Coherent diffractive imaging is a technique that recovers the sample image by numerically inverting its diffraction pattern. We propose a generalization of this method for the inversion of multi-wavelength data. Using this approach, we show that separate reconstructions for each wavelength can be recovered from a single polychromatic diffraction pattern. Limitations on the number of wavelengths is provided by adapting the constraint ratio to the polychromatic situation. The method's performance is demonstrated as a function of the source spectrum, the degree of complexity within the exit wave and the sample geometry using several numerical simulations. Lastly, an example shows the ability to recover element-specific information using two harmonics selected from a high-order harmonic generation source.
Coherent diffractive imaging (CDI) is widely used to characterize structured samples from measurements of diffracting intensity patterns. We introduce a numerical framework to quantify the precision that can be achieved when estimating any given set of parameters characterizing the sample from measured data. The approach, based on the calculation of the Fisher information matrix, provides a clear benchmark to assess the performance of CDI methods. Moreover, by optimizing the Fisher information metric using deep learning optimization libraries, we demonstrate how to identify the optimal illumin…
We propose a method for designing multifocal diffractive lenses generating prescribed sets of foci with fixed positions at several different wavelengths. The method is based on minimizing the difference between the complex amplitudes of the beams generated by the lens microrelief at the design wavelengths, and the functions of complex transmission of multifocal lenses calculated for these wavelengths. As an example, a zone plate generating three fixed foci at three different wavelengths was designed, fabricated and experimentally investigated. The proof-of-concept experimental results confirm …
In this work, issues in phase retrieval in the coherent diffractive imaging (CDI) technique, from discussion on parameters for setting up a CDI experiment to evaluation of the goodness of the final reconstruction, are discussed. The distribution of objects under study by CDI often cannot be cross-validated by another imaging technique. It is therefore important to make sure that the developed CDI procedure delivers an artifact-free object reconstruction. Critical issues that can lead to artifacts are presented and recipes on how to avoid them are provided.
We report deep learning-based design of a massively parallel broadband diffractive neural network for all-optically performing a large group of arbitrarily-selected, complex-valued linear transformations between an input and output field-of-view, each with N_i and N_o pixels, respectively. This broadband diffractive processor is composed of N_w wavelength channels, each of which is uniquely assigned to a distinct target transformation. A large set of arbitrarily-selected linear transformations can be individually performed through the same diffractive network at different illumination waveleng…
The complete characterization of spatial coherence is difficult because the mutual coherence function is a complex-valued function of four independent variables. This difficulty limits the ability of controlling and optimizing spatial coherence in a broad range of key applications. Here we propose a method for measuring the complete mutual coherence function, which does not require any prior knowledge and can be scaled to measure arbitrary coherence properties for any wavelength. Our method can also be used to retrieve objects illuminated by partially coherent beam with unknown coherence prope…
We present the experimental reconstruction of sub-wavelength features from the far-field intensity of sparse optical objects: sparsity-based sub-wavelength imaging combined with phase-retrieval. As examples, we demonstrate the recovery of random and ordered arrangements of 100 nm features with the resolution of 30 nm, with an illuminating wavelength of 532 nm. Our algorithmic technique relies on minimizing the number of degrees of freedom; it works in real-time, requires no scanning, and can be implemented in all existing microscopes - optical and non-optical.
Three-dimensional (3D) direct laser writing is a powerful technology to create nano- and microscopic optical devices. While the design freedom of this technology offers the possibility to reduce different monochromatic aberrations, reducing chromatic aberrations is often neglected. In this Letter, we successfully demonstrate the combination of refractive and diffractive surfaces to create a refractive/diffractive achromat and show, to the best of our knowledge, the first refractive/diffractive apochromat by using DOEs and simultaneously combining two different photoresists, namely IP-S and IP-…
The inversion of a diffraction pattern offers aberration-free diffraction-limited 3D images without the resolution and depth-of-field limitations of lens-based tomographic systems, the only limitation being radiation damage. We review our experimental results, discuss the fundamental limits of this technique and future plans.
Flat lenses enable thinner, lighter, and simpler imaging systems. However, large-area and high-NA flat lenses have been elusive due to computational and fabrication challenges. Here, we applied inverse design to create a multi-level diffractive lens (MDL) with thickness <1.35μm, diameter of 4.13mm, NA=0.9 at wavelength of 850nm. Since the MDL is created in polymer, it can be cost-effectively replicated via imprint lithography.
