The Maxwell time is a typical time scale for the screening of an electric field in a medium with a given conductivity. We introduce a generalization of the Maxwell time that is valid for gas discharges: the \emph{ionization screening time}, that takes the growth of the conductivity due to impact ionization into account. We present an analytic estimate for this time scale, assuming a planar geometry, and evaluate its accuracy by comparing with numerical simulations in 1D and 3D. We investigate the minimum plasma density required to prevent the growth of streamers with local field enhancement, a…
The ballistic population is thought to be responsible for alleviating the electron shading effect and the notching of the photoresist layer. We have performed test-particle simulations where the features in the EVDF of electrons impacting the RF electrode are fully resolved at all energies. An analytic model has been developed to predict existence of peaked and step-like structures in the EVDF.
This research focuses on interaction of ionization waves (IW) generated in long discharge tubes (1 m length and 1.5 cm in diameter) filled with neon or argon under pressure about 1 Torr and, in particular, on simplest case of such interference which is collision of the opposite directed IW of positive polarity. The waves were triggered from two electrodes of the tube by simultaneous application of the same high voltage pulse and propagated toward the tube center until their collision. Space and time stability of the collisions was achieved via decreasing time delay of the initial breakdowns wh…
In a recent paper Sijacic and Ebert have systematically studied the transition from Townsend to glow discharge, refering to older work from von Engel (1934) up to Raizer (1991), and they stated a strong dependendence on secondary emission $γ$ from the cathode. We here show that the earlier results of von Engel and Raizer on the small current expansion about the Townsend limit actually are the limit of small $γ$ of the new expression; and that for larger $γ$ the old and the new results vary by no more than a factor of 2. We discuss the $γ$-dependence of the transition which is rather strong for…
A hybrid kinetic-fluid model is used to study ionization waves (striations) in a low-current plasma column of DC discharges in noble gases. Coupled solutions of a kinetic equation for electrons, a drift-diffusion equation of ions, and a Poisson equation for the electric field are obtained to clarify the nature of plasma stratification in the positive column and near-electrode effects. A simplified two-level excitation-ionization model is used for the conditions when the nonlinear effects due to stepwise ionization, gas heating, and Coulomb interactions among electrons are negligible. It is con…
An interesting aspect of complex plasma is its ability to self-organize into a variety of structural configurations and undergo transitions between these states. A striking phenomenon is the isotropic-to-string transition observed in electrorheological complex plasma under the influence of a symmetric ion wakefield. Such transitions have been investigated using the Plasma Kristall-4 (PK-4) microgravity laboratory on the International Space Station (ISS). Recent experiments and numerical simulations have shown that, under PK-4 relevant discharge conditions, the seemingly homogeneous DC discharg…
A shape of the signals in proportional chamber with preamplification gap and electron component extraction from proportional discharge has been investigated. It was shown for Penning mixtures that in proportional discharge besides the primary avalanches there is also the tail of secondary avalanches caused by metastable and nonmetastable Penning effects. For different mixtures of gases the duration of the signals caused by secondary avalanches are equal to ~ n*10 microseconds (n = 1 - 10), the total charge of secondary avalanches is comparable or larger than in primary avalanches.
