改进的结构光调制分析技术污染和缺陷检测数学模型
Improved mathematical models of structured-light modulation analysis technique for contaminant and defect detection
摘要：
光学元件的表面质量检测在光学和电子工业中至关重要。结构光调制分析技术（SMAT）是近年来提出的一种用于镜面和透明物体表面污染和缺陷检测的新方法，该方法在消除环境光方面具有良好的效果。根据光度学原理和污染物和缺陷的光学特性，分析并建立了SMAT的机理和数学模型。然而，在实际检测过程中，仍有一些现象成为难题，无法得到很好的解释。为了更好地分析实际情况下的现象，本文基于污染物和缺陷的表面形貌建立了改进的SMAT数学模型。这些数学模型可以作为分析不同系统中各种污染物和缺陷的工具，并为后续工作提供有效的指导。对干涉条纹的调制和光通量进行了仿真和实验，验证了数学模型的正确性。此外，利用正弦方向相互垂直的条纹图，将两幅调制图像进行融合，解决了调制响应差异导致的信息获取不完整问题。
英文摘要：
Surface quality inspection of optical components is critical in optical and electronic industries. Structured-Light Modulation Analysis Technique (SMAT) is a novel method recently proposed for the contaminant and defect detection of specular surfaces and transparent objects, and this approach was verified to be effective in eliminating ambient light. The mechanisms and mathematical models of SMAT were analyzed and established based on the theory of photometry and the optical characteristics of contaminants and defects. However, there are still some phenomena exist as conundrums in actual detection process, which cannot be well explained. In order to better analyze the phenomena in practical circumstances, improved mathematical models of SMAT are constructed based on the surface topography of contaminants and defects in this paper. These mathematical models can be used as tools for analyzing various contaminants and defects in different systems, and provide effective instruction for subsequent work. Simulations and experiments on the modulation and the luminous flux of fringe patterns have been implemented to verify the validity of these mathematical models. In adddition, by using the fringe patterns with mutually perpendicular sinusoidal directions, two obtained modulation images can be merged to solve the incomplete information acquisition issue caused by the differentiated response of modulation.
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