Wavelength-multiplexed massively parallel diffractive optical information storage and image projection
Electrical and Computer Engineering Department, University of California, Los Angeles（加州大学洛杉矶分校电气与计算机工程系）；Bioengineering Department, University of California, Los Angeles（加州大学洛杉矶分校生物工程系）；California NanoSystems Institute (CNSI), University of California, Los Angeles（加州大学洛杉矶分校加州纳米系统研究所）；Department of Computer Science, University of California, Los Angeles（加州大学洛杉矶分校计算机科学系）
Wavelength-Multiplexed 2D Beam Steering via a Passive Diffractive Network
Electrical and Computer Engineering Department, University of California, Los Angeles（加州大学洛杉矶分校电气与计算机工程系）；Bioengineering Department, University of California, Los Angeles（加州大学洛杉矶分校生物医学工程系）；California NanoSystems Institute (CNSI), University of California, Los Angeles（加州大学洛杉矶分校加州纳米系统研究所）
Dispersion problem has always constrained the development of see-through near-eye displays with diffractive waveguide. Here, we propose a design method and optical systems for achromatic surface microstructure composed with a triple-carved-sub-grating. The triple-carved-sub-grating with specified period is designed based on rigorous coupled wave theory, corresponding to Red, Green and Blue (RGB) wavelengths, respectively, with diffraction efficiencies of 1st(-1st) orders reach 47.5% under TE polarization. The surface microstructure with period of 18.9um is realized by integrating the three sub…
Coherent diffractive imaging of individual free nanoparticles has opened novel routes for the in-situ analysis of their transient structural, optical, and electronic properties. So far, single-shot single-particle diffraction was assumed to be feasible only at extreme ultraviolet (XUV) and X-ray free-electron lasers, restricting this research field to large-scale facilities. Here we demonstrate single-shot imaging of isolated helium nanodroplets using XUV pulses from a femtosecond-laser driven high harmonic source. We obtain bright wide-angle scattering patterns, that allow us to uniquely iden…
Coherent diffractive imaging has enabled the structural analysis of individual free nanoparticles in a single shot and offers the tracking of their light induced dynamics with unprecedented spatial and temporal resolution. The retrieval of structural information from scattering images in CDI experiments is so far mostly based on the assumption of classical scattering in linear response. For strong laser fields and in particular for resonant excitations, both the linear and the classical description may no longer be valid as population depletion and stimulated emission become important. Here we…
Attosecond science has been transforming our understanding of electron dynamics in atoms, molecules and solids. However, to date almost all of the attoscience experiments have been based on spectroscopic measurements because attosecond pulses have intrinsically very broad spectra due to the uncertainty principle and are incompatible with conventional imaging systems. Here we report an important advance towards achieving attosecond coherent diffractive imaging. Using simulated attosecond pulses, we simultaneously reconstruct the spectrum, 17 probes and 17 spectral images of extended objects fro…
We propose an efficient inverse design approach for multifunctional optical elements based on adaptive deep diffractive neural networks (a-D$^2$NNs). Specifically, we introduce a-D$^2$NNs and design two-layer diffractive devices that can selectively focus incident radiation over two well-separated spectral bands at desired distances. We investigate focusing efficiencies at two wavelengths and achieve targeted spectral lineshapes and spatial point-spread functions (PSFs) with optimal focusing efficiency. In particular, we demonstrate control of the spectral bandwidths at separate focal position…
We demonstrate a novel imaging approach and associated reconstruction algorithm for far-field coherent diffractive imaging, based on the measurement of a pair of laterally sheared diffraction patterns. The differential phase profile retrieved from such a measurement leads to improved reconstruction accuracy, increased robustness against noise, and faster convergence compared to traditional coherent diffractive imaging methods. We measure laterally sheared diffraction patterns using Fourier-transform spectroscopy with two phase-locked pulse pairs from a high harmonic source. Using this approach…
The critical properties of functional materials and nanoscale devices often originate from the coexistence of different thermodynamic phases and / or oxidization states, but sample makeup is seldom completely known a priori. Coherent diffractive imaging (CDI) provides the spatial resolution needed to observe nanoscale coexistence while returning the full amplitude and phase information of an object, but to date lacks the spectral information necessary for composition identification. Here we demonstrate CDI spectroscopy (CDIS), acquiring images of the prototypical quantum material vanadium oxid…
Ptychography enables coherent diffractive imaging (CDI) of extended samples by raster scanning across the illuminating XUV/X-ray beam thereby generalizing the unique advantages of CDI techniques. Table-top realizations of this method are urgently needed for many applications in sciences and industry. Previously, it was only possible to image features much larger than the illuminating wavelength with table-top ptychography although knife-edge tests suggested sub-wavelength resolution. However, most real-world imaging applications require resolving of the smallest and closely-spaced features of …
Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high…
Diffractive zone plate optics uses a thin micro-structure pattern to alter the propagation direction of the incoming light wave. It has found important applications in extreme-wavelength imaging where conventional refractive lenses do not exist. The resolution limit of zone plate optics is determined by the smallest width of the outermost zone. In order to improve the achievable resolution, significant efforts have been devoted to the fabrication of very small zone width with ultrahigh placement accuracy. Here, we report the use of a diffractometer setup for bypassing the resolution limit of z…