We investigate streamer formation in the troposphere, in electric fields above the breakdown threshold. With fully three-dimensional particle simulations, we study the combined effect of natural background ionization and of photoionization on the discharge morphology. In previous investigations based on deterministic fluid models without background ionization, so-called double-headed streamers emerged. But in our improved model, many electron avalanches start to grow at different locations. Eventually the avalanches collectively screen the electric field in the interior of the discharge. This …
In steady-state, the plasma loss rate to the chamber wall is balanced by the ionization rate in the hot-filament discharges. This balance in the loss rate and ionization rate maintains the quasi--neutrality of the bulk plasma. In this report, we have studied the properties of bulk plasma in the presence of an auxiliary (additional) biased metal disk, which is working as a sink, in low-pressure helium plasma. A single Langmuir probe and emissive probe are used to characterize the plasma for various biases (positive and negative) to the metal disk, which was placed along the discharge axis insid…
We apply the Ionization Region Model (IRM) and the Orsay Boltzmann equation for ELectrons coupled with Ionization and eXcited states kinetics (OBELIX) model to study the electron kinetics of a high power impulse magnetron sputtering (HiPIMS) discharge. In the IRM the bulk (cold) electrons are assumed to exhibit a Maxwellian energy distribution and the secondary (hot) electrons, emitted from the target surface upon ion bombardment, are treated as a high energy tail, while in the OBELIX the electron energy distribution is calculated self-consistently using an isotropic Boltzmann equation. The tw…
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is the generation of secondary electrons (SEs), which significantly influence the discharge when accelerated in the sheath electric field. However, SEs, in particular electron-induced SEs ($\updelta$-electrons), are frequently neglected in theory and simulations. Due to the relatively high threshold energy for the effective generation of $\updelta$-electrons at…
Revealing the transient ionization dynamics and mode-coupling mechanisms of helicon discharge through a self-consistent multiphysics model
Chongqing University（重庆大学）；University of Science and Technology of China（中国科学技术大学）；Peking University（北京大学）；Lomonosov Moscow State University（莫斯科国立罗蒙诺索夫大学）；Kyushu University（九州大学）；Chungnam National University（忠南国立大学）
Positive streamers need a source of free electrons ahead of them to propagate. A streamer can supply these electrons by itself through photo-ionization, or the electrons can be present due to external background ionization. Here we investigate the effects of background ionization on streamer propagation and morphology by changing the gas composition and the repetition rate of the voltage pulses, and by adding a small amount of radioactive Krypton 85. We find that the general morphology of a positive streamer discharge in high purity nitrogen depends on background ionization: at lower backgroun…
Photonic Interactions with Semiconducting Barrier Discharges
Laboratoire de Physique des Plasmas, Centre National de la Recherche Scientifique, École polytechnique, Institut Polytechnique de Paris, Sorbonne Université（等离子体物理实验室，法国国家科学研究中心，巴黎综合理工学院，巴黎理工学院，索邦大学）
The focusing of a secondary shock wave was experimentally recorded during the implementation of an extended nanosecond high-current discharge of a cylindrical configuration in air. Using high-speed shadowgraph recording (up to 300 000 frames/s) of the emerging unsteady flow, cylindrically symmetric gas-dynamic discontinuities were visualized: a diverging shock wave moving from the discharge plasma boundary, a diverging contact discontinuity separating the shock-heated gas from the nonequilibrium region excited by the discharge plasma, and also a converging compression wave (secondary shock wav…
It is well known that the non-thermal plasma processes using electrical discharge or electron beam are effective for the environmental pollutant removal. Especially, the electron beam can efficiently remove pollutant, because a lot of radicals which are useful to remove pollutant can be easily produced by high-energy electrons. We have developed a compact 100kV secondary emission electron gun to apply NOX removal. The device offers several inherent advantages such as compact in size, wide and uniform electron beam. Besides, the device offers good capability in high repetition rate pulsed opera…
An argon-xenon (Ar/Xe) plasma is used as a model system for complex plasmas. Based on this system, symmetric low-pressure capacitively coupled radio-frequency discharges are examined utilizing Particle-In-Cell/Monte Carlo Collisions (PIC/MCC) simulations. In addition to the simulation, an analytical energy balance model fed with the simulation data is applied to analyze the findings further. This work focuses on investigating the ion dynamics in a plasma with two ion species and a gas mixture as background. By varying the gas composition and driving voltage of the single-frequency discharge, f…
In the ionization region above circular planar magnetrons well defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. Once their mode is stabilized, these structures rotate in the E x B direction with a constant rotation frequency in the hundreds of kHz range. A phenomenological model of the phenomenon is developed, in the form of a system of nonlinear coupled partial differential equations. The system is solved analytically in a frame co-moving with the structure, and its solution gives the neutral density and the plasma density once the electron d…
The post-discharge of an RF plasma torch supplied with helium and oxygen gases is characterized by mass spectrometry, optical emission spectroscopy and electrical measurements. We have proved the existence of a dc current in the post-discharge (1--20 A), attributed to the Penning ionization of atmospheric nitrogen and oxygenated species. The mechanisms ruling this dc current are investigated through experiments in which we discuss the influence of the O2 flow rate, the He flow rate and the distance separating the plasma torch from a material surface located downstream.