Tsinghua University（清华大学）；Beijing National Research Center for Information Science and Technology, Tsinghua University（清华大学北京国家信息科学与技术研究中心）；Institute for Brain and Cognitive Sciences, Tsinghua University（清华大学脑与认知科学研究所）；Beijing Laboratory of Brain and Cognitive Intelligence, Beijing Municipal Education Commission（北京市脑与认知智能实验室，北京市教育委员会）
Photonic neural networks are brain-inspired information processing technology using photons instead of electrons to perform artificial intelligence (AI) tasks. However, existing architectures are designed for a single task but fail to multiplex different tasks in parallel within a single monolithic system due to the task competition that deteriorates the model performance. This paper proposes a novel optical multi-task learning system by designing multi-wavelength diffractive deep neural networks (D2NNs) with the joint optimization method. By encoding multi-task inputs into multi-wavelength ch…
We proposed a broad-spectrum diffractive deep neural network (BS-D2NN) framework, which incorporates multi-wavelength channels of input lightfields and performs a parallel phase-only modulation utilizing a layered passive mask architecture. A complementary multi-channel base learner cluster is formed in a homogeneous ensemble framework based on the diffractive dispersion during lightwave modulation. In addition, both the optical Sum operation and the Hybrid (optical-electronic) Maxout operation are performed for motivating the BS-D2NN to learn and construct a mapping between input lightfields …
We design, fabricate, and characterize multifunctional and compact diffractive microlenses with sub-wavelength thickness and the capability to simultaneously focus visible and near-infrared spectral bands at two different focal positions with 24% and 15% measured focusing efficiency, respectively. Our technology utilizes high-index and low-loss sputtered hydrogenated amorphous Si, enabling a sub-wavelength thickness of only 235nm. Moreover, the proposed flat lens concept is polarization insensitive and can be readily designed to operate across any desired wavelength regime. Imaging under broad…
Coherent diffractive imaging (CDI) provides new opportunities for high resolution X-ray imaging with simultaneous amplitude and phase contrast. Extensions to CDI broaden the scope of the technique for use in a wide variety of experimental geometries and physical systems. Here, we experimentally demonstrate a new extension to CDI that encodes additional information through the use of a series of randomly coded masks. The information gained from the few additional diffraction measurements removes the need for typical object-domain constraints; the algorithm uses prior information about the masks…
Established x-ray diffraction methods allow for high-resolution structure determination of crystals, crystallized protein structures or even single molecules. While these techniques rely on coherent scattering, incoherent processes like Compton scattering or fluorescence emission -- often the predominant scattering mechanisms -- are generally considered detrimental for imaging applications. Here we show that intensity correlations of incoherently scattered x-ray radiation can be used to image the full 3D structure of the scattering atoms with significantly higher resolution compared to convent…
It is generally thought that correcting chromatic aberrations in imaging requires multiple surfaces. Here, we show that by allowing the phase in the image plane of a flat lens to be a free parameter, it is possible to correct chromatic aberrations over an almost unlimited bandwidth with a single diffractive surface. Specifically, we designed, fabricated and characterized a flat multi-level diffractive lens (MDL) that images at the wavelengths from 450nm to 850nm. We experimentally characterized the focusing efficiency, modulation-transfer function, wavefront aberrations, vignetting, distortion…
We report a broadband diffractive optical neural network design that simultaneously processes a continuum of wavelengths generated by a temporally-incoherent broadband source to all-optically perform a specific task learned using deep learning. We experimentally validated the success of this broadband diffractive neural network architecture by designing, fabricating and testing seven different multi-layer, diffractive optical systems that transform the optical wavefront generated by a broadband THz pulse to realize (1) a series of tunable, single passband as well as dual passband spectral filt…
The routine atomic-resolution structure determination of single particles is expected to have profound implications for probing the structure-function relationship in systems ranging from energy materials to biological molecules. Extremely-bright, ultrashort-pulse X-ray sources---X-ray Free Electron Lasers (XFELs)---provide X-rays that can be used to probe ensembles of nearly identical nano-scale particles. When combined with coherent diffractive imaging, these objects can be imaged; however, as the resolution of the images approaches the atomic scale, the measured data are increasingly diffic…
Fibonacci or bifocal terahertz (THz) imaging is demonstrated experimentally employing silicon diffractive zone plate (SDZP) in a continuous wave mode. Images simultaneously recorded in two different planes are exhibited at 0.6 THz frequency with the spatial resolution of wavelength. Multi-focus imaging operation of the Fibonacci lens is compared with a performance of the conventional silicon phase zone plate. Spatial profiles and focal depth features are discussed varying the frequency from 0.3 THz to 0.6 THz. Good agreement between experimental results and simulation data is revealed.