The specific form of one electrode capacitive discharge was studied in long tubes filled with high purity neon or argon at pressure 1-4 Torr. The main feature of the discharge is the low rate (less than 10 kHz) of the voltage pulses of given polarity which are applied to only one electrode of the tube, while another one remains free or missing. This type of the discharge was named one-electrode discharge (OED), and seems not to be described in previous studies. The discharge is observed as a glowing plasma column which occupies either entire tube or its part dependent on actual voltage amplitu…
We conducted experimental studies and computer simulations of standing striations in capacitive coupled plasma in Argon gas. Standing striations were observed at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10 Torr, tube radius R=1.1 cm, for a certain range of discharge currents (plasma densities). Numerical simulations revealed similar nature of standing striations in CCP and moving striations in DC discharges under similar discharge conditions. Comparison of computer simulations with experimental observations helped clarify the nature of these striations. The non-linear depend…
A novel radio-frequency antenna consisting of isolated solenoids is reported to generate plasma for pressure up to thousands of pascals. The underlying mechanism involves capacitive coupling, inductive coupling and axial confinement from magnetic mirrors. It can ionize the air reliably with pressure up to $2500$~Pa for the $1$~kW-$13.56$~MHz power supply employed, and maintain the discharge steadily from tens of minutes to hours. This ionization method is particularly useful for plasma propulsion in near space and other low-temperature plasma applications where sub-atmospheric pressure is requ…
Spectroscopic investigations of the properties of a plasma produced by a flashboard plasma source, commonly used in pulsed plasma experiments, are presented. The plasma is used to prefill a planar 0.4-ms-conduction time plasma opening switch (POS). A novel gas-doping technique and a secondary surface flashover plasma source are used to locally dope the plasma with gaseous and solid materials, respectively, allowing for spatially-resolved measurements. The electron density, temperature, and plasma composition are determined from spectral line intensities and line profiles. Detailed collisional-…
One-dimensional particle-in-cell simulation is used to simulate the capacitively coupled argon plasma for a range of driving frequency from 13.56 MHz to 100 MHz. The argon chemistry set can, selectively, include two metastable levels enabling multi-step ionization and metastable pooling. The results show that the plasma density decreases when metastable atoms are included with higher discrepancy at higher excitation frequency. The contribution of multistep ionization to overall density increases with excitation frequency. The electron temperature increases with the inclusion of metastable atom…
This paper describes how to light several microdischarges in parallel without having to individually ballast each one. The V-I curve of a microhollow cathode discharge is characterized by a constant voltage in the normal glow regime because the plasma is able to spread over the cathode surface area to provide the additional secondary electrons needed. If one limits the cathode surface area, the V-I characteristic can be forced into an abnormal glow regime in which the operating voltage must increase with the current. It is then possible to light several microdischarges mounted in parallel with…
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very high frequency capacitively coupled plasma (CCP) excited by a saw-tooth like current waveform. Two current densities, 50 A/m2 and 100 A/m2 are chosen for a constant gas pressure of 5 mTorr in argon plasma. The driving frequency is varied from 13.56 MHz to 54.24 MHz. At a lower driving frequency, high frequency modulations on the instantaneous sheath edge position at the grounded electrode are observed. These high freque…
Long wavelength plasma non-uniformities rotating in the azimuthal direction ("rotating spokes") have been observed in a number of experiments on Hall thrusters or magnetron discharges. We use a two-dimensional (2D), axial-azimuthal Particle-In-Cell Monte Carlo Collisions (PIC-MCC) model to study the formation of instabilities in a direct current (dc) magnetron discharge under conditions close to recent experiments. In spite of the simplified 2D geometry of the model, the simulations can reproduce the main features of the experimental results. At a given position above the cathode, correspondin…
Azimuthal structures in cylindrical Penning discharge are studied with 2D3V radial-azimuthal PIC/MCC model with the axial magnetic field. The discharge is self-consistently supported by ionization due to the axial injection of electrons. It is shown that the steady-state discharge can be supported in two different regimes with different type of observed azimuthal structures. The transition between the regimes is controlled by the mechanism of the energy input to the discharge. In the first regime (low energy of the injected electrons), with the pronounced $m=1$ spoke activity, the power input …
Applications of dielectric barrier discharge (DBD) based atmospheric pressure plasma jets are often limited by the relatively small area of treatment due to their 1D configuration. This letter describes the first results demonstrating generation of 2D plasma bullets and 2D plasma jets permitting fast treatment of large targets. Imaging of pulsed DBD in He and ionization wave propagation along the dielectric surface show that DBD evolution starts with formation of transient anode glow, and only then continues with development of cathode-directed streamers. The anode glow can propagate as an ion…
In the positive column of a neon glow discharge, two different types of ionization waves occur simultaneously. The low-dimensional chaos arising from the nonlinear interaction between the two waves is controlled by a continuous feedback technique. The control strategy is derived from the time-delayed autosynchronization method. Two spatially displaced points of observation are used to obtain the control information, using the propagation characteristics of the chaotic wave.
The ionization efficiency of helicon plasma discharge is explored by changing the low axial magnetic field gradients near the helicon antenna. The highest plasma density is found for a most possible diverging field near the antenna by keeping the other operating condition constant. Measurement of axial wave number together with estimated radial wavenumber suggests the oblique mode propagation of helicon wave along the resonance cone boundary. Propagation of helicon wave near the resonance cone angle boundary can excite electrostatic fluctuations which subsequently can deposit energy in the pla…
Dynamics of an impulse dielectric barrier discharge in pure ammonia gas using electrical characteristics and imaging analysis
Institut Jean Lamour, Université de Nancy（让·拉缪尔研究所，南锡大学）；Groupe de Recherches sur l’Énergétique des Milieux Ionisés, Université d’Orléans（离子介质能源研究组，奥尔良大学）
In this work, we present the results of simulations carried out for N2-H2 capacitively coupled radio-frequency discharges, running at low pressure (0.3-0.9 mbar), low power (5-20 W), and for amounts of H2 up to 5 pct. Simulations are performed using a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles in the discharge, to a zero-dimensional kinetic module, that solves the Boltzmann equation and describes the production and destruction of neutral species. The model accounts for the production of several vibrationally and elec…
Hollow cathode discharges (HCD) are capable of generating dense plasmas and have been used for development of high-rate, low-pressure, high-efficiency processing machines. The geometric feature of a HCD promotes oscillations of hot electrons inside the cathode, thereby enhancing ionization, ion bombardment of inner walls and other subsequent processes. At the same power the hollow cathode exhibits plasma density one to two orders of magnitude higher than that of conventional planar electrodes. The aim of the present studies was to obtain experimental observations about the main features of a d…
The mixing of N2 with H2 leads to very different plasmas from pure N2 and H2 plasma discharges. Numerous issues are therefore raised involving the processes leading to ammonia (NH3) formation. The aim of this work is to better characterize capacitively-coupled radiofrequency plasma discharges in N2 with few percents of H2 (up to 5 pct), at low pressure (0.3 to 1 mbar) and low coupled power (3 to 13 W). Both experimental measurements and numerical simulations are performed. For clarity, we separated the results in two complementary parts. The actual one (first part), presents the details on the…
Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms. At a base frequency of 13.56 MHz, three different waveforms namely, sinusoidal, saw-tooth, and square are applied for a constant current density of 50 A/m2 and 5 mTorr argon gas pressure. The simulation results show that the square waveform produces the highest plasma density in the discharge, whereas maximum asymmetry is observed for plasma excited by sawtooth like waveform. Both square and sawtoo…
In this work we investigate a numerical model of a coaxial RF-driven plasma jet operated at atmospheric pressure. Due to the cylindrical symmetry an adequate 2-D representation of the otherwise 3-dimensional structure is used. A helium-oxygen chemistry reaction scheme is applied. We study the effect of secondary electrons emitted at the inner electrode as well as the inserted dielectric tube and discuss their impact on the discharge behavior. We conclude that a proper choice of materials can improve the desired mode of operation of such plasma jets in terms of materials and surface processing.