Recently, the multilevel diffractive lenses (MDLs) have attracted considerable attention mainly due to their superior wave focusing performance; however, efforts to correct the chromatic aberration are still in progress. Here, we demonstrate the numerical design and experimental demonstration of high-numerical aperture (NA) (${\sim}0.99$), diffraction-limited achromatic multilevel diffractive lens (AMDL) operating in microwave range $10 GHz$ - $14 GHz$. A multi-objective differential evolution (MO-DE) algorithm is incorporated with the three-dimensional finite-difference time-domain (3D FDTD) …
I present the analysis of a new class of diffractive optical element, the odd-symmetry phase grating, which creates wavelength- and depth-robust features in its near-field diffraction pattern.
Recently, there has been an explosion of interest in metalenses for imaging. The interest is primarily based on their sub-wavelength thicknesses. Diffractive lenses have been used as thin lenses since the late 19th century. Here, we show that multi-level diffractive lenses (MDLs), when designed properly can exceed the performance of metalenses. Furthermore, MDLs can be designed and fabricated with larger constituent features, making them accessible to low-cost, large area volume manufacturing, which is generally challenging for metalenses. The support substrate will dominate overall thickness …
We demonstrate imaging over the visible band using a single planar diffractive lens. This is enabled via multi-level diffractive optics that is designed to focus over a broad wavelength range, which we refer to as an achromatic diffractive lens (ADL). We designed, fabricated and characterized two ADLs with numerical apertures of 0.05 and 0.18. Diffraction-limited focusing is demonstrated for the NA=0.05 lens with measured focusing efficiency of over 40% across the entire visible spectrum (450nm to 750nm). We characterized the lenses with a monochromatic and a color CMOS sensor, and demonstrate…
The replacement of bulk refractive optical elements with diffractive planar components enables the miniaturization of optical systems. However, diffractive optics suffers from large chromatic aberrations due to the dispersion of the phase accumulated by light during propagation. We show that this limitation can be overcome with an engineered wavelength-dependent phase shift imparted by a metasurface and demonstrate a design that deflects three wavelengths without dispersion. A planar lens without chromatic aberrations at three wavelengths is also presented. Our design is based on low-loss diel…
We present a formalism of x-ray dynamical diffraction from volume diffractive optics with large numerical aperture and high aspect ratio, in an analogy to the Takagi-Taupin equations for strained single crystals. We derive a set of basic equations for dynamical diffraction from volume diffractive optics, which enable us to study the focusing property of these optics with various grating profiles. We study volume diffractive optics that satisfy the Bragg condition to various degrees, namely flat, tilted and wedged geometries, and derive the curved geometries required for ultimate focusing. We s…
Surface topography dictates the deterministic functionality of diffraction by a surface. In order to maximize the efficiency with which a diffractive optical component, such as a grating or a diffractive lens, directs light into a chosen order of diffraction, it is necessary that it be "blazed". The efficiency of most diffractive optical components reported so far varies with the wavelength, and blazing is achieved only at a specific nominal energy, the blaze wavelength. The existence of spurious light in undesirable orders represents a severe limitation that prevents using diffractive compone…
Far-field characterization of small objects is severely constrained by the diffraction limit. Existing tools achieving sub-diffraction resolution often utilize point-by-point image reconstruction via scanning or labelling. Here, we present a new imaging technique capable of fast and accurate characterization of two-dimensional structures with at least wavelength/25 resolution, based on a single far-field intensity measurement. Experimentally, we realized this technique resolving the smallest-available to us 180-nm-scale features with 532-nm laser light. A comprehensive analysis of machine lear…